• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.731-732
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.146-146
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• 2004

최근 전 세계적으로 사람이 직접 작업할 수 없는 환경이나 작은 공간에서의 용이한 작업수행을 위해서 초소형 정밀 기계 기술에 관한 연구 및 개발이 활발하게 이루어지면서 형상기억합금(Shape Memory Alloy ： SMA)을 이용한 초소형 액츄에이터(Micro Actuator)에 관한 관심이 증대되고 있다. 그 이유 중의 하나는 형상기억합금을 이용한 구동 방식은 다른 구동 방식보다 높은 에너지 대 부피비율을 가지고 있기 때문에 기존의 모터에 의한 구동보다 소형화가 간단하기 때문이다.(중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.317-318
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• 2011

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.422-428
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.6
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• pp.132-140
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• 1998

Recently, precision machining technology has been developed continuously in order to make high productivity and quality assurance of the precision parts of several industrial fields. Waviness may occur on the surface of the machined parts due to the table motion error and the dynamic cutting mechanism between the tool and the workpiece. The waviness may fall off the form accuracy of the precision machine parts. In the research, a micro cutting device with piezoelectric actuator has been developed to control precise depth of cut and compensate the waviness on the surface of the workpiece. Experiments have been carried out in the precision lathe. The characteristics of the surface profile and cause of the waviness profile have been analyzed and waviness profiles of some cause have been compared with those of experiments.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.883-889
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• 2005

Micro robots have been developed for many applications: medical, industrial, military, and so on. A small mobile robot was built and it has three legs made of bimorph piezoelectric actuators. It proceeds by vibrating the rear leg and it rotates by vibrating one of the front legs. The locomotion of the robot is described by relative position of mass center and the friction between the legs and the floor. This paper describes the principles of locomotion and modeling of the robot Modeling was simulated to investigate the dynamics of its mobility. The simulation results verified the modeling by showing similar movement of the robot as measured. It remained, however, several problems through experiments such as crooked direction of forward movement and proceeding speed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1067-1070
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• 1995

In this paper, we have treated the modeling and development of three degree of freedom parallel manipulator for micromotion based on the Stewart platform type parallel structure. the kinematic modeling was derived from the relation between base coordinate and platform anr the dynamic modeling was from the method of Kinematic Influence Coefficients(KIC) and transferring of the generalized coordinates. Using this method, we presented the method to choose the actuator and joint by investigating the actuating forces needed when the manipulator moves along the given trajectory. In the end, the prototype manipulator was developmented and evaluated.

• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.32-33
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• 2000

최근 디지털 정보 처리 기술의 획기적인 발전과 함께 저가의 반도체 레이저의 개발로 말미암아 광기록 장치(optical pickup device) 및 고속 광통신(optical fiber communication)분야에 응용을 위한 레이저 광학 시스템에 대한 연구가 활발하다. 광신호의 커플링(coupling) 및 스위칭(switching)을 기반으로 하는 이러한 광학 시스템은 일반적으로 광신호의 변조를 위한 광학 요소와 광학 요소의 공간적 제어를 위한 정밀 구동기로 구성되는데, 기존의 상용 시스템의 경우에는 독립적으로 기 제작된 광학 요소와 정밀 구동기를 사후에 조립하는 방법으로 소기의 목적을 달성하였다. 이와 같은 경우 제작에 많은 노력과 비용이 요구되며, 성능의 획기적인 향상을 기대하기 어려우므로 최근에는 Optical MEMS 혹은 MOEMS(Micro-Opto-Electro-Mechanical System)로 대변되는 마이크로머시닝기술(micromachining technology)을 이용한 초정밀 광학계의 제작 기술을 통하여 기존 시스템의 한계를 극복하고자 하는 노력이 다각도로 모색되고 있다. (중략)

• Journal of the Korean Society for Precision Engineering
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• v.19 no.7
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• pp.59-64
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• 2002

Laser lithography technique is useful for fabricating micro-patterns of silicon wafers. In this work, the laser lithography micromachining technique is optimized based on Taguchi method. Sensitivity analysis was performed using laser scanning speed, laser power level, developing time and mixture ratio between developer and Di-water as the parameters. The results show that for the photoresist used in this work, 70${\mu}m$/s scan speed, 50㎽ laser power, 60sec. developing time and 6: 1 mixture ratio gives the best result. This work shows the effectiveness of laser lithography technique in fabricating patterns with a flew micrometer in width.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.4
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• pp.13-18
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• 2003

This paper presents the in-process compensation to control cutter ronout and to improve the machined surface quality. Cutter ronout compensation system consists of the micro-positioning servo system with piezoelectric actuator which is embeded in the sliding table to manipulate radial depth of cut in real-time. Cutting force feedback control was proposed in the angle domain based upon repetitive learning control strategy to eliminate chip load variation in end milling process. Micro-positioning control due to adaptive actuation force response improves the machined surface quality by cutter ronout compensation.