• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.10
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• pp.194-199
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• 2001

In this paper, we propose a new locomotive mechanism using impulsive force for microcapsule-type endoscope. It has the compact size for movement in the colon and actuating mechanisms for hi-directional movement. The actuating mechanism resembles a pneumatic cylinder and consists of body, inertia mass(piston). spring. pneumatic source and calve. When valve is ON, the pneumatic impulsive force between piston and body drives them in two opposite direction. As the air in the body is passed away, the contrary movements are occurred by spring reaction. Therefore, the direction of body's motion is determined by the relative magnitude of two opposite impulsive forces, i.e., pneumatic and spring force. The effect of two impulsive forces can simply be controlled by On-Off time of solenoid valve.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.215-222
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• 2014

This paper presents an experimental study of a vibration-assisted dry micro-wire electrical discharge machining (${\mu}$-WEDM) utilized in high precision and micro-manufacturing area. The assisted vibration was applied to the workpiece using a piezoelectric actuator, and high pressure air was injected directly into the machining gap through a nozzle. Investigation experiments were performed to estimate the importance of input parameters and it was observed from experiment results that the width (kerf) of the cutting slot and the machining time were significantly affected by the air injection pressure and input energy. Moreover, it was also observed that there exists an optimal relationship between the machining time and input parameters including the air pressure and vibration frequency and amplitude. Central composite design based experiments were also carried out, and empirical models of the machining time and cutting slot kerf have been developed using the response surface methodology to analyze and optimize the process.

• Smart Structures and Systems
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• v.19 no.3
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• pp.309-322
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• 2017

In this paper, the buckling, and free vibration analysis of tapered functionally graded carbon nanotube reinforced composite (FG-CNTRC) micro Reddy beam under longitudinal magnetic field using finite element method (FEM) is investigated. It is noted that the material properties of matrix is considered as Poly methyl methacrylate (PMMA). Using Hamilton's principle, the governing equations of motion are derived by applying a modified strain gradient theory and the rule of mixture approach for micro-composite beam. Micro-composite beam are subjected to longitudinal magnetic field. Then, using the FEM, the critical buckling load, and natural frequency of micro-composite Reddy beam is solved. Also, the influences of various parameters including ${\alpha}$ and ${\beta}$ (the constant coefficients to control the thickness), three material length scale parameters, aspect ratio, different boundary conditions, and various distributions of CNT such as uniform distribution (UD), unsymmetrical functionally graded distribution of CNT (USFG) and symmetrically linear distribution of CNT (SFG) on the critical buckling load and non-dimensional natural frequency are obtained. It can be seen that the non-dimensional natural frequency and critical buckling load decreases with increasing of ${\beta}$ for UD, USFG and SFG micro-composite beam and vice versa for ${\alpha}$. Also, it is shown that at the specified value of ${\alpha}$ and ${\beta}$, the dimensionless natural frequency and critical buckling load for SGT beam is more than for the other state. Moreover, it can be observed from the results that employing magnetic field in longitudinal direction of the micro-composite beam increases the natural frequency and critical buckling load. On the other hands, by increasing the imposed magnetic field significantly increases the stability of the system that can behave as an actuator.

• Journal of the Semiconductor & Display Technology
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• v.3 no.3
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• pp.1-4
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• 2004

Fabrication and electrical and mechanical properties of piezoelectric micro bending actuators (PMBA) using sol-gel-multi-coated thick PZT films and MEMS processes were investigated. PMBA could be used for design and fabrication of micro fluidic devices, for example, micro-pumps, micro dispensers, and so on. PMBA were fabricated using 2 um thick PZT films on Pt (350 nm)/$SiO_2$ (500 nm)/Si ($300\mu\textrm{m}$) substrates and MEMS processes. 7 types of PMBA were fabricated with areas of silicon diaphragms, PZT films and top electrodes. When the sizes of silicon diaphragms, PZT films and Pt top electrodes were reduced from 3000$\times$$1389\mu\textrm{m}$, 4000$\times$$1000\mu\textrm{m}$ and 4000$\times$$900\mu\textrm{m}$ down to 14%, 14% and 11 % of them, respectively, the center displacements of PMBA were decreased from 0.68 um to 0.10 um at 5 Hz and 12 Vpp. So, PMBA with large areas showed larger displacements than PMBA with small areas and experimental results were also good agreement with the plate and shell theory.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.8
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• pp.543-548
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• 2003

In this paper, we have proposed and fabricated a two-axis rotational micro-mirror with large tilt angle. Such a micro-mirror is a key element for N$\times$N high capacity optical cross-connect switches. The micro-mirror is required to have large tilt angle to increase the capacity of the cross-connect switches. For larger micro-mirror tilt angle between the grounded mirror plate and the bottom electrode is to be large enough to provide space for the tilting of the mirror. For our proposed structure, the gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates by using the bulk micromachining technology, and combined later by employing self-align technique. As a result, a large tilt angle has been achieved without using additional actuators. The measured tilt angles were as large as $\pm$5.5$^{\circ}$ and $\pm$8.4$^{\circ}$ in the x and y direction respectively, and the pull-in voltages for the two directions were 380 V and 275 V respectively. Finally the fabricated mirror was successfully utilized to steer the optical beam. To our knowledge, our micro-mirror has the best performance among the micro-mirrors reported internationally so far.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.587-588
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• 2012

• Management & Information Systems Review
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• v.2
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• pp.335-354
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• 1998

In this study I construct CAN(Controller Area Network) for automobiles similar to LAN(Local Area Network) and build communication modules in the major part of an automobile to link several sub-systems. Since each station replaces the communication function of sub-systems and has various types of sensor, actuator, controller, and switch, every information about automobile's status is obtained from the network. The manufactured system showed a superior capability. The following is the contents of study. 1. The definition of communication packet through the analysis of CAN protocol. 2. The Design of modules using micro-controller 80C196CA. 3. The Network configuration.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1361-1364
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• 2004

There is a need for fundamental understanding of biotribological characteristics of various biomaterials sliding against biological materials in order to develop a moving mechanism of medical microsystems having high energy efficiency. A special experimental equipment was designed and built to study the frictional behavior of various biomaterials sliding against a small intestine specimen of a pig. Friction experiments for six biomaterials were performed. Particularly, the effects of load and speed on frictional behavior were investigated. The results of this work will aid in the development of the actuator for a self-propelling micro-endoscope.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.39.1-39
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• 2002

We present nanoactuators and nanodetectors for high-precision Micro Electro Mechanical System (MEMS) applications. Major technical difficulties in the high-precision MEMS are arising from the fabrication uncertainty and electrical noise problems. In this paper, we present high-precision actuators and detectors, overcoming the technical limitations placed by the conventional MEMS technology. For the nano-precision actuation, we present a nonlinearly modulated digital actuator (NMDA). NMDA composed of a digital microactuator and a nonlinear micromechanical modulator. The nonlinear micromechanical modulator is intended to purify the actuation errors in the stroke of the digital a...