• Journal of Mechanical Science and Technology
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• v.19 no.8
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• pp.1544-1553
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• 2005

In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating behavior predicted. The calculated value of the tip deflection was 15 ${\mu}m$ at 5 V. The fabrication process from SIMOX (Separation by oxygen ion implantation) wafer is presented in detail with the PZT film deposition process. The PZT films are characterized by investigating the ferroelectric properties, dielectric constant, and dielectric loss. Tip deflections of 12 ${\mu}m$ at 5 V are measured, which agreed well with the predicted value. The 18 ${\mu}l/s$ leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.703-704
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• 2010

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.652-653
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.741-742
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• 2007

• Journal of Institute of Control, Robotics and Systems
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• v.8 no.4
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• pp.345-350
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• 2002

In recent years, as changing the habit of eating, the pathology in the colon grows up annually. The colonoscopy is generalized, but if requires much time to acquire a dexterous skill to perform an operation and the procedure is painful to the patient. biomedical and robotic researchers are developing a locomotive colonoscope that can travel safe1y in colon. In this paper, we propose a new actuator and concept of semi-autonomous colonoscope. The micro robot comprises camera and LED for diagnosis, steer- ing system to pass through the loop, pneumatic actuator and bow-shaped flexible supporters to control a contact force and to pass over haustral folds in colon. For locomotion of semi-autonomous colonoscope, we suggest an actuator that is based on impact force between a cylinder and a piston. In order to validate the concept and the performance of the actuator, we carried out the simulation of moving characteristics and the preliminary experiments in rigid pipes and on the colon of pig.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.246-250
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• 2003

In this study, two new types of micro-grippers in which micro-fingers are actuated by piezoelectric multi-layer benders and stacks are introduced for the manipulation of micrometer-sized objects. First, we constructed a 3-chopstick-mechanism tungsten gripper, which is composed of three chopsticks: two are designed to grip micro-objects, and tile third is used to help grasp and release the objects through overcoming especially electrostatic force among some surface effects including electrostatic, van der Waals forces and surface tension. Second, a 2-chopstick-mechanism silicon micro-gripper that uses an integrated force sensor to control the gripping force was developed. The micro-gripper is composed of a piezoelectric multilayer bender for actuating the gripper fingers, silicon fingertips fabricated by use of silicon-based micromachining, and supplementary supports. The micro-gripper is referred to as a hybrid-type micro-gripper because it is composed of two main components; micro-fingertips fabricated using micromachining technology to integrate a very sensitive force sensor for measuring the gripping force, and piezoelectric gripper finger actuators that are capable of large gripping forces and moving strokes. The gripping force signal was found to have a sensitivity of 667 N/V. To the design of each of components of both of the grippers. a systematic design approach was applied, which made it possible to establish the functional requirements and design parameters of the micro-grippers. The micro-grippers were installed on a manual manipulator to assess its performance in tasks such as moving micro-objects from one position to a desired position. The experiment showed that the micro-grippers function effectively.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.4
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• pp.176-180
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• 2004

This paper presents the fabrication and test of a micro cell exciter actuated by an electromagnetic force for the study on the chondrogenic differentiation of rabbit mesenchymal stem cells (MSCs). The micro cell exciter is designed to apply compressive loading to the alginate gel mixed with the MSCs. The magnetic cell exciter consists of an actuator component and a cartridge-type chamber component. An actuator is composed of a permanent magnet, a core and a coil. The chamber has seven PMMA wells and a cell culture Petri dish. Two types of alginate gels were stimulated by the cell exciters for 10 minutes every 12 hours for 7 days. In order to determine the expression of these matrix components during differentiation, RT-PCR analysis was performed. Collagen type II was expressed in the MSCs subjected to the compressive stimulation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.3
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• pp.537-543
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• 2002

This paper examines a new in-process measurement system for the measurement of micro-defects on the surfaces of brittle materials by using the AFM (Atomic Force Microscopy). A new AFM scanning stage that can also perform nano-scale bending of the sample was developed by adding a bending unit to a commercially available AFM scanner. The bending unit consists of a PZT actuator and sample holder, and can perform static and cyclic three-point bending. The true bending displacement of the bending unit is approximately 1.8mm when 80 volts are applied to the PZT actuator. The frequency response of the bending unit and the stress on the sample were also analyzed, both theoretically and experimentally. Potential surface defects of the sample were successfully detected by this measurement system. It was confirmed that the number of micro-defects on a scratched surface increases when the surface is subjected to a cyclic bending load.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.723-726
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• 2002

In the recent years, as the research and the development of micro and precision machinery become active, the interest of micro actuators using SMA(Shape Memory Alloy) has been increased. The dynamic characteristic analysis of SMA is necessary for actuator application and many common researches report the material characteristics of SMA sufficiently. However, the research of dynamic characteristics is very deficient. In this paper, the helical spring is fabricated with NiTi SMA wire of high resistivity The farce, response speed, temperature, and displacement are measured by digital force gauge, infrared thermometer, and laser displacement sensor so that the dynamic characteristics of this SMA actuator is analyzed.