• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.477-482
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• 2006

In this study, a micro vapor compressor has been designed, fabricated and tested. The micro vapor compressor was made of silicon substrates and fabricated by micromachining process. The compressor is driven by a piezoelectric actuator which is widely used in microfluidic systems because of its strong force and rapid response. The actuator is a bimorph structure which consists of a silicon membrane and a piezoelectric ceramic film. A simulation work was conducted on the performance characteristics of the compressor. The simulation investigated the flow rate variation under various back pressure conditions. Experimental works were carried out on the operation of a compressor and the test results were compared with the simulation results.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.2
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• pp.48-58
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool, optical device, measurement systen. In order ro keep a high precision displacement resolution, they use a position sensor and feedback the error. From the practical point of view, a high-resolution displacement sensor system are very expensive and difficult to guarantee such sensitive sensors work properly in the hard opera- tion environment of industry. In this study, a micro-positioning grinding table which does not require position sensor but uses piezoelectric voltage feedback, has been developed. It is driven by hystersis-considering reference input voltage which calculated from computer and then uses actuator/sensor characteristics of piezoelectric materials. From the result of experiments we proved a fast and stable response of micro-positioning system and suggested efficient technique to control the piezoelectric actuator. And through grinding experiments, it is revealed that a characteristics of ground surfaces transient to plastic deformation as extremely small depth of grinding.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1793-1797
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory in Yeungnam university, a micromilling machine is developed for micro/meso machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, aerostatic spindle which has maximum 150,000 rpm. It is applicable to milling and drilling of micro scale. This paper presents the possibility of micro/meso machining and characteristics of micro end milling process by using micro machine. A machining of micro parts using 0.2 mm flat end mill was achieved by micro-milling machine. Experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.4
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• pp.276-280
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• 2020

A linear piezoelectric actuator that utilizes the elliptical motion of the two tips of the actuator is proposed. This device is easy to fabricate owing to its simple structure, consisting of three piezo ceramic benders and is suitable for use in micro robotic applications. A π-shaped structure, which was composed of four piezo ceramic benders, was constructed. Two of the benders were positioned on the center of the actuator, and the joints were attached at the ends of the cantilever. The other two benders were positioned on the side of the actuator and were attached between the joint and the tips. The actuator structure was designed to obtain the first bending mode of the horizontal vibration and the vertical vibration at the same frequency, resulting in elliptical motions at the tips. When two sinusoidal wave voltages with a 90-degree phase difference were applied to the two pairs of the actuator benders, elliptical motions were obtained at the tips. The driving characteristics of the prototype actuator were then measured using a laser doppler vibrometer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1203-1206
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory, a micro-milling machine is developed for micro machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, air turbine spindle which has maximum 150.000 rpm. It is applicable to milling and drilling machining. This paper shows the possibility of micro machining and characteristics of micro end milling process by using micro machine. A machining of micro barrier ribs using 0.2 mm flat type end mill was achieved by micro-milling machine. As experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.405-406
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• 2006

• Composites Research
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• v.24 no.6
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• pp.12-17
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• 2011

Interfacial durability and electrical properties of CNT or ITO coated PVDF nanocomposites were investigated for self-sensor and micro actuator applications. Electrical resistivity of nanocomposites for the durability on interfacial adhesion was measured using four points method via fatigue test under cyclic loading. CNT/PVDF nanocomposite exhibited lower electrical resistivity and good self-sensing performance due to inherent electrical property. Durability on the interfacial adhesion was good for both CNT and ITO/PVDF nanocomposites. With static contact angle measurement, surface energy, work of adhesion, and spreading coefficient between either CNT or ITO and PVDF were obtained to verify the correlation with interfacial adhesion durability. The optimum actuation performance of CNT or ITO coated PVDF specimen was measured by the displacement change using laser displacement sensor with changing frequency and voltage. The displacement of actuated nanocomposites decreased with increasing frequency, whereas the displacement increased with voltage increment. Due to nanostructure and inherent electrical properties, CNT/PVDF nanocomposite exhibited better performance as self-sensor and micro actuator than ITO/PVDF case.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.1
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• pp.45-50
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• 2006

This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4mm respectively.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10b
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• pp.197-201
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• 1993

A method for the closedloop control of the torsional tip motion of a piezo-polymer actuator is presented. The application of Lyapunov's direct, method to the problem is explored. A feedback control of the torsional tip motion of tile piezopolymer actuator is derived by considering tile time rate of change of the total energy of the system. If the angular velocity of the tip of the actuator is known, all the modes of tile actuator can be controlled simultaneously. This approach has tile advantage over the conventional methods in the respect that it allows one to directly with tile system's partial differential equations without resorting to approximations.

• 한국전산유체공학회:학술대회논문집
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• 2005.04a
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• pp.65-69
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• 2005

Curretly, the development of MEMS(Micro Electronic Mechanical System) technology awakes many research's interest for the aerodynamics. This work presents the development of a compact synthetic jet actuator for flow separation control at the flat plate. The formation and evolution of fluidic actuators based on synthetic jet technology are investigated using Reynolds-Averaged Navier-Stokes equations. Also, 2-Dimensional, unsteady, incompressible Navier-Stokes equation solver with single partitioning method for Multi-Block grid to analyze and a modeled boundary condition in developed fo. the synthetic jet actuator. Both laminar and turbulent jets are investigated. Results show very good agreement with experimental measurements. A jet flow develops, even though no net mass flow is introduced. Pair of counter-rotating vortices are observed near the jet exit as are observed in the experiments.