• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1344-1348
• /
• 2003

A precision micro-positioning system with a high displacement resolution and wide motion range has been required for industrialized applications in variety fields. This paper discusses the design of a precision micro-rotation stage with flexure hinges. Proposed system is applied to grinding machine for micro parts. Rotational motion is generated with this system. For this systems having a full rotation motion with high precision, a dual servo system with a coarse stage and a fine stage is proposed.

• 유체기계공업학회:학술대회논문집
• /
• 2002.12a
• /
• pp.477-481
• /
• 2002

This paper reports on the development of micro power system component under way at Seoul National University. The need of micro power system is explained and components of micro power system are described. The developments of hydrogen-air micro combustor, micro igniter based poly-silicon heater and micro thruster are described. To manufacture 3-D micro structure the process that manufactures high aspect ratio structures has been developed and optimized. Design, fabrication, and experiment processes are introduced and technical challenges in each phase are described.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.1003-1007
• /
• 2002

Micro-EDM is generally used far machining micro 3-D structure. For micro-EDM, first of all, micro-electrode fabrication is needed and WEDG system is proposed for tool electrode fabrication method. When tool electrode is fabricated using WEDG system, its characteristics are under the control of many EDM parameters. Also relations between the parameters affect electrode fabrication. In this study, experiments are carried out to analyze effects of EDM parameters on micro-electrode fabrication. Experimental method and analysis are used to experimental design method. Factors used in experiments are composed of applied voltage, capacitance, wire feed rate, spindle rotating speed, machining time. As a result of experiments, wire feed rate, machining time and capacitance is proportional to gap distance(material removal), the other parameters(applied voltage, spindle rotating speed) and relations between the parameters have little influence on machining.

• 한국가시화정보학회:학술대회논문집
• /
• 2002.11a
• /
• pp.31-34
• /
• 2002

Imaging techniques using x-ray beam at high energies (>6KeV) such as contact radiography, projection microscopy, and tomography have been used to nondestructively discern internal structure of objects in material science, biology, and medicine. This paper introduces the x-ray micro-imaging method using 1B2 micro-probe line of PAL (Pohang Accelerator Laboratory). Cross-sectional information on low electron density materials can be obtained by probing a sample with coherent synchrotron x-ray beam in an in-line holography setup. Living organism such as plants, insects are practically transparent to high energy x-rays and create phase shift images of x-ray wave front. X-ray micro-images of micro-bubbles of $20\~120\;{\mu}m$ diameter in an opaque tube were recorded. Clear phase contrast images were obtained at Interfaces between bubbles and surrounding liquid due to different decrements of refractive index.

• Journal of the Korea institute for structural maintenance and inspection
• /
• v.22 no.6
• /
• pp.123-129
• /
• 2018

Recently, there has been a growing interest in the study of treatment of $CO_2$ generated by industrial activities and resource recycling of industrial byproducts. The aim of this study is to investigate the applicability of industrial byproducts that can be used as concrete mixed materials by carbonation curing. For this purpose, the physical and chemical changes of the pastes with research cement(RC), blast furnace slag powder (GGBFS) and circulating fluidized bed combustion ashes (CFBC) were evaluated by carbonation curing. XRD and SEM analyzes were performed to investigate micro-structural changes. As a result, it was confirmed that calcium carbonate, which is a reaction product produced by carbonation curing, filled the space inside the paste and formed a dense micro-structure. Also, as the $CO_2$ curing time increased, it was confirmed that calcium carbonate crystals were grown together to form a dense micro-structure.

• Proceedings of the International Microelectronics And Packaging Society Conference
• /
• 2004.11a
• /
• pp.65-65
• /
• 2004

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.8 no.2
• /
• pp.121-127
• /
• 2008

This paper presents design and fabrication of optimized geometry structure of electrostatic inkjet head. In order to verify effect of geometry shape, we simulate electric field intensity according to the head structure. The electric field strength increases linearly with increasing height of the micro nozzle. As the nozzle diameter decreases, the electric field along the periphery of the meniscus can be more concentrated. We design and fabricate the electrostatic inkjet heads, hole type and pole type, with optimized structure. It was fabricated using thick-thermal oxidation and silicon micromachining technique such as the deep reactive ion etching (DRIE) and chemical wet etching process. It is verified experimentally that the use of the MEMS inkjet head allows a stable and sustainable micro-dripping mode of droplet ejection. A stable micro dripping mode of ejection is observed under the voltages 2.5 kV and droplet diameter is $10\;{\mu}m$.

• Journal of the Korean Society for Precision Engineering
• /
• v.31 no.5
• /
• pp.389-394
• /
• 2014

In this paper, we report a new manufacturing method for friction reduction using micro-AAJ (abrasive air-jet) machining. AAJ machining employs compressed air to accelerate a jet of high-speed particles to mechanically machine features, including micro-channels and micro-holes, into glass, metal, or polymer substrates for use in microfluidics, MEMS (micro electromechanical systems). And we introduce the micro-AAJ machining system, which consists of a micro-AAJ nozzle and a five-axis positioning system. Various micro-AAJ nozzles can be used, depending on the required surface structure, and three-dimensional machining is possible. We machined samples under six different conditions and describe machining results obtained while using it. We also measured the coefficient of friction of micro-textured surfaces. We report the coefficient of friction of micro-textured surfaces patterned using micro-AAJ machining for engine piston ring.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.11a
• /
• pp.507-508
• /
• 2010

• Journal of the Korean Society for Precision Engineering
• /
• v.15 no.12
• /
• pp.55-61
• /
• 1998

Recently, the needs of machining technologies of very small parts have been increasing with advent of micro-revolution. These technologies have mostly used the method applied to semi-conductor production process such as LIGA, etc. But they have serious difficulties to settle down in terms of workpiece materials, machining thickness, 3-dimensional structure. Therefore. mciro-machining technology using EDM(Electrical Discharge Machining) was proposed. It is very difficult to machine the micro-parts (microshaft, microhole) using conventional machining. Micro-machining using BDM can machine the micro-parts easily because it requires little machining force. This MEDM(Micro-EDM) need the capabilities to move a electrode and control a discharge energy precisely, and the gap control strategy to maintain the optimal discharge condition is necessary. Therefore, in this study, the new EDM machine with high precision motion stage and high-performance EDM device was developed. Using this MEDM machine, we have machined microshaft and microhole with various shapes and sizes.