• 제목/요약/키워드: Micro-Patterns

검색결과 619건 처리시간 0.025초

태양전지 실리콘 웨이퍼에서의 레일리기준 기반 레이저산란 패턴 분석 및 결함 검출 (Investigation of Laser Scattering Pattern and Defect Detection Based on Rayleigh Criterion for Crystalline Silicon Wafer Used in Solar Cell)

  • 연정승;김경범
    • 한국정밀공학회지
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    • 제28권5호
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    • pp.606-613
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    • 2011
  • In this paper, patterns of laser scattering and detection of micro defects have been investigated based on Rayleigh criterion for silicon wafer in solar cell. Also, a new laser scattering mechanism is designed using characteristics of light scattering against silicon wafer surfaces. Its parameters are to be optimally selected to obtain effective and featured patterns of laser scattering. The optimal parametric ranges of laser scattering are determined using the mean intensity of laser scattering. Scattering patterns of micro defects are investigated at the extracted parameter region. Among a lot of pattern features, both maximum connected area and number of connected component in patterns of laser scattering are regarded as the important information for detecting micro defects. Their usefulness is verified in the experiment.

프리즘 패턴의 기계적 절삭 가공 (Mechanical Machining of Prism pattern)

  • 유영은;홍성민;제태진;최두선
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
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    • pp.110-113
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    • 2005
  • In recent, various shapes of pattern in micron or nano scale are adapted in many applications due to their good mechanical or optical properties. Light guide panel (LGP) of the LCD is one of important applications for micro pattern and micro prism shape is one of the typical patterns. Many applications have the patterns on their surface and the size of the pattern keep decreasing down to the order of micron or even under micron. On the other hand, the area to be patterned keeps enlarging. These two trends in patterned products require tooling micro patterns on large surface, which has still many technical problems to be solved mainly due to pattern size and the tooling area. In this study, we fabricate prism shape of patterns using diamond cutting tool on some metal core and plastic core like PMMA Some of cutting conditions are investigated including cutting force, cutting depth and speed for different core materials.

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STAVAX 강의 마이크로 밀링 중 가공 방향 및 절삭유체 분사형태에 따른 표면 거칠기 경향에 관한 연구 (A study on surface roughness depending on cutting direction and cutting fluid type during micro-milling on STAVAX steel)

  • 이동원;이현화;김진수;김종수
    • Design & Manufacturing
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    • 제17권2호
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    • pp.22-26
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    • 2023
  • As Light-Emitting Diodes(LEDs) continue to advance in performance, their application in automotive lamps is increasing. Automotive LEDs utilize light guides not only for aesthetics but also to control light quantity and direction. Light guides employ patterns of a few hundred micrometers(㎛) to regulate the light, and the surface roughness(Ra) of these patterns can reach tens of nanometers(nm). Given that these light guides are produced through injection molding, mold processing technology with high surface quality micro-patterns is required. This study serves as a preliminary investigation into the development of high surface quality micro-pattern processing technology. It examines the surface roughness of the workpiece based on the cutting direction of the pattern and the cutting fluid type when cutting micro-patterns on STAVAX steel using cubic Boron Nitride(cBN) tools. The experiments involved machining a step-shaped micro-pattern with a height of 60 ㎛ and a pitch of 400 ㎛ in a 22×22 mm area under identical cutting conditions, with only the cutting direction and cutting fluid type being varied. The machining results of four cases were compared, encompassing two cases of cutting direction(parallel to the pattern, orthogonal to the pattern) and two cases of cutting fluid type (flood, mist). Consequently, the Ra value was found to be the highest(Ra 128.33 nm) when machining with the flood type in parallel to the pattern, while it was the lowest(Ra 95.22 nm) when machining with the mist type orthogonal to the pattern. These findings confirm that there is a difference of up to 25.8 % in the Ra value depending on the cutting direction and cutting fluid type.

Thermal Reflow 공정 적용 Micro Pattern 형상 변화를 통한 광 향상 구조층 연구 (Study on Optical Control Layer for Micro Pattern Shape Change Using Thermal Reflow Process)

  • 성민호;차지민;문성철;유시홍;이성의
    • 한국전기전자재료학회논문지
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    • 제28권5호
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    • pp.306-313
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    • 2015
  • In this study, the change of optical characteristics was studied according to the micro optical pattern provided by photo lithography followed by thermal reflow process. The shape and luminance variation with micro pattern was evaluated by SEM and spectrometers. Also, we analyzed the luminance characteristics using the 3D-optical simulation (Optis works) program. As a result, we found that the radius of curvature(R) in micro pattern is decreased up to 77%($150^{\circ}C$) compared to the radius of curvature at the condition $100^{\circ}C$, which is caused by efficient reflow of organic material without chemical changes. The highest enhancement of brightness with optimum micro pattern was obtained at the condition of $120^{\circ}C$ reflow process. The brightness gain with optical micro patterns is more than 15% at the condition of R=16.95 um, ${\Theta}=77.14^{\circ}$ compared to original optical source. The results of light simulation with various radius of curvature and side angle of pattern shows the similar result of experiment evaluation of light behavior on optical micro patterns. It is regarded that the more effect on light enhancement was contributed by side angle which is effective factor on light reflection, rather than the curvature of micro-patterns.

SLA을 이용한 소수성 표면 제작 (Fabrication of Hydrophobic Surfaces with Stereolithography)

  • 홍성호
    • Tribology and Lubricants
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    • 제37권1호
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    • pp.1-6
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    • 2021
  • This paper presents the experimental results of hydrophobic surfaces developed using a stereolithography-based additive-manufacturing technique. The additive manufacturing technique can be used to manufacture objects with complex geometries from computer-aided design data. Several additive manufacturing methods, such as selective laser sintering, fused deposition modeling, stereolithography apparatus (SLA), and inkjet-based system, have been developed. The SLA is a form of three-dimensional printing technology used to create prototypes, patterns, and production parts in successive layers through photochemical processes. Light causes chemical monomers and oligomers to cross-link together to form objects composed of polymers. Moreover, this method is economical for fabricating surfaces with high output resolution and quality. Here, we fabricate various surfaces using different shapes using an SLA. The surfaces with micro-patterns are fabricated for 10 cases, including the biomimetic surface. The fabricated surfaces with various micro-patterns are evaluated for hydrophobicity performance based on the static contact angle. The contact angle is measured three times for each case, and the averaged value is used. The results indicate that the arrangements in a staggered structure have a larger contact angle than those in a line when the same micro-pattern is applied. Moreover, the mimetic surfaces exhibit more hydrophobic characteristics than those of artificial micro-patterns.

Submicron-scale Polymeric Patterns for Tribological Application in MEMS/NEMS

  • Singh R. Arvind;Yoon Eui-Sung;Kim Hong Joon;Kong Hosung;Jeong Hoon Eui;Suh Kahp Y.
    • KSTLE International Journal
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    • 제6권2호
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    • pp.33-38
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    • 2005
  • Submicron-scale patterns made of polymethyl methacrylate (PMMA) were fabricated on silicon-wafer using a capillarity-directed soft lithographic technique. Polyurethane acrylate (PUA) stamps (Master molds) were used to fabricate the patterns. Patterns with three different aspect ratios were fabricated by varying the holding time. The patterns fabricated were the negative replica of the master mold. The patterns so obtained were investigated for their adhesion and friction properties at nano-scale using AFM. Friction tests were conducted in the range of 0-80 nN. Glass (Borosilicate) balls of diameter 1.25 mm mounted on cantilever (Contact Mode type NPS) were used as tips. Further, micro-friction tests were performed using a ball-on-flat type micro-tribe tester, under reciprocating motion, using a soda lime ball (1 mm diameter) under a normal load of 3,000 mN. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C$) and relative humidity ($45{\pm}5\%$). Results showed that the patterned samples exhibited superior tribological properties when compared to the silicon wafer and non-patterned sample (PMMA thin film) both at the nano and micro-scales, owing to their increased hydrophobicity and reduced real area of contact. In the case of patterns it was observed that their morphology (shape factor and size factor) was decisive in defining the real area of contact.

UV 경화성 수지를 이용한 가구용 옵티컬 일루젼 디자인 패턴 개발 (Development of Optical Illusion Design Pattern for Furniture Using a UV Curing Resin)

  • 김기출
    • 융합정보논문지
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    • 제7권1호
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    • pp.43-48
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    • 2017
  • 디자인 트렌드는 시대에 따라 변해왔으며, 최근 21세기의 디자인 트렌드는 환경 친화적인 디자인이 대세이다. 특히 디지털 컨버전스 시대로 불리는 최근에는 옵티컬 일루젼 디자인이라는 새로운 디자인 트렌드가 부상하고 있다. 본 논문에서는 환경 친화적인 UV 경화성 수지를 이용하여 가구용 옵티컬 일루젼 패턴을 디자인하였다. 디자인된 옵티컬 일루젼 미세 패턴을 포토리소그라피 반도체 미세패턴 공정으로 제조된 마이크로 몰드를 이용하여 제조하였다. 옵티컬 일루젼 미세 패턴은 PET 필름 위에 UV 경화성 수지와 롤투롤 공정으로 제조되었다. 제조된 옵티컬 일루젼 미세패턴 PET 필름은 홀로그램 효과를 나타내었으며, 필름 배면에 실시한 디지털 프린팅으로 금속 질감을 나타내었다. 제조된 옵티컬 일루젼 디자인 패턴을 이용하여 emotional furniture로 부르는 새로운 디자인 개념의 가구를 제작하였다. 가구 제작에는 다양한 옵티컬 일루젼 디자인 패턴이 적용되었다. 이러한 UV 몰드에 의한 옵티컬 일루젼 디자인 패턴은 인테리어 디자인 소재의 새로운 트랜드가 될 것으로 전망된다.

초음파 성형시 진동전달 방향에 따른 미세패턴의 전사특성 고찰 (Replication Characteristics of Micro-Patterns according to the Vibration Transmission Direction in the Ultrasonic Imprinting Process)

  • 서영수;이기연;조영학;박근
    • 한국정밀공학회지
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    • 제29권11호
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    • pp.1256-1263
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    • 2012
  • The present study covers the ultrasonic patterning process to replicate micro-patterns on a polymer substrate. The ultrasonic patterning process uses ultrasonic waves to generate frictional heat between an ultrasonic horn and the polymer substrate, from which the surface region of the polymer substrate is softened sufficiently for the replication of micro-patterns. The ultrasonic patterning process can divided into two categories according to the direction of vibration transmission: direct patterning and indirect patterning. The direct patterning uses a patterned horn, and the ultrasonic vibration is transferred directly from the patterned horn to the substrate. On the contrary, the indirect patterning process uses a plain horn, and the micro-patterns are engraved on a mold that is located below the substrate. Thus, the micro-patterns are replicated as an indirect manner. In this study, these direct and indirect patterning processes are compared in terms of the replication characteristics. Additionally, the possibility of double-side patterning is also discussed in comparison with the conventional single-side patterning process.

미세입자 분사가공을 위한 쾌속 마스크 제작기술의 개발 (Development of Rapid Mask Fabrication Technology for Micro-abrasive Jet Machining)

  • 이승표;고태조;강현욱;조동우;이인환
    • 한국정밀공학회지
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    • 제25권1호
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    • pp.138-144
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    • 2008
  • Micro-machining of a brittle material such as glass, silicon, etc., is important in micro fabrication. Particularly, micro-abrasive jet machining (${\mu}-AJM$) has become a useful technique for micro-machining of such materials. The ${\mu}-AJM$ process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particle. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the ${\mu}-AJM$ process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the ${\mu}-AJM$. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Two kinds of mask patterns were fabricated using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer were conducted successfully.

플라스틱 마이크로 채널 기판 사출성형 시 보압의 영향 (Effects of Packing Pressure and Time on Injection Molding of Plastic Micro-channel Plates)

  • 우상원;박시환
    • 한국생산제조학회지
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    • 제25권3호
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    • pp.224-229
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    • 2016
  • Recently, polymeric micro-fluidic biochips with numerous micro patterns on the surface were fabricated by injection molding for realizing low-cost mass production of devices. To evaluate the effects of process parameters on large-scale micro-structure replication, a $50{\times}50mm^2$ tool insert with surface structures having a patterns of trapezoidal shapes (height: $30{\mu}m$) was employed. During injection molding, PMMA was used; packing phase parameters and mold temperature were investigated. The replicated surface textures were quantitatively characterized by confocal laser microscopy with 10-nm resolution. The degree of replication at low mold temperatures was found to be higher than that at high mold temperature at the beginning of the packing stage. Thereafter, the degree of replication increased to a greater extent at higher mold temperatures; application of higher mold temperatures improved the degree of replication.