• 대한기계학회논문집A
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• 제31권12호
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• pp.1139-1143
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• 2007

A simple method for the fabrication of 3D micro-nano hybrid patterns was presented. In conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns were firstly fabricated and then nano-patterns were formatted on the micro-patterns. Moreover, these micro-nano hybrid patterns could be fabricated on the flat substrate. In this paper, we suggested the fabrication method of 3D micro-nano hybrid patterns using micro-indentation on the anodized aluminum substrate. Since diameter of the hemispherical nano-pattern can be controlled by electrolyte and applied voltage in the anodizing process, we can easily fabricated nano-patterns of diameter of loom to 300nm. Nano-patterns were firstly formatted on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns of diameter of 150nm were fabricated by anodizing process, and then micro-pyramid patterns of the side-length of $50{\mu}m$ were formatted on the nano-patterns using micro-indentation. Finally we successfully replicated 3D micro-nano hybrid patterns by hot-embossing process. 3D micro-nano hybrid patterns can be applied to nano-photonic device and nano-biochip application.

• 소성∙가공
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• 제15권9호
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• pp.686-691
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• 2006

Powder blasting technique was introduced to micromachine the micro patterns of circular and rectangular shape in LGP mould. The machinability of these patterns and matt treatment by powder blasting were verified. Then a prototype of LGP was injected by the developed LGP mould with micro patterns. Shape analysis of micro patterns and performance test of the injected LGP were carried out. The results showed printless LGP with micro patterns could be produced by just single injection using the mould with micro patterns, and powder blasting technique could be successfully applied to micrornachining of micro patterns and matt treatment of LGP mould.

• 한국광학회지
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• 제16권2호
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• pp.113-120
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• 2005

LCD-BLU(liquid crystal device-back light unit)에 사용되는 도광판의 미세 산란패턴을 만드는 새로운 방법으로서, 실리콘 웨이퍼의 비등방 식각에 의해 자연적으로 형성되는 3차원 결정면 구조를 이용하는 방법을 제안하였다. 실리콘 3차원 결정면을 갖는 도광판과 프리즘 시트의 원판을 설계 및 제작하였고, casting 공정을 통해 PDMS 재질로 복제된 도광판을 제작하여 특성을 분석하였다. 측정 결과, 기존 인쇄형 도광판에 비해 실리콘피라미드 패턴의 도광판이 $10\%$ 증가된 정면 휘도 효율을 가질 수 있음을 실험적으로 검증하였다.

• 소성∙가공
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• 제28권5호
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• pp.239-246
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• 2019

Various surface texturing techniques have been studied because of the effective applicability of micro or nano scale surface patterns. Particularly, the most promising types of patterns include the hierarchical patterns, which consists of micro/nano structures. Different processes such as MEMS, laser machining, micro cutting and micro grinding have been applied in the production of hierarchical patterns on various material surfaces. This study demonstrates the process of hot imprinting to induce the hierarchical patterns on the Al alloy surfaces. Wire electrical discharge machining (WEDM) process was used to imprint molds with micro scale sinusoidal pattern. In addition, the sinusoidal pattern with rough surface morphology was obtained as a result of the discharge craters. Consequently, the hierarchical patterns consisting of the sinusoidal pattern and the discharge craters were prepared on the imprinting mold surface. Hot imprinting process for the Al plates was conducted on the prepared mold, and the replication performance was analyzed. As a result, it was confirmed that the hierarchical patterns of the mold were effectively duplicated on the surface of Al plate.

• 한국정밀공학회지
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• 제32권1호
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• pp.63-68
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• 2015

Micro/nano patterns for optical concentration and diffusion have been studied in the various fields such as displays, optics, and sensors. Conventional micro patterns were continuous and linear shapes due to using linear-type light sources, however, recently non-continuous patterns have been applied as point sources are used for dot-type light sources such as LEDs and OLEDs. In this study, a hybrid machining technology combining an indentation machining method and an AAO process was developed for manufacturing the non-continuous micro patterns having nano patterns. First, mirror-like surfaces ($R_a<20nm$) of pure Aluminum substrates were obtained by optimizing cutting conditions. Then, The letter of 'K' consisting of the arrays of the micro patterns was manufactured by the indentation machining method which has a similar principle to indentation hardness testing. Finally, nano patterns were machined by AAO process on the micro patterns. Conclusively, a specific letter having nano-micro hybrid patterns was manufactured in this study.

• KSTLE International Journal
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• 제9권1_2호
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• pp.10-12
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• 2008

Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

• 대한금속재료학회지
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• 제48권1호
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• pp.90-100
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• 2010

Micro-conductive patterns were microfabricated on an insulating substrate ($SiO_2$) surface by a selective electroless nickel plating process in order to investigate the formation of seed layers. To fabricate micro-conductive patterns, a thin layer of metal (Cu.Cr) was deposited in the desired micropattern using laser-induced forward transfer (LIFT). and above this layer, a second layer was plated by selective electroless plating. The LIFT process. which was carried out in multi-scan mode, was used to fabricate micro-conductive patterns via electroless nickel plating. This method helps to improve the deposition process for forming seed patterns on the insulating substrate surface and the electrical conductivity of the resulting patterns. This study analyzes the effect of seed pattern formation by LIFT and key parameters in electroless nickel plating during micro-conductive pattern fabrication. The effects of the process variables on the cross-sectional shape and surface quality of the deposited patterns are examined using field emission scanning electron microscopy (FE-SEM) and an optical microscope.

• 구강회복응용과학지
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• 제24권1호
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• pp.67-76
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• 2008

골조직이 자라 들어갈 수 있는 적절한 크기의 마이크로패터닝을 부여하면 강하고 지속적인 골유착을 이룰 수 있는 생역학적 결합을 이룰 수 있다. 또한 마이크로패터닝을 통해 골조직과 접촉하는 면적을 증가시킴으로써 하중을 적절히 분산시킬 수도 있다. 본 연구에서는 마이크로패터닝의 형태와 크기에 따른 응력의 분산에 대해 연구하였다. 나사 하나에서의 하중을 연구하기 위해 2차원 유한요소분석법을 이용하였다. 임플란트는 무한히 긴 피질골에 100% 접촉하며 골-임플란트 계면은 고정된 것으로 경계조건을 설정한 후 마이크로패터닝의 위치와 수에 따라 5군으로 나누어 축력을 가한 후 최대응력과 응력의 분산양상을 비교하였다. 연구 결과, 마이크로패터닝을 부여하면 일반적인 나사에 비해 응력을 보다 넓게 분산시켰으며 나사의 하방에 마이크로패터닝을 부여한 것이 상방에 부여한 것보다 더 고르게 응력을 분산시켰다. 3개의 마이크로패터닝을 부여한 군이 2개의 마이크로패터닝을 부여한 군에 비해 응력을 넓게 분산시켰으나 응력이 집중되는 부위가 나타났다. 이상의 결과를 통해 마이크로패터닝을 부여하면 응력의 분산효과가 있으며 특히 나사 하방에 부여하는 것이 더 큰 효과를 냄을 알 수 있었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 춘계학술대회 논문집
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• pp.64-67
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• 2009

Vibrational micro-forming of pyramidal shape patterns was conducted for an Al superplastic alloy, Al 5083 and a Zr-based bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$. A vibrational micro-forming system was specially designed for generating vibrational load by combining a PZT actuator with a signal generator. Single crystal Si micro dies with wet-etched pyramidal patterns were used as master dies for vibrational micro-forming. The micro-formed pattern height was increasing with increasing the frequency of the vibrational load. In particular, the vibrationally-microformed pattern height was similar or even higher than the statically-microformed pattern height when the load frequency exceeded about 125 kHz. It was also observed that the crystal grains affect the surface quality of the microformed pattern and the distribution of the pattern height in the die cavity array.

• 한국정밀공학회지
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• 제23권3호
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• pp.156-162
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• 2006

Direct fabrication of nano patterns has been studied employing a nano-stereolithography (NSL) process. The needs of nano patterning techniques have been intensively increased for diverse applications for nano/micro-devices; micro-fluidic channels, micro-molds. and other novel micro-objects. For fabrication of high-aspect-ratio (HAR) patterns, a thick spin coating of SU-8 process is generally used in the conventional photolithography, however, additional processes such as pre- and post-baking processes and expansive precise photomasks are inevitably required. In this work, direct fabrication of HAR patterns with a high spatial resolution is tried employing two-photon polymerization in the NSL process. The precision and aspect ratio of patterns can be controlled using process parameters of laser power, exposure time, and numerical aperture of objective lens. It is also feasible to control the aspect ratio of patterns by truncation amounts of patterns, and a layer-by-layer piling up technique is attempted to achieve HAR patterns. Through the fabrication of several patterns using the NSL process, the possibility of effective patterning technique fer various N/MEMS applications has been demonstrated.