• Proceedings of the KIEE Conference
• /
• 2009.07a
• /
• pp.1301_1302
• /
• 2009

Recently, there has been increased incessantly an interest in research area on micro-fluidic pump for electronic and biological applications. The proposed pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving valves. And, this piezopump makes up a panel type design. The ATILA simulation was performed to estimate the operating frequency of the vibrating wave mode, to optimize the design conditions of piezopump such as structure, elastic body material, piezoelectric ceramics, and to analyze the distribution of vibration displacement. The best measured value of the pumping rate is about $118{\mu}l$/min under the following parameters : 4-wave mode, 50kHz operating frequency, $200V_p$.

• Proceedings of the KIEE Conference
• /
• 2002.07c
• /
• pp.1991-1993
• /
• 2002

This paper presents the PDMS surface characteristic change after the plasma process and the electroosmotic flow control technique for the two-dimensional focusing in the micro channels made of PDMS and glass. The channels are fabricated by plastic molding and micromachining technique. To observe the surface characteristic change as time elapses, we measure the contact angle of water on the surface and the velocity of the electroosmotic flow in a channel. The electric field adequate for focusing of a core flow in a confluence channel is obtained by the experiment. The computer simulation is performed to obtain the width and the depth of the core flow for several junction angles of the confluence channel.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.7 no.3
• /
• pp.161-165
• /
• 2007

In this paper, mesoporous Pt on micro pillars Pt electrode is newly designed, fabricated, and characterized on silicon substrate for non-enzymatic electrochemical sensor micro-chip integrated with CMOS readout circuitry. The fabricated micro/nano Pt electrode has cylindrical hexangular arrayed nano Pt pores with a diameter of 3.2 nm which is formed on top of the micro pillars Pt electrode with approximately $6{\mu}m$ in diameter, $6{\mu}m$ in space, and $50{\mu}m$ in height. The measured current responses of the fabricated plane Pt, mesoporous Pt, and mesoporous Pt on the micro pillar Pt electrodes are approximately $9.9nA/mm^2,\;6.72{\mu}A/mm^2,\;and\;7.67{\mu}A/mm^2$ in 10mM glucose solution with 0.1M phosphate buffered saline (PBS) solution, respectively. In addition, the measured current responses of the fabricated plane Pt, mesoporous Pt, and mesoporous Pt on the micro pillar Pt electrodes are approximately $0.15{\mu}A/mm^2,\;0.56{\mu}A/mm^2,\;and\;0.74{\mu}A/mm^2$ in 0.1mM ascorbic acid (AA) solution with 0.1M phosphate buffered saline (PBS) solution, respectively. This experimental results show that the proposed micro/nano Pt electrode is highly sensitive and promising for CMOS integrated non-enzymatic electrochemical sensor applications. Since the micro-pillar Pt electrode can also be utilized with a micro-fluidic mixer in the sensor chip, the sensor chip can be much smaller, cheaper, and easier to be fabricated.

• Journal of Sensor Science and Technology
• /
• v.19 no.4
• /
• pp.259-270
• /
• 2010

MEMS(micro electro mechanical systems) is a technology for the manufacture hyperfine structure, as a micro-sensor and a driving device, by a variety of materials such as silicon and polymer. Many study for utilizing the MEMS applications have been performed in variety of fields, such as light devices, high frequency equipments, bio-technology, energy applications and other applications. Especially, the field of Bio-MEMS related with bio-technology is very attractive, because it have the potential technology for the miniaturization of the medical diagnosis system. Bio-MEMS, the compound word formed from the words 'Bio-technology' and 'MEMS', is hyperfine devices to analyze biological signals in vitro or in vivo. It is extending the range of its application area, by combination with nano-technology(NT), Information Technology(IT). The LOC(lab-on-a-chip) in Bio-MEMS, the comprehensive measurement system combined with Micro fluidic systems, bio-sensors and bio-materials, is the representative technology for the miniaturization of the medical diagnosis system. Therefore, many researchers around the world are performing research on this area. In this paper, the application, development and market trends of Bio-MEMS are investigated.

• Journal of the Semiconductor & Display Technology
• /
• v.3 no.3
• /
• pp.1-4
• /
• 2004

Fabrication and electrical and mechanical properties of piezoelectric micro bending actuators (PMBA) using sol-gel-multi-coated thick PZT films and MEMS processes were investigated. PMBA could be used for design and fabrication of micro fluidic devices, for example, micro-pumps, micro dispensers, and so on. PMBA were fabricated using 2 um thick PZT films on Pt (350 nm)/$SiO_2$ (500 nm)/Si ($300\mu\textrm{m}$) substrates and MEMS processes. 7 types of PMBA were fabricated with areas of silicon diaphragms, PZT films and top electrodes. When the sizes of silicon diaphragms, PZT films and Pt top electrodes were reduced from 3000$\times$$1389\mu\textrm{m}$, 4000$\times$$1000\mu\textrm{m}$ and 4000$\times$$900\mu\textrm{m}$ down to 14%, 14% and 11 % of them, respectively, the center displacements of PMBA were decreased from 0.68 um to 0.10 um at 5 Hz and 12 Vpp. So, PMBA with large areas showed larger displacements than PMBA with small areas and experimental results were also good agreement with the plate and shell theory.

• Proceedings of the International Microelectronics And Packaging Society Conference
• /
• 2000.04a
• /
• pp.29-33
• /
• 2000

MEMS, Micro Electro-Mechanical Systems, present one of the greatest advanced packaging challenges of the next decade. Historically hybrid technology, generally thick film, provided sensors and actuators while integrated circuit technologies provided the microelectronics for interpretation and control of the sensor input and actuator output. Brought together in MEMS these technical fields create new opportunities for miniaturization and performance. Integrated circuit processing technologies combined with hybrid design systems yield innovative sensors and actuators for a variety of applications from single crystal silicon wafers. MEMS packages, far more simple in principle than today's electronic packages, provide only physical protection to the devices they house. However, they cannot interfere with the function of the devices and often must actually facilitate the performance of the device. For example, a pressure transducer may need to be open to atmospheric pressure on one side of the detector yet protected from contamination and blockage. Similarly, an optical device requires protection from contamination without optical attenuation or distortion being introduced. Despite impediments such as package standardization and complexity, MEMS markets expect to double by 2003 to more than ＄9 billion, largely driven by micro-fluidic applications in the medical arena. Like the semiconductor industry before it. MEMS present many diverse demands on the advanced packaging engineering community. With focused effort, particularly on standards and packaging process efficiency. MEMS may offer the greatest opportunity for technical advancement as well as profitability in advanced packaging in the first decade of the 21st century! This paper explores MEMS packaging opportunities and reviews specific technical challenges to be met.

• International Journal of Precision Engineering and Manufacturing
• /
• v.7 no.4
• /
• pp.40-46
• /
• 2006

The market of programmable implantable pumps has bound to a monopolistic situation, inducing high device costs, thus making them inaccessible to most patients. Micro-mechanical and medical innovations allow improved performances by reducing the dimensions. This affects the consumption and weight, and, by reducing the number of parts, the cost is also affected. This paper presents the procedure followed to design an innovative implantable drug delivery system. This drug delivery system consists of a low flow pump which shall be implanted in the human body to relieve pain. In comparison to classical known solutions, this pump presents many advantages of high interest in both medical and mechanical terms. The first section of the article describes the specifications which would characterize a perfect delivery system from every points of view. This concerns shape, medication, flow, autonomy, biocompatibility, security and sterilization ability. Afterwards, an overview of existing systems is proposed in a decisional tree. Positive displacement motorized pumps are classified into three main groups: the continuous movement group, the fractioned translation group and the alternative movement group. These systems are described and the different problems which are specific to these mechanisms are presented. Since none of them fully satisfy the specifications, an innovation is justified.. The decisional tree is therefore extended by adding new principles: fractioned refilling and fractioned injection within the fractioned translation movement group, spider guiding system within the alternative translation movement group, rotational bearing guided device and notch hinge guided device in the alternative rotation movement group.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2008.05a
• /
• pp.507-511
• /
• 2008

LTCC (Low Temperature Co-fired Ceramic) has been successfully applied to ceramic substrates for circuits and micro-fluidic systems and has proven its superior performance in a variety of applications. The prediction of shrinkage in LTCC process is an important for dimensional control of micro LTCC products which has influences on electronic characteristics. For avoiding the unpredictable shrinkage of LTCC during the sintering which makes accurate placement of the circuit devices difficult, pre-processes such as WIP (Warm Isostatic Pressing) and lamination must be modified. The objective of the present investigation is to establish a proper WIP conditions for near net shape fabrication of LTCC products. This paper discusses the influence of WIP conditions on the dimensional change of LTCC sheet. In the investigation, it is shown that the shrinkage values of sheets depend on WIP conditions and sheet directions. This work is a quantitative evaluation of the effect of WIP pressure on shrinkage of LTCC sheet. Additionally, the results show anisotropic shrinkage behaviour of sheet during LTCC process.

• Journal of Sensor Science and Technology
• /
• v.28 no.5
• /
• pp.294-298
• /
• 2019

Pulsed laser-based optical sensor monitoring systems for real time microplastic particle counting are proposed and developed in this study. To develop our real time monitoring system, we used a 450 nm pulsed laser and a photomultiplier with very high quantum efficiency. First, we demonstrated that the microplastic particle counting system could detect standard micro bead samples of 100, 250, and $500{\mu}m$ in river water. We then performed research concerning pulsed laser-based optical spectral sensor systems for real time microplastic monitoring. Additionally, we demonstrated that the real time microplastic remote monitoring system using LoRa communications could detect microplastic in the tap water resource protection area.

• Journal of Sensor Science and Technology
• /
• v.6 no.1
• /
• pp.72-80
• /
• 1997

One of the concerns in micro fluidic valve designs is that of reverse direction leakage. This paper designs and fabricates a new fluidic valve to achieve zero leakage. The design uses flapper and nozzle elements. In the forward direction the working fluid pushes the flapper upward to allow flow. In the reverse direction, the flapper pushes against the orifice seat, and thus, no flow can be generated, unless the flapper or nozzle element breaks. The nozzle element fabrication involves fabricating an orifice by wet etching of (100) wafer, The flapper element fabrication involves $20{\mu}m$ deep patterning of the negative image of the flapper, followed by wet etching from backside. Flow experiments were conducted with DI water as the working fluid, and the results are compared to analytical predictions. The results show that the developed flapper-nozzle valve achieves a true diodic flow characteristic.