• Title/Summary/Keyword: Micro-Filter

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Improvement of a Low Cost MEMS-based GPS/INS, Micro-GAIA

  • Fujiwara, Takeshi;Tsujii, Toshiaki;Tomita, Hiroshi;Harigae, Masatoshi
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • v.1
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    • pp.265-270
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    • 2006
  • Recently, inertial sensors like gyros and accelerometers have been quite miniaturized by Micro Electro-Mechanical Systems (MEMS) technology. JAXA is developing a MEM-based GPS/INS hybrid navigation system named Micro-GAIA. The navigation performance of Micro-GAIA was evaluated through off-line analysis by using flight test data. The estimation errors of the roll, pitch, and azimuth were $0.03^{\circ}$, $0.05^{\circ}$, $0.05^{\circ}$ $(1{\sigma})$, respectively. he horizontal position errors after 60-second GPS outages were reduced to 25 m CEP. The attitude errors and position errors are nearly half of ones reported previously[2]. Furthermore, using the adaptive Kalman filters, the robustness against the uncertainty of the measurement noise was improved. Comparing the innovation-based and residual-based adaptive Kalman filters, it was confirmed that the latter is robuster than the former.

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Water Treatment By VPMF (VPMF를 이용한 수처리방법)

  • 최충현;유승철
    • Proceedings of the Membrane Society of Korea Conference
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    • 1997.10a
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    • pp.107-108
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    • 1997
  • 1. 서론 : 분리막 시설의 전처리방법에는 Sand Filter, 유니필터 그리고 케트리지(5$\mu$m) 필터가 상용되어 왔다. 그러나 Sand Filter와 유니필터 등은 설치비용은 저렴하지만 처리수질이 5$\mu$m 케트리지 필터보다 떨어지므로 분리막시설의 전처리로 미흡하다. 통상적인 분리막 시설의 설계시에 사용되는 5$\mu$m 케트리지 필터는 역세가 불가능하므로 교체하지만 대규모의 수처리설비나, SS의 농도가 높은 경우에 있어서 분리막의 전처리시설로 적합치 않다. 한편 5$\mu$m 케트리지 필터는 대체하기 위한 정밀여과장치가 많이 개발되고 있으며 Z필터, BMF, Cross Filter 등이 그러한 여과장치들이다. 본 글에서 소개할 VPMF(Variable Pore Micro Filter, 가변세공 정밀여과장치)도 그러한 여과장치와 유사한 기능과 성능을 가진 정밀여과장치이다. 본 연구에서는 Caolin을 이용하여 50~100ppm 사이의 SS농도하에서 VPMF의 처리수질, 역세효율, SS포집능력 등을 평가해 볼 것이다.

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Properties of Filter type Magnetoimpedance Sensor (필터타입으로 구성한 자기임피던스센서의 특성)

  • SaGong, Geon;Kim, Young-Hak;Shin, Kwang-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.337-340
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    • 2004
  • To develop the highly sensitive Magneto-Impedance sensor, the amorphous ribbon was micro-processed to meander type sensor pattern and the filter circuit was constructed with this pattern. Its external magnetic field dependence of impedance and the output properties of the filter circuit were investigated. The impedance of the pattern had a peak value at the magnetic field of 10 Oe and its changing ratio was about 280%. The impedance change per unit magnetic field was about 36%, in which the output with high sensitivity and linearity could be obtained. The output sensitivity was about 7%/Oe at bias field of 6 Oe..

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Autonomous Tracking of Micro-Sized Flying Insects Using UAV: A Preliminary Results

  • Ju, Chanyoung;Son, Hyoung Il
    • Journal of the Korean Society of Industry Convergence
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    • v.23 no.2_1
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    • pp.125-137
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    • 2020
  • Tracking micro-sized insects is one of the challenges of protecting ecosystems and biodiversity. In this study, we propose an approach for the autonomous tracking of micro-sized flying insects, and develop an unmanned aerial vehicle (UAV)-based robotic system. The Kalman filter is applied to the received signal strength emitted from radio telemetry to estimate the position while reducing the measurement error and noise. The autonomous tracking strategy is a method in which the UAV rotates at one point to measure the signal strength and control its position in the strongest direction of the signal. We also design a system architecture comprising a tracking sensor system and a UAV system for micro-sized insects. The estimation and autonomous tracking of the target position by the proposed system are verified and evaluated through dynamic simulation. Therefore, in this study, we propose and validate a UAV-based tracking system for micro-sized flying insects, which has not been proposed in studies conducted thus far.

A Study of the reduction of Microscratch using Filter in oxide chemical Mechanical Polishing(CMP) Process (Oxide CMP 공정에서 Slurry Filter을 사용한 Microscratch 감소에 관한 연구)

  • Kim, Sang-Yong;Seo, Yong-Jin;Kim, Tae-Hyung;Lee, Woo-Sun;Chung, Hun-Sang;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1888-1890
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    • 1999
  • In this work, we have systematically studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in Inter-Metal Dielectric(IMD) CMP. The filter Installation in CMP polisher makes defect reduced after IMD CMP. As a result of formation micro-scratches, it shows that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have acknowledged slurry filter lifetime is fixed by the degree of generating defects.

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Effects of Consumable on STI-CMP Process (STI-CMP 공정에서 Consumable의 영향)

  • 김상용;박성우;정소영;이우선;김창일;장의구;서용진
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.185-188
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    • 2001
  • Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

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Fault Detection of Aircraft Turbofan Engine System Using a Fault Detection Filter (고장 검출 필터를 사용한 항공기 터보팬 엔진 시스템의 고장 검출)

  • Bae, Junhyung
    • Journal of IKEEE
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    • v.25 no.2
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    • pp.330-336
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    • 2021
  • A typical way to reduce the number of hardware redundancy configurations is to implement them as analytical techniques for detecting, identifying and accepting failures with micro-controller. In this paper, one of the analytical techniques, the fault detection filter, is applied to aircraft turbofan engine system. The fault detection filter is a special type of observer that has the advantage of being able to determine the location of failures by maintaining a constant direction in the output space in the event of a particular failure. We present a single input/output dynamic system modeling of air turbine system in turbofan engine, a fault detection filter design, and simulation results applying it. Simulation results show that fault detection can be effectively applied as a sensitivity effect to the directionality of the detection filter.

Digital Tomosynthesis Imaging of the Chest : Comparison of Patient Exposure Dose and Image Quality between Default Setting and Use Additional Filter (흉부 디지털토모영상의 기본모드 및 부가여과사용 시 환자선량과 화질비교)

  • Kim, Kye-Sun;Ahn, Sung-Min;Kim, Sung-Chul
    • The Journal of the Korea Contents Association
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    • v.13 no.9
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    • pp.288-294
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    • 2013
  • Chest digital tomosynthesis was the most advanced digital radiography technology, but it was higher patient dose than conventional chest radiography. Thus we tried to reduce a patient dose of chest digital tomosynthesis and evaluated its image quality. Result shows that radiation dose such as ESD, DAP and ED were 1.95 mGy, 17.66 $dGycm^2$ and 0.133 mSv respectively in default setting and 0.312 mGy, 2.27 $dGy.cm^2$ and 0.052 mSv in use additional filter, respectively. Doses were decrease 66.2%, 73.6% and 57.4% in ESD, DAP and ED, respectively. At the image quality assessment, overall sensitivities of use additional filter for nodule detection were not inferior to default mode for peripheral, central and peripheral micro nodules. However, sensitivity of low dose mode was significantly inferior to the default for central micro-nodules(p < .001).

Performance Evaluation of Backwash Hydrodynamic Separator Filter for Treatment of Micro Particles (역세척 Hydrodynamic Separator Filter를 이용한 미세입자 제거 특성 분석)

  • Lee, Jun-Ho;Bang, Ki-Woong
    • Journal of Korean Society of Environmental Engineers
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    • v.34 no.10
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    • pp.694-701
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    • 2012
  • The main purpose of this study is to evaluate of backwash system of hydrodynamic separator filter (HSF) with solar powered submerged pumps. It consists of a photovoltaic solar array, control electronics, battery, and two submersible pump powered by a 12 voltage DC motor. The laboratory scale study on treatable potential of micro particles using backwash HSF that was a combined with perlite filter cartridge and backwash nozzles. Since it was not easy to use actual storm water in the scaled-down hydraulic model investigations, it was necessary to reproduce ranges of particle sizes with synthetic materials. The synthesized storm runoff was made with water and addition of particles; ion exchange resin partices, silica gel particles, and commercial area manhole sediment particles. HSF was made of acryl resin with 250 mm of diameter filter chamber and overall height of 800 mm. Four case test were performed with different backwashing conditions and determined the SS removal efficiency with various surface loading rates. The operated range of surface loading rate was about 308~$1,250m^3/m^2/day$. It was found that SS removal efficiency of HSF using two submersible pumps improved by about 18% compared with HSF without backwash. Nonpoint control devices with solar water pumping systems would be useful for backwashing the filter in areas with not suppling electricity and reduce filter media exchange cost.

Design of The Micro Fluidic Heat Flux Sensor (유동형 미세 열유속 센서의 설계)

  • Kim, Jung-Kyun;Cho, Sung-Cheon;Lee, Sun-Kyu
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.11
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    • pp.138-145
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    • 2009
  • A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, low pass filter, and lock-in amp has enabled the resolution of 50 nW power and provides the sensitivity of $11.4\;mV/{\mu}W$. The heater modulation method was used to eliminate low frequency noises from sensor output. It is measured with various heat flux fluid of DI-water to test as micro fluidic application. In order to estimate the heat generation of samples from the output measurement of a micro fluidic heat-flux sensor, a methodology for modeling and simulating electro-thermal behavior in the micro fluidic heat-flux sensor with integrated electronic circuit is presented and validated. The electro-thermal model was constructed by using system dynamics, particularly the bond graph. The electro-thermal system model in which the thermal and the electrical domain are coupled expresses the heat generation of samples converts thermal input to electrical output. The proposed electro-thermal system model shows good agreement with measured output voltage response in transient state and steady-state.