• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05b
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• pp.30-33
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• 2001

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter-level dielectrics (ILD). Especially, defects like micro-scratch lead to severe circuit failure, and affects yield. CMP slurries can contain particles exceeding $1{\mu}m$ size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particle agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectric(IMD)-CMP. The filter installation in CMP polisher could reduce defect after IMD-CMP. As a result of micro-scratches formation, it shows that slurry filter plays an important role in determining consumable pad lifetime.

• Journal of the Microelectronics and Packaging Society
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• v.15 no.1
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• pp.39-44
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• 2008

In this paper, fully embedded 2.4GHz WLAN band pass filter (BPF) was investigated into a multi-layered organic packaging substrate using high Q spiral stacked inductors and high Dk MIM capacitors for low cost RF System on Package (SOP) applications. The proposed 2.4GHz WLAN BPF was designed by modifying chebyshev second order filter circuit topology. It was comprised of two parallel LC resonators for obtaining two transmission zeros. It was designed by using 2D circuit and 3D EM simulators for finding out optimal geometries and verifying their applicability. It exhibited an insertion loss of max -1.7dB and return loss of min -l7dB. The two transmission zeros were observed at 1.85 and 6.7GHz, respectively. In the low frequency band of $1.8GHz{\sim}1.9GHz$, the stop band suppression of min -23dB was achieved. In the high frequency band of $4.1GHz{\sim}5.4GHz$, the stop band suppression of min -l8dB was obtained. It was the first embedded and the smallest one of the filters formed into the organic packaging substrate. It has a size of $2.2{\times}1.8{\times}0.77mm^3$.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1406-1407
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• 2008

In this paper, a micro balanced filter in magnetically coupled LC resonators is proposed, designed, simulated by using FR-4 PCB substrate for low cost, small volume IEEE 802. 11a wireless LAN application. Two pair of coupled LC resonators using magnetic coupling of embedded inductors are applied to obtain bandpass transmission response and improve their phase and magnitude imbalance characteristics. In addition, high dielectric composite film is applied to fabricate the high Q MIM capacitors with small size and high capacitance density. It has an insertion loss of 1.4 dB, a return loss of 10 dB, a phase imbalance of 0.25 degree, and magnitude imbalance of 0.17 dB at frequency bandwidth of 200 MHz ranged from 5.15 GHz to 5.35 GHz, respectively. The proposed balanced filter has a small volume of $1.1mm{\times}1.3mm{\times}0.6mm$ (height).

• Transactions of Materials Processing
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• v.13 no.3
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• pp.211-215
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• 2004

Recently, one of remarkable tends in the development of optical communication industry is the miniaturization and integration of products. The alignment system of micro optical module is a key apparatus for the miniaturization of optical module and the development of optical communication parts with high functionality. In this research, we have developed a system capable of automatic alignment of a $30\mu\textrm{m}$-thick film filter and a lensed fiber in order to improve the speed and losses in the optical fiber-to-filter alignment of optical modules. Using the developed automatic alignment system and silicon optical bench, we have measured optical loss and characteristics of the assembled optical add/drop module before packaging $1{\times}1$ OADM optical module. Whole size of add/drop module was less than $5mm{\times}5mm{\times}1mm$. The measured maximum insertion loss was 0.294㏈ that is below 0.3㏈ which is a standard loss of optical module.

• Journal of Korean Society on Water Environment
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• v.27 no.6
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• pp.877-884
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• 2011

In this paper, the removal characteristics of dissolved organic carbon (DOCs) by micro bubble ozonation process and $O_3/UV$ process were comparatively studied. In the point of DOC removing reaction coefficient, micro bubble ozonation system and $O_3/UV$ process had not significant difference, $0.0120sec^{-1}$ and $0.0141sec^{-1}$. Therefore micro bubble ozonation process is more suitable for tertiary treatment of sewage in the point of installation and maintenance cost-reducing. The optimum ozone injection rate was 2.0 g $O_3/g$ DOC and HRT was 3 min for the micro bubble ozonation process. The removal efficiency of DOC and SUVA in micro bubble ozonation system was 32.8% and 58.3% respective. Biological aerated filter (BAF) process was installed to remove soluble organic material increased by micro bubble ozonation system. And the effluent BOD of BAF was below 1.0 mg/L. In the view of cost-effectiveness, $O_3/BAF$ process was more profitable than $O_3/UV/BAF$ process for tertiary treatment of sewage. In order to nitrify ammonia in the BAF process completely, $NH_4{^+}-N$ concentration in the influent water of BAF should be designed considering low water temperature in the winter season.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.105-110
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• 2006

The highly integrated nature of polymer based organic light emitting diode (POLED) microdisplay technology, coupled with low voltage and low power electroluminescent light generation, combine to offer a very promising technology for use in portable and personal electronics products. We briefly describe the technology before discussing how to engineer the color gamut using whiteemitting polymer materials, microcavity device structure and color filter absorbance.

• Proceedings of the Korean Sanitation Conference
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• 2001.06a
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• pp.21-55
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• 2001

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11b
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• pp.190-193
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• 2005

The air filter in engine intake system filters the dirt in the breathing air but also it attenuates the noise although the phenomenon has been regarded negligible. For the analysis of the acoustical performance of air filter, an acoustical model is suggested in this paper. The air filter consists of a porous filter element, which catches the particulate dirt, and a plastic filter box, which supports the filter element. Fibrous structure of the filter element is modeled as a micro-perforated panel using the flow resistivity and porosity. The pleated geometry of the filter element is modeled as two coupled ducts and a mathematical model is developed for the analysis of sound propagation. The filter box Is modeled as a rigid rectangular box. By combining two models, a 4-pole transfer matrix for the air filter is derived. The transmission loss calculated using the transfer matrix of the suggested model is compared with the measured data. Reasonably good agreement is observed. The result can be improved by considering the visco-thermal effect in modeling, in particular at a frequency range near the troughs of TL curve.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.114-117
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• 2006

The air filter in engine intake system has a function of filtrating the dirt in the scavenging air as well as attenuating the noise. The noise attenuation within the air cleaner filter, however, has been regarded as negligible by the field engineers. In this paper, for the analysis of the acoustical performance of air filter, an acoustical model was suggested and the characteristics of air filter system were investigated. Fibrous structure of the filter element was modeled as a micro-perforated panel using the flow resistivity and porosity. The pleated geometry of the filter element was modeled as two coupled ducts that have permeable walls, in which each duct area was assumed being constant. Using such simplified geometry, a mathematical model was developed for the sound propagation within a narrow duct system. Visco-thermal effect was considered in modeling the sound propagation through such tubes; the filter box was modeled as a rigid rectangular box. By combining two models, a four-pole transfer matrix was derived. For the validation purpose, transmission loss was measured for a plastic rectangular box containing an air filter. A noticeable effect of the air filter element was observed by including the filter into the box. Comparing the predicted and measured data, we found that the predicted TL agrees well with experimental results, in particular, in magnitude and frequency at TL troughs.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.1
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• pp.35-41
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• 2009

This paper proposes a stand alone type single-phase fuel cells micro-source with a voltage sag compensator for compensating the ac output voltage variations (sag or swell) of micro-source. The proposed micro-source is consist of a PEM(polymer electrolyte membrane) fuel cells simulator, a full bridge de converter, a 60Hz PWM(pulse width modulation) VSI(voltage source inverter), and a voltage sag compensator. Voltage sag compensator is similar to the configuration of hybrid series active power filter, and it is directly connected to micro-source through the injection transformer. Compensation algorithm of a voltage sag compensator adopts a single phase p-q theory. Effectiveness of the proposed the system is verified by the PSIM(power electronics simulation tool) simulation in the steady state and transient state which the proposed system is able to simultaneously compensate the harmonic current and source voltage sag or swell.