• Journal of the Microelectronics and Packaging Society
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• v.22 no.4
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• pp.31-36
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• 2015

The demand for multi-functionality, high density, high performance, and miniaturization of IC devices has caused the technology paradigm shift for electronic packaging. So, thermal management of new packaged chips becomes a bottleneck for the performance of next generation devices. Among various thermal solutions such as heat sink, heat spreader, TIM, thermoelectric cooler, etc. on-chip liquid cooling module was investigated in this study. Micro-channel was fabricated on Si wafer using a deep reactive ion etching, and 3 different micro-channel designs (straight MC, serpentine MC, zigzag MC) were formed to evalute the effectiveness of liquid cooling. At the heating temperature of $200^{\circ}C$ and coolant flow rate of 150ml/min, straight MC showed the high temperature differential of ${\sim}44^{\circ}C$ after liquid cooling. The shape of liquid flowing through micro-channel was observed by fluorescence microscope, and the temperarue differential of liquid cooling module was measuremd by IR microscope.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.2
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• pp.241-250
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• 2000

In this study, condensation heat transfer tests were conducted in flat aluminum multi-channel tubes using R-22. Two internal geometries were tested ; one with smooth inner surface and the other with micro-fins. Data are presented for the followin~ range of variables ; vapor quality($0.1{\sim}0.9$), mass flux($200{\sim}600kg/m^2s$) and heat flux($5{\sim}15kW/m^2$). The micro-fin tube showed higher heat transfer coefficients compared with those of the smooth tube. The difference increased as the vapor quality increased. Surface tension force acting on the micro-fin surface at the high vapor quality is believed to be responsible. Different from the trends of the smooth tube, where the heat transfer coefficient increased as the mass flux increased, the heat transfer coefficient of the micro-fin tube was independent of the mass flux at high vapor quality, which implies that the surface tension effect on the fin overwhelms the vapor shear effect at the high vapor quality. Present data(except those at low mass flux and high quality) were well correlated by equivalent Reynolds number, Existing correlations overpredicted the present data at high mass flux.

• Journal of computational fluids engineering
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• v.11 no.4 s.35
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• pp.75-80
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• 2006

Navier-Stokes simulation of the flow in a micro viscous pump is carried out. The micro viscous pump consists of a rotating circular rotor placed in a two dimensional channel. All simulation is carried out by using a finite volume approach, at the Reynolds number of 0.5, to study the performance of the micro viscous pump. Length of channel of the pump is varied to simulate the effects of the pumping load. Numerical solutions show that the net flow of the pump is realized by two counter rotating vortices formed on both sides of the rotor. The volume flow rate of the pump is decreased as length of the channel is increased, while the static pressure difference across the rotor is increased. The static pressure difference across the rotor is observed to be inversely proportional to the volume flow rate as inertia effects are negligibly small. The efficiency of the pump is found to reach a maximum when two counter rotating vortices on both sides of the rotor becomes to merge forming an outer enveloping vortex.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.96-103
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• 2000

In this study, evaporation heat transfer tests were conducted in flat aluminum multi-channel tubes using R-22. Two internal geometries were tested ; one with smooth inner surface and the other with micro-fins. Data are presented for the following range of variables ; vapor quality $(0.1{\sim}0.9)$, mass flux$(100{\sim}600kg/m^2s)$ and heat flux$(5{\sim}15kW/m^2)$. The micro-tin tube showed higher heat transfer coefficients compared with those of the smooth tube. Results showed that, for the smooth tube, the effects of mass flux, quality and heat flux were not prominent, and existing correlations overpredicted the data. For the micro-fin tube at low quality, the heat transfer coefficient increased as heat flux increased. However, the trend was reversed at high quality Kandlikar's correlation predicted the low mass flux data, and Shah's correlation predicted the high mass flux data. The heat transfer coefficient of the micro fin tube was approximately two times larger than that of the plain tube. New correlation was developed based on present data.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.8
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• pp.831-838
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• 2011

A growing bubble can be squeezed for water, and it will then encounter flow instability, which reverses toward upstream in straight micro-channels. To reduce the flow instability, a micro-channel that expands at the downstream end has been found to be effective. In the expanding area, a growing bubble will tend to move downstream because the net surface tension force of a vapor-liquid interface is inversely proportional to the local radius of curvature. We propose a static flow instability model and validate it experimentally. Moreover, we apply the local-instability parameter concept to the real design of a stable evaporative micro-channel with an expanding area. Based on the localinstability model, we establish a static design for stable expanding evaporative micro-channels.

• 한국가시화정보학회:학술대회논문집
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• 2004.11a
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• pp.86-89
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• 2004

One most feasible way to measure the concentration field in the micro-channel is using micro-LIF(Laser Induced Fluorescence) method. However, an accurate concentration field at a given cross plane in a micro-channel has not been successfully achieved so far due to various limitations in the light illumination and fluorescence signal detection. The present study demonstrates a novel method to provide an ultra thin laser sheet beam having five(5) microns thickness by use of a micro focus laser line generator. The laser sheet beam illuminates an exact plane of concentration measurement field to increase the signal to noise ratio and considerably reduce the depth uncertainty. Nile Blue A was used as fluorescent dye for the present LIF measurement. The enhancement of the fluorescent intensity signals was performed by a solvent mixture of water $(95\%)$ and ethanol (EtOH)/methanol (MeOH) $(5\%)$ mixture. To reduce the rms errors resulted from the CCD electronic noise and other sources, an expansion of grid size was attempted from $1\times1$ to 3(3 or 5(5 pixel data windows and the pertinent signal-to-noise level has been noticeably increased accordingly.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.49-53
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• 2005

The objective of this research was to establish the size limitation of micro metal forming and analyze the formability of foil. Flat-rolled ultra thin metallic copper foil($3{\mu}m$ in thickness) was used as a forming material and foil was annealed to improve the formability at the temperature of $385^{\circ}C$. Forming die was fabricated by using etching technique of DRIE(deep reactive ion etching) and HNA isotropic etching. For the forming die and coupe. foil were vacuum packed and the forming was conducted as applying hydrostatic pressure of 250MPa to the vacuum packed unit. We successfully obtained the micro channels of $12\~14{\mu}m$ width and $9{\mu}m$ depth from micro forming process we designed. We also investigated the thickness strain distribution of foil from experiment and FE simulation result. Micro channels had a good formability of smooth surface and size accuracy. We expect that micro metal forming technology will be applied to production of micro parts.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.1
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• pp.120-127
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• 2013

A novel severe plastic deformation process named half channel angular extrusion (HCAE) is proposed in order to produce bulk UFG materials. In HCAE process, equal channel angular extrusion (ECAE) and conventional forward extrusion process is integrated to increase the strain per pass and effectiveness of the SPD process. Three-dimensional finite element analysis was carried out to study the deformation behavior of the materials in the HCAE process. HCAE process was performed experimentally on commercially pure aluminum (AA1050) and micro-Vickers hardness test was used to measure the distribution of hardness on the section of normal to the extrusion direction. The results show that HCAE is able to impose more intensive strains per pass and give rise to higher micro-hardness than ECAE.

• 한국가시화정보학회:학술대회논문집
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• 2007.11a
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• pp.71-76
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• 2007

Flow visualization of a droplet passing through a straight channel and a diverging channel has been carried out using micro-PIV. Diverging channel is frequently used in lab-on-a-chip and microfluidic devices, where flow pattern inside the droplet passing is quite different from that through a straight channel. In the present study, we visualized the droplet flow in three different regions. The first region is where the droplet has a wide contact area with the channel wall, the second region is characterized with a narrow contact area and the third region is where droplet is detached from the channel wall. Visualization results show that the internal flow inside the droplet passing through the straight channel moves in the opposite direction to the droplet velocity in the near wall exhibiting complex flow patterns. But in the diverging channel the internal flow inside the droplet moves in the same direction as the droplet velocity due to the shear induced by oil phase flow exhibiting rather simple flow pattern.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.360-364
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• 2001

Numerical Aanlysis is made on the thermal performance of micro heat pipe in a axial flat grooved channel. The flow of liquid and vapor is investigated in trapezoidal grooves and the effect of variable shear stress along the interface of the liquid and vapor considered. The results from this study are obtained in the axial variation of pressure difference between vapor and liquid, contact angle, velocity of liquid and vapor and so forth. In addition, maximum heat transport capacity of micro-heat pipe is provided by varying the operation temperature, and compared with that from Schneider and Devos's model in which the interfacial shear stress is neglected.