• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.6
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• pp.30-36
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• 2014

Many different cells types have been found to be highly sensitive to mechanical force imposed by their surroundings. The cellular response to external mechanical forces has very important effects on numerous biological phenomena. In spite of its importance in biological processes, the cell adhesion force remains difficult to measure quantitatively at the cellular level. In this paper, to enhance quantitative measurements of cell adhesive interactions, a new attaching system and a method in which a glass bead can be attached to an AFM cantilever was designed and fabricated, and the degree of range displacement was controlled in the system. In an experiment, the movement of the stage in the attaching system and the attaching process were measured. The effectiveness of this system was confirmed as well in the experiment. In addition, through a commercial AFM system, the spring constant of the modified AFM probe could be measured.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.31 no.1
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• pp.17-21
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• 2018

The natural frequency of a laminated cantilever microbeam was studied in the present investigation. The microbeam was made of quartz on a silicon chip, and its top and bottom surfaces were coated with thin(~30nm) gold films. An ultrasonic testing platform was employed to resonate the microbeam, and its time domain signal was optically measured. The natural frequency was quantified through the fast Fourier transform of the waveform, and the result showed good agreement with a theoretical estimation from the classical beam theory. This study is expected to provide a dynamic evaluation technique for micro/nanoscale materials and micromechanical structures.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.5
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• pp.475-480
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• 2015

Ultrasonic atomic force microscopy (Ultrasonic-AFM) has been used to investigate the elastic property of the ultra-thin coating layer in a thin-film system. The modified Hertzian theory was applied to predict the contact resonance frequency through accurate theoretical analysis of the dynamic characteristics of the cantilever. We coat 200 nm thick Aluminum and Titanium thin films on the substrate using the DC Magnetron sputtering method. The amplitude and phase of the contact resonance frequency of a vibrating cantilever varies in response to the local stiffness constant. Ultrasonic-AFM images were obtained using the variations in the elastic property of the materials. The morphology of the surface was clearly observed in the Ultrasonic-AFM images, but was barely visible in the topography. This research demonstrates that Ultrasonic-AFM is a promising technique for visualizing the distribution of local stiffness in the nano-scale thin coatings.

• Journal of IKEEE
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• v.19 no.1
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• pp.52-57
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• 2015

The disease diagnosis system has been developed using the thin nitride(Si3N4) cantilever arrays which can measure the difference of capacitances between sensor and reference. The system consists of 32-bits RISC(Reduced Instruction Set Computer), RAM/Flash, bus, communication IP's, ADC(Analog Digital Converter) board, and LCD display. The marker selection method, which give us the good accuracy from reasonal numbers of markers, is suggested. The developed system has the resolution under 1fF and can detect 10nM concentration of Thrombin.

• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.63-66
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• 2013

This paper describes the highly productive process technologies of microprobe arrays, which were used for a probe card to test a Dynamic Random Access Memory (DRAM) chip with fine pitch pads. Cantilever-type microprobe arrays were fabricated using conventional micro-electro-mechanical system (MEMS) process technologies. Bonding material, gold-tin (Au-Sn) paste, was used to bond the Ni-Co alloy microprobes to the ceramic space transformer. The electrical and mechanical characteristics of a probe card with fabricated microprobes were measured by a conventional probe card tester. A probe card assembled with the fabricated microprobes showed good x-y alignment and planarity errors within ${\pm}5{\mu}m$ and ${\pm}10{\mu}m$, respectively. In addition, the average leakage current and contact resistance were approximately 1.04 nA and 0.054 ohm, respectively. The proposed highly productive microprobes can be applied to a MEMS probe card, to test a DRAM chip with fine pitch pads.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3365-3370
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• 2007

We developed micro power generation system using piezoelectric materials. In our system, the ambient vibrating energy is converting to electric energy by deflection of piezoelectric beams. The system consists of energy generating parts, converting enhancement parts, electric regulation and charging parts, and interface with small-energy-consuming mobile devices. The geometry of piezoelectric beams, the source of vibrating energy, and the electric load of target application determine the characteristics of generating electric power, such as impedance, voltage, current and power density. Therefore, we made a model for analysis of generating power with given information such as piezoelectric materials, geometry, vibration type, and mass. With this model, we can calculate capacitance of piezoelectric beams, generating voltage, current, and power. To obtain maximum energy transfer efficiency, we approached this study in the view of material, electrical, and mechanical engineering

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.741-745
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• 2007

Supplying power to microsystems that have no physical connection to the outside is difficult, and using batteries is not always appropriate. This paper discusses how to generate electricity from mechanical energy when vibrated in a cantilever beam. A model for the system predicts that the output power of the system is maximized when the mechanical damping in the system is minimized. Furthermore, to cover a wide frequency range and to be useful in a number of applications, a system of beams with different resonant frequencies has been designed and optimized. This information makes it possible to determine what design alternatives are feasible for the creation of a micro power supply for any specific application of MEMS.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2236-2238
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• 2000

The paper represents the fabrication of an electrostatic micro actuator for optical devices. The micro actuator consists of a plate suspended four p+ silicon cantilevers and an electrode on a glass substrate. The cantilever curls down because of the residual stress gradient in p+ silicon. When input voltage is applied between the p+ cantilevers and the electrode. the cantilevers are pulled toward the electrode by the electrostatic force. The displacement of the plate is measured with a laser displacement meter for various input voltage and frequencies.

• Journal of Sensor Science and Technology
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• v.17 no.6
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.251-251
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• 2008

In this work, appropriate corrugated structure is suggested to increase resonant frequency of resonators. Micro beam resonators based on polycrystalline 3C-SiC films which have a two-side corrugation along the length of beams were simulated by finite element method and compared to a same - size flat rectangular. With the dimension of $36\times12\times0.5{\mu}m^3$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, with this size only corrugation width of $6{\mu}m$ and depth of $0.4{\mu}m$, the corrugated cantilever reaches the resonant frequency at 1.252 MHz, and is 68% larger than that of flat type.