• 센서학회지
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• 제21권6호
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• pp.402-407
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• 2012

We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of $3-5{\mu}m$ and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a $V_2O_5$-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as $CH_4$, $CO_2$, $N_2O$ and CO in the spectral range of $3-5{\mu}m$. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.

• 센서학회지
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• 제26권2호
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• pp.91-95
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• 2017

Recently, infrared (IR) spectrometers have been required in various fields such as environment, safety, mobile, automotive, and military. This IR dispersive sensor detection method of substances is widely used. In this study, we fabricated a silicon (Si) prism-based near infrared (NIR) spectrometer utilizing micro electro mechanical system (MEMS) technology. Si prism-based NIR spectrometer utilizing MEMS technology consists of upper, middle, and lower substrates. The upper substrate passes through the incident IR ray selectively. The middle substrate, acting as a prism, disperses and separates the incident IR beam. The lower substrate has an amorphous Si (a-Si)-based bolometer array to detect the IR spectrum. The fabricated Si prism-based NIR spectrometer utilizing MEMS technology has the advantage of a simple structure, easy fabrication steps, and a wide NIR region operating range.

• 센서학회지
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• 제28권1호
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• pp.7-12
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• 2019

Significant progress has been made recently in detection of highly sensitive volatile organic compounds (VOCs) using chemical sensors. Combined with the progress in design of micro sensors array and electronic nose systems, these advances enable new applications for detection of extremely low concentrations of breath-related VOCs. State of the art detection technology in turn enables commercial sensor systems for health care applications, with high detection sensitivity and small size, weight and power consumption characteristics. We have been developing an intelligent electronic nose system for detection of VOCs for healthcare breath analysis applications. This paper reviews our contribution to monitoring of respiratory diseases and to diabetic monitoring using an intelligent electronic nose system for detection of low concentration VOCs using breath analysis techniques.

• 센서학회지
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• 제31권6호
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• pp.366-370
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• 2022

A 12 ㎛ pixel-sized 360 × 240 microbolometer focal plane array (MBFPA) was fabricated using a complementary metaloxide-semiconductor (CMOS)-compatible process. To release the MBFPA membrane, an amorphous carbon layer (ACL) processed at a low temperature (<400 ℃) was deposited as a sacrificial layer. The thermal time constant of the MBFPA was improved by using serpentine legs and controlling the thickness of the SiNx layers at 110, 130, and 150 nm on the membrane, with response times of 6.13, 6.28, and 7.48 msec, respectively. Boron-doped amorphous Si (a-Si), which exhibits a high-temperature coefficient of resistance (TCR) and CMOS compatibility, was deposited on top of the membrane as an IR absorption layer to provide heat energy transformation. The structural stability of the thin SiNx membrane and serpentine legs was observed using field-emission scanning electron microscopy (FE-SEM). The fabrication yield was evaluated by measuring the resistance of a representative pixel in the array, which was in the range of 0.8-1.2 Mohm (as designed). The yields for SiNx thicknesses of SiNx at 110, 130, and 150 nm were 75, 86, and 86%, respectively.

• 한국재료학회지
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• 제34권5호
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• pp.235-241
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• 2024

Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NO_x), and two odor gases, ammonia (NH₃) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO₂ for CO, In₂O₃ for NO_X, Ru-WO₃ for NH₃, and hybridized SnO₂-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

• ETRI Journal
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• 제29권5호
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• pp.667-669
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• 2007

This letter presents a smart integrated microfluidic device which can be applied to actively immobilize proteins on demand. The active component in the device is a temperature-controllable microelectrode array with a smart polymer film, poly(N-isopropylacrylamide) (PNIPAAm) which can be thermally switched between hydrophilic and hydrophobic states. It is integrated into a micro hot diaphragm having an integrated micro heater and temperature sensors on a 2-micrometer-thick silicon oxide/silicon nitride/silicon oxide (O/N/O) template. Only 36 mW is required to heat the large template area of 2 mm${\times}$16 mm to $40^{\circ}C$ within 1 second. To relay the stimulus-response activity to the microelectrode surface, the interface is modified with a smart polymer. For a model biomolecular affinity test, an anti-6-(2, 4-dinitrophenyl) aminohexanoic acid (DNP) antibody protein immobilization on the microelectrodes is demonstrated by fluorescence patterns.

• 한국농업기계학회:학술대회논문집
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• 한국농업기계학회 2017년도 춘계공동학술대회
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• pp.156-156
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• 2017

Most crop damages have been occurred by vermin(e.g., wild birds and herbivores) during the period between seeding and the cotyledon level. In this study, to minimize the damage by vermin and acquire the benefits such as protection against weeds and maintenance of water content in soil, immediately vinyl mulching after seeding was devised. Vinyl mulching has been generally covered with black color vinyl, that crop seeding locations cannot be detected by visible light range. Before punching vinyl, non-contact and non-destructive methods that can continuously determine the locations are necessary. In this study, a crop position detection method was studied that uses infrared thermal image sensor to determine the cotyledon position under vinyl mulch. The moving system for acquiring image arrays has been developed for continuously detecting crop locations under plastic mulching on the field. A sliding mechanical device was developed to move the sensor, which were arranged in the form of a linear array, perpendicular to the array using a micro-controller integrated with a stepping motor. The experiments were conducted while moving 4.00 cm/s speed of the IR sensor by the rotational speed of the stepping motor based on a digital pulse width modulation signal from the micro-controller. The acquired images were calibrated with the spatial image correlation. The collected data were processed using moving averaging on interpolation to determine the frame where the variance was the smallest in resolution units of 1.02 cm. For this study, the spline method was relatively faster than the other polynomial interpolation methods, because it has a lower maximum order of formulation when using a system such as the tridiagonal linear equation system which provided the capability of real-time processing. The temperature distribution corresponding to the distance between the crops was 10 cm, and the more clearly the leaf pattern of the crop was visually confirmed. The frequency difference was decreased, as the number of overlapped pixels was increased. Also the wave pattern of points where the crops were recognized were reduced.

• 센서학회지
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• 제17권4호
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• pp.250-255
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• 2008

A vanadium pentoxide ($V_2O_5$)-based bolometric infrared (IR) sensor has been designed and fabricated using micro electro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated. The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperature coefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the best performance, deposited $V_2O_5$ thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealed vanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (${-4}%/^{\circ}C$). The resistance of vanadium oxide is changed by IR intensity based on glucose concentration.

• Geomechanics and Engineering
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• 제29권3호
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• pp.301-310
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• 2022

Accurate prediction of mixed ground conditions ahead of a tunnel face is of vital importance for safe excavation using tunnel boring machines (TBMs). Previous studies have primarily focused on electrical resistivity surveys from the ground surface for geotechnical investigation. In this study, an FE (finite element) numerical model was developed to simulate electrical resistivity surveys for the prediction of risky mixed ground conditions in front of a tunnel face. The proposed FE model is validated by comparing with the apparent electrical resistivity values obtained from the analytical solution corresponding to a vertical fault on the ground surface (i.e., a simplified model). A series of parametric studies was performed with the FE model to analyze the effect of geological and sensor geometric conditions on the electrical resistivity survey. The parametric study revealed that the interface slope between two different ground formations affects the electrical resistivity measurements during TBM excavation. In addition, a large difference in electrical resistivity between two different ground formations represented the dramatic effect of the mixed ground conditions on the electrical resistivity values. The parametric studies of the electrode array showed that the proper selection of the electrode spacing and the location of the electrode array on the tunnel face of TBM is very important. Thus, it is concluded that the developed FE numerical model can successfully predict the presence of a mixed ground zone, which enables optimal management of potential risks.

• 한국광학회:학술대회논문집
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• 한국광학회 2000년도 제11회 정기총회 및 00년 동계학술발표회 논문집
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• pp.36-37
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• 2000

최근 Micro-Opto-Electro-Mechanical(MOEMS)기술의 발달과 더불어 적응 광학(Adaptive optics)분야나 패턴 인식 분야에 적용 가능한 공간 빛 변조기의 개발이 이루어지고 있다. 적응 광학용 공간 빛 변조기는 대기의 turbulence에 의하여 왜곡된 빛의 위상을 파면 센서(wave sensor)와 실시간 제어기를 통해 보정하는 역할을 한다. 적응 광학 분야에서 상업적으로 사용되던 기존의 공간 빛 변조기는 전왜소자 배열(piezoelectric actuator array)에 의하여 지지되는 평면 거울을 사용하여 크기가 크고 전력 소비도 심하며 무엇보다도 가격이 비싸다는 단점이 있었다$^{(1)}$ . 그러나 MOEMS 기술의 적용으로 인해 공간 빛 변조기의 크기 및 무게 그리고 소비 전력이 줄어들었으며 반도체 공정을 통한 대량 생산으로 저가로 생산할 수 있게 되었다. (중략)