• 제어로봇시스템학회:학술대회논문집
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• 1995.10a
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• pp.211-214
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• 1995

A precise open-loop positioning system using linear pulse motor has been developed. The system is operated in a microstepping mode by controlling the electric current. One step of 508 .mu.m (tooth pitch of the linear pulse motor) is divided into 508 micro-steps equally. The displacement is measured with a system using a Fiezeau-type interferometer. Periodical positioning error with a period of the tooth pitch was observed in this system. Therefore, the position is corrected using the error. The error is stored into computer in advance, and the microstep current is corrected on basis of the stored data. Although the positioning error of the system without the correction was .+-.4.5 .mu.m, that with the correction was decreased to .+-.1.0 .mu.m.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.230-236
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• 2008

In this paper, a model-based stick-slip compensation for the micro-positioning is proposed using an enhanced stick-slip model based on statistical rough surface contact model. The smart structure is comprised with PZT (lead (Pb) zirconia (Zr) Titanate (Ti)) based stack actuator incorporating with the PID (Proportional-Integral-Derivative) control algorithm, mechanical displacement amplifier and positioning devices. For the stick-slip compensation, the elastic-plastic static friction model is used considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model of system for the positioning apparatus was derived from the dynamic behaviors of structural parts. PID feedback control algorithms with the developed stick-slip model as well as feedforward friction compensator are formulated for achieving the accurate positioning performance. Experimental results are provided to show the performances of friction control using the developed positioning apparatus.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.11
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• pp.1134-1142
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• 2008

In this paper, a model-based stick-slip compensation for the micro-positioning is proposed using an enhanced stick-slip model based on statistical rough surface contact model. The smart structure is comprised with PZT(lead (Pb) zirconia(Zr) Titanate(Ti)) based stack actuator incorporating with the PID(proportional-integral-derivative) control algorithm, mechanical displacement amplifier and positioning devices. For the stick-slip compensation, the elastic-plastic static friction model is used considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model of system for the positioning apparatus was derived from the dynamic behaviors of structural parts. PID feedback control algorithms with the developed stick-slip model as well as feedforward friction compensator are formulated for achieving the accurate positioning performance. Experimental results are provided to show the performances of friction control using the developed positioning apparatus.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.137-143
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• 2002

This paper presents the In-process compensation to control cutter runout and improve the machined surface quality. Cutter runout compensation system consists of the micro-positioning servo system with piezoelectric actuator which is embeded in the sliding table to manipulate radial depth of cut in real-time. Cutting force feedback control was proposed in the angle domain based upon repetitive learning control strategy to eliminate chip load variation in end milling process. Micro-positioning control due to adaptive actuation force response improves the machined surface quality by compensation runout effect induced cutting force variation. This result will provide lots of information to build-up the preciswion machining technology.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.668-671
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into driven mechanism such as ballscrew. In this paper, fur investigating positioning characteristic of ballscrew and feedback device in aerostatic stage, we compare the positioning characteristic between full-closed(laser scale) and semi-closed(encoder) system. Experimental results show that the aerostatic stage has a 10nm micro step response and repeatability is improved up to 1.00${\mu}{\textrm}{m}$ using laser scale. We confirm the laser scale compensate error motion of ballscrew, so acquire 1.12${\mu}{\textrm}{m}$ positioning accuracy.

• International Journal of Aeronautical and Space Sciences
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• v.12 no.4
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• pp.371-378
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• 2011

In this paper, the wavelet denoising techniques using thresholding method are applied to the low cost micro electromechanical system (MEMS)-global positioning system(GPS) integrated system. This was done to improve the navigation performance. The low cost MEMS signals can be distorted with conventional pre-filtering method such as low-pass filtering method. However, wavelet denoising techniques using thresholding method do not distort the rapidly-changing signals. They can reduce the signal noise. This paper verified the improvement of the navigation performance compared to the conventional pre-filtering by simulation and experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1084-1087
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• 1997

In this paper, we developed the micro NCT system for punching the thin plates, which is driven is driven by the standalone type microprocessor. In order to adjust the alignment between the punch and die in-situ punching procedures, the non-contact type laser sensor for measuring the burr and micro-driving system for punching die with using the differential screw are developed. The height of burr in four directions in the punched hole of test specimen are measured, and the measured data are transferred to the personal computer by RS232C serial communication technology. In the personal computer, by using the graphic user interface type monitoring program and data handling procedures which includes the filtering algorithms, the direction and length of movement of the die position is decided and these data are transferred back to the microprocessor. The microprocessor drives the micro positioning stage based on these data. Even if this method is not a perfect solution for the in-situ alignment in micro punching, but this alignment methodology is accomplished in the same stage just after the punching that we hope to solve the alignment problem in the punching system based on this technology.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.175-178
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aemstatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured. aiming at investigating positioning characteristic of aerostatic stage, especially position error and repeatability, we analyze positioning behavior with other factors such as angular error, temperature. Experimemal results show that the aerostatic stage has a l0nm micro step response. Comparing experimental results and calculated abbe's error, we confirm that mean of position error is owing to angular error. And, also we confirm the temperature is dominant factor of repeatability in ten nm order.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.10
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• pp.141-147
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• 2003

This paper represents an absolute positioning system using a light navigation path for mobile robot. The absolute positioning system is composed of the projector unit which generates a laser beam using laser diode and mobile robot with the optical detector which has some optical sensors. The projector unit is fixed over the navigating plane of mobile robot to generate the light navigation path, and the optical detector located upper part of mobile robot detects the generated laser beam from the projector. The navigation of mobile robot is controlled by the micro-processor which compares the detected present position from the detector with the previously programmed navigation path. And experimental results show that our sensor system can be used for the absolute positioning system of the mobile robot.