• 제목/요약/키워드: Micro plasma

검색결과 509건 처리시간 0.036초

석개재 지역 하부 막골층 탄산염암의 광물조성, 미세구조 및 지화학적 특성 (Mineralogical, Micro-textural, and Geochemical Characteristics for the Carbonate Rocks of the Lower Makgol Formation in Seokgaejae Section)

  • 박채원;김하;송윤구
    • 자원환경지질
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    • 제51권4호
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    • pp.323-343
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    • 2018
  • 본 연구에서는 석개재 지역 하부 막골층 탄산염암을 대상으로 광물조성, 미세구조 및 지화학적 특성을 분석하고 퇴적 환경에 영향을 준 유체의 특성에 대해 고찰해보았다. X-선 회절을 이용한 광물 정량 분석, SEM-BSE를 이용한 미세구조 분석에 근거하여 막골층 최하부와 하부의 탄산염암 미세구조를 4가지 Type으로 분류하고, EPMA 및 LA-ICP-MS를 이용해 각 Type 내 탄산염광물을 대상으로 주원소 및 미량원소를 분석하여 비교하였다. 다양한 크기의 반자형에서 타형의 돌로마이트 결정이 치밀하게 맞물린 구조를 갖는 Type 1과 다양한 크기의 자형에서 반자형의 돌로마이트 결정이 치밀하게 맞물린 구조를 갖는 Type 2의 돌로마이트는 상대적으로 높은 Mg/Ca ratio, 평평한 기울기의 REE 패턴, 낮은 또는 중간 이하의 Fe 함량, 낮은 Mn 함량 특성을 가진다. 돌로마이트가 광범위하고 치밀하게 맞물린 구조로 나타나는 것은 고염수로부터 지속적인 Mg 유입의 가능성을 지시한다. 반면, 세립질의 자형에서 타형의 돌로마이트 결정이 산재된 특성을 보이는 Type 3와 다양한 크기의 자형에서 반자형의 돌로마이트 결정을 갖는 Type 4는 Type 1, 2에 비해 돌로마이트 결정의 미세구조가 덜 치밀하게 맞물린 형태를 가진다. 또한 상대적으로 낮은 Mg/Ca ratio, MREE가 부화된 패턴, 중간 이상의 또는 높은 Fe 및 Mn 함량 특성을 가진다. 부분적인 돌로마이트화와 덜 치밀하게 맞물린 구조가 관찰되는 것은 해수와 염수의 혼합수 환경에서 Mg의 제한적인 유입을 지시한다. 또한 Type 4에서 나타나는 철함유 광물과 돌로마이트 결정에서 관찰되는 재결정화와 상대적으로 높은 Fe, Mn 함량을 갖는 특성은 속성 유체의 영향과 아산화 환경에 노출되면서 돌로마이트가 재결정화 작용을 받았을 가능성을 제시한다. 막골층 최하부와 하부의 주구성광물인 돌로마이트와 방해석의 광물학적, 미세구조적, 지화학적 분석을 종합한 결과, 최하부는 고염분의 대규모 퇴적수 영향을 받았고 하부는 담수와 해수의 혼합수 환경에서 속성 유체 영향을 받았음을 뒷받침한다.

O2/SF6, O2/N2와 O2/CH4 플라즈마를 이용한 폴리카보네이트 건식 식각 (Dry etching of polycarbonate using O2/SF6, O2/N2 and O2/CH4 plasmas)

  • 주영우;박연현;노호섭;김재권;이성현;조관식;송한정;전민현;이제원
    • 한국진공학회지
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    • 제17권1호
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    • pp.16-22
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    • 2008
  • [ $O_2/SF_6$ ], $O_2/N_2$ 그리고 $O_2/CH_4$의 혼합 가스를 이용하여 폴리카보네이트의 플라즈마 식각을 연구하였다. 플라즈마 식각 장비는 축전 결합형 플라즈마 시스템을 사용하였다. 폴리카보네이트 식각은 감광제 도포 후에 UV 조사의 포토리소그래피 방법으로 마스크를 제작하여 실험하였다. 본 식각 실험에서는 $O_2$와 다른 기체와의 혼합비와 RIE 척 파워 증가에 따른 폴리카보네이트의 식각 특성 연구를 중심으로 하였다. 특히 건식 식각 시에 사용한 공정 압력은 100 mTorr로 유지하였으며 공정 압력은 기계적 펌프만을 사용하여 유지하였다. 식각 실험 후에 표면 단차 측정기, 원자력간 현미경 그리고 전자 현미경 등을 이용하여 식각한 샘플을 분석 하였다. 실험 결과에 의하면 폴리카보네이트 식각에서 $O_2/SF_6$의 혼합 가스를 사용하면 순수한 $O_2$$SF_6$를 사용한 것보다 각각 약 140 % 와 280 % 정도의 높은 식각 속도를 얻을 수 있었다. 즉, 100 W RIE 척 파워와 100 mTorr 공정 압력을 유지하면서 20 sccm $O_2$의 플라즈마 식각에서는 약 $0.4{\mu}m$/min, 20 sccm의 $SF_6$를 사용하였을 때에는 약 $0.2{\mu}$/min의 식각 속도를 얻었다. 그러나 60 %의 $O_2$와 40 %의 $SF_6$로 혼합된 플라즈마 분위기에서는 20 sccm의 순수한 $O_2$에 비해 상대적으로 낮은 -DC 바이어스가 인가되었음에도 식각 속도가 약 $0.56{\mu}m$/min으로 증가하였다. 그러나 $SF_6$ 양의 추가적인 증가는 폴리카보네이트의 식각 속도를 감소시켰다. $O_2/N_2$$O_2/CH_4$의 플라즈마 식각에서는 $N_2$$CH_4$의 양이 각각 증가함에 따라 식각 속도가 감소하였다. 즉, $O_2$$N_2$$CH_4$의 혼합은 폴리카보네이트의 식각 속도를 저하시켰다. 식각된 폴리카보네이트의 표면 거칠기 절대값은 식각 전에 비해 $2{\sim}3$ 배정도 증가하였지만 전자현미경으로 표면을 관찰 하였을 때에는 식각 실험 후의 폴리카보네이트의 표면이 깨끗한 것을 확인할 수 있었다. RIE 척 파워의 증가는 -DC 바이어스와 폴리카보네이트의 식각 속도를 거의 선형적으로 증가시켰으며 이 때 폴리카보네이트의 감광제에 대한 식각 선택비는 약 1:1 정도였다. 본 연구의 의미는 기계적 펌핑 시스템만을 사용한 간단한 플라즈마 식각 시스템으로도 $O_2/SF_6$의 혼합 가스를 사용하면 폴리카보네이트의 미세 구조를 만드는데 사용이 가능하며 $O_2/N_2$$O_2/CH_4$의 결과에 비해 상대적으로 우수한 식각 조건을 얻을 수 있었다는 것이다. 이 결과는 다른 폴리머 소재 미세 가공에도 응용이 가능하여 앞으로 많이 사용될 수 있을 것으로 예상한다.

Morphology of RF-sputtered Mn-Coatings for Ti-29Nb-xHf Alloys after Micro-Pore Form by PEO

  • Park, Min-Gyu;Park, Seon-Yeong;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2016년도 추계학술대회 논문집
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    • pp.197-197
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    • 2016
  • Commercially pure titanium (CP Ti) and Ti-6Al-4V alloys have been widely used for biomedical applications. However, the use of the Ti-6Al-4V alloy in biomaterial is then a subject of controversy because aluminum ions and vanadium oxide have potential detrimental influence on the human body due to vanadium and aluminum. Hence, recent works showed that the synthesis of new Ti-based alloys for implant application involves more biocompatible metallic alloying element, such as, Nb, Hf, Zr and Mo. In particular, Nb and Hf are one of the most effective Ti ${\beta}-stabilizer$ and reducing the elastic modulus. Plasma electrolyte oxidation (PEO) is known as excellent method in the biocompatibility of biomaterial due to quickly coating time and controlled coating condition. The anodized oxide layer and diameter modulation of Ti alloys can be obtained function of improvement of cell adhesion. Manganese(Mn) plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. Radio frequency(RF) magnetron sputtering in the various PVD methods has high deposition rates, high-purity films, extremely high adhesion of films, and excellent uniform layers for depositing a wide range of materials, including metals, alloys and ceramics like a hydroxyapatite. The aim of this study is to research the Mn coatings on the micro-pore formed Ti-29Nb-xHf alloys by RF-magnetron sputtering for dental applications. Ti-29Nb-xHf (x= 0, 3, 7 and 15wt%, mass fraction) alloys were prepared Ti-29Nb-xHf alloys of containing Hf up from 0 wt% to 15 wt% were melted by using a vacuum furnace. Ti-29Nb-xHf alloys were homogenized for 2 hr at $1050^{\circ}C$. Each alloy was anodized in solution containing typically 0.15 M calcium acetate monohydrate + 0.02 M calcium glycerophosphate at room temperature. A direct current power source was used for the process of anodization. Anodized alloys was prepared using 270V~300V anodization voltage at room. Mn coatings was produced by RF-magnetron sputtering system. RF power of 100W was applied to the target for 1h at room temperature. The microstructure, phase and composition of Mn coated oxide surface of Ti-29Nb-xHf alloys were examined by FE-SEM, EDS, and XRD.

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Photoemission Electron Micro-spectroscopic Study of the Conductive Layer of a CVD Diamond (001)$2{\times}1$ Surface

  • Kono, S.;Saitou, T.;Kawata, H.;Goto, T.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.7-8
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    • 2010
  • The surface conductive layer (SCL) of chemical vapor deposition (CVD) diamonds has attracting much interest. However, neither photoemission electron microscopic (PEEM) nor micro-spectroscopic (PEEMS) information is available so far. Since SCL retains in an ultra-high vacuum (UHV) condition, PEEM or PEEMS study will give an insight of SCL, which is the subject of the present study. The sample was made on a Ib-type HTHP diamond (001) substrate by non-doping CVD growthin a DC-plasma deposition chamber. The SCL properties of the sample in air were; a few tens K/Sq. in sheet resistance, ${\sim}180\;cm^2/vs$ in Hall mobility, ${\sim}2{\times}10^{12}/cm^2$ in carrier concentration. The root-square-mean surface roughness (Rq) of the sample was ~0.2nm as checked by AFM. A $2{\times}1$ LEED pattern and a sheet resistance of several hundreds K/Sq. in UHV were checked in a UHV chamber with an in-situ resist-meter [1]. The sample was then installed in a commercial PEEM/S apparatus (Omicron FOCUS IS-PEEM) which was composed of electro-static-lens optics together with an electron energy-analyzer. The presence of SCL was regularly monitored by measuring resistance between two electrodes (colloidal graphite) pasted on the two ends of sample surface. Figure 1 shows two PEEM images of a same area of the sample; a) is excited with a Hg-lamp and b) with a Xe-lamp. The maximum photon energy of the Hg-lamp is ~4.9 eV which is smaller that the band gap energy ($E_G=5.5\;eV$) of diamond and the maximum photon energy of the Xe-lamp is ~6.2 eV which is larger than $E_G$. The image that appear with the Hg-lamp can be due to photo-excitation to unoccupied states of the hydrogen-terminated negative electron affinity (NEA) diamond surface [2]. Secondary electron energy distribution of the white background of Figs.1a) and b) indeed shows that the whole surface is NEA except a large black dot on the upper center. However, Figs.1a) and 1b) show several features that are qualitatively different from each other. Some of the differences are the followings: the two main dark lines A and B in Fig.1b) are not at all obvious and the white lines B and C in Fig.1b) appear to be dark lines in Fig.1a). A PEEMS analysis of secondary electron energy distribution showed that all of the features A-D have negative electron affinity with marginal differences among them. These differences can be attributed to differences in the details of energy band bending underneath the surface present in SCL [3].

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상용 탈질 SCR 폐촉매의 현장 재생 효과 고찰 (A Study on the In situ Regeneration Effects of Commercial Deactivated SCR Catalyst)

  • 박해경;전민기;김문찬
    • 대한환경공학회지
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    • 제34권10호
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    • pp.664-670
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    • 2012
  • 상용 중유 발전소 배가스에 장기간 노출되어 활성이 현저히 저하된 탈질 SCR 폐촉매를 대상으로 현장 시스템을 모사하여 증류수 및 산성용액에 의한 세척과정을 거쳐 모사된 현장 조건으로 촉매를 재생하였다. 산성용액의 제조조건 및 처리조건에 따른 촉매의 물성변화를 확인하였고 질소산화물($NO_x$) 전환 촉매 활성 실험을 수행하여 촉매성능 변화를 고찰하였다. 촉매의 특성분석은 BET, Porosimeter, EDX (Energy Dispersive X-ray spectrometer), ICP (Inductively Coupled Plasma) 등을 이용하여 수행하였고, $NO_x$ 전환 반응실험은 중유 발전소 배가스를 모사하여 마이크로 반응기에서 SCR 반응을 수행하였다. 촉매특성 분석결과 재생된 촉매의 경우 비표면적은 신품 촉매 대비 95% 이상 회복되었고, $NO_x$ 전환활성은 산성용액 농도 3~6 M 범위에서 신품 촉매 대비 90% 이상을 회복한 것으로 나타났다. 이러한 촉매활성의 향상은 산성용액에 의한 촉매표면의 불순물들이 제거되면서 일어난 결과로 밝혀졌다.

스트레인 게이지를 이용한 적층방법에 따른 복합레진의 중합수축에 관한 연구 (A STUDY OF POLYMERIZATION SHRINKAGE OF COMPOSITE RESIN ACCORDING TO FILLING METHODS USING STRAIN GAUGE)

  • 김응학;김종수;유승훈
    • 대한소아치과학회지
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    • 제35권1호
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    • pp.18-29
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    • 2008
  • 본 연구는 복합레진 적층방법에 따른 복합레진의 수축양상을 스트레인 게이지를 이용하여 비교 평가하고자 하였다. 사용된 광중합기의 광원은 light-emitting diode(LED)와 plasma arc lamp(PAL)이었으며, 복합레진은 Filtek $Z350^{TM}$를 사용하였다. 교정 치료를 목적으로 발거된 60개의 소구치를 대상으로 하여, 교합면에 와동을 형성하고 일회충전법, 수평적층법, 사면적층법으로 나누어 복합레진을 충전하여 치면에 발생된 strain과 응력을 측정하였고, 법랑질 표면에 시편을 부착하여 동일한 적층방법으로 충전한 후 전단결합강도를 측정한 결과 다음과 같은 결론을 얻었다. 1. Strain의 변화를 살펴보면, LED와 PAL 조사군 모두 와동의 협설면에서는 주로 팽창이 일어났다가 시간이 지남에 따라 서서히 수축하는 양상을 보여주었다. 2. 와동의 근원심면에서는 팽창과 수축이 반복적으로 나타나면서 서서히 수축량이 증가하였다. 3. LED와 PAL 조사군 모두 적층방법 간의 응력 차이는 없었다(p>0.05). 4. LED 및 PAL 조사군 간의 응력 차이는 협면에서만 존재하였다(p<0.05). 5. 전단결합강도 측정 결과 LED 군에서는 사면적층법이 일회충전법, 수평적층법 보다 유의하게 낮게 나타났으나(p<0.05), PAL 광조사군에서는 유의차가 없었다(p>0.05). 6. 각 치면에 발생된 응력은 전단결합강도보다 낮았다(p<0.05).

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초경합금에 나노결정질 다이아몬드 코팅 시 금속 중간층의 효과 (Effect of Metal Interlayers on Nanocrystalline Diamond Coating over WC-Co Substrate)

  • 나봉권;강찬형
    • 한국표면공학회지
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    • 제46권2호
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    • pp.68-74
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    • 2013
  • For the coating of diamond films on WC-Co tools, a buffer interlayer is needed because Co catalyzes diamond into graphite. W and Ti were chosen as candidate interlayer materials to prevent the diffusion of Co during diamond deposition. W or Ti interlayer of $1{\mu}m$ thickness was deposited on WC-Co substrate under Ar in a DC magnetron sputter. After seeding treatment of the interlayer-deposited specimens in an ultrasonic bath containing nanometer diamond powders, $2{\mu}m$ thick nanocrystalline diamond (NCD) films were deposited at $600^{\circ}C$ over the metal layers in a 2.45 GHz microwave plasma CVD system. The cross-sectional morphology of films was observed by FESEM. X-ray diffraction and visual Raman spectroscopy were used to confirm the NCD crystal structure. Micro hardness was measured by nano-indenter. The coefficient of friction (COF) was measured by tribology test using ball on disk method. After tribology test, wear tracks were examined by optical microscope and alpha step profiler. Rockwell C indentation test was performed to characterize the adhesion between films and substrate. Ti and W were found good interlayer materials to act as Co diffusion barriers and diamond nucleation layers. The COFs on NCD films with W or Ti interlayer were measured as less than 0.1 whereas that on bare WC-Co was 0.6~1.0. However, W interlayer exhibited better results than Ti in terms of the adhesion to WC-Co substrate and to NCD film. This result is believed to be due to smaller difference in the coefficients of thermal expansion of the related films in the case of W interlayer than Ti one. By varying the thickness of W interlayer as 1, 2, and $4{\mu}m$ with a fixed $2{\mu}m$ thick NCD film, no difference in COF and wear behavior but a significant change in adhesion was observed. It was shown that the thicker the interlayer, the stronger the adhesion. It is suggested that thicker W interlayer is more effective in relieving the residual stress of NCD film during cooling after deposition and results in stronger adhesion.

Corrosion Behaviors of Dental Implant Alloy after Micro-sized Surface Modification in Electrolytes Containing Mn Ion

  • Kang, Jung-In;Son, Mee-Kyoung;Choe, Han-Cheol
    • Journal of Korean Dental Science
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    • 제11권2호
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    • pp.71-81
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    • 2018
  • Purpose: The purpose of this study was to investigate the corrosion behaviors of dental implant alloy after microsized surface modification in electrolytes containing Mn ion. Materials and Methods: $Mn-TiO_2$ coatings were prepared on the Ti-6Al-4V alloy for dental implants using a plasma electrolytic oxidation (PEO) method carried out in electrolytes containing different concentrations of Mn, namely, 0%, 5%, and 20%. Potentiodynamic method was employed to examine the corrosion behaviors, and the alternatingcurrent (AC) impedance behaviors were examined in 0.9% NaCl solution at $36.5^{\circ}C{\pm}1.0^{\circ}C$ using a potentiostat and an electrochemical impedance spectroscope. The potentiodynamic test was performed with a scanning rate of $1.667mV\;s^{-1}$ from -1,500 to 2,000 mV. A frequency range of $10^{-1}$ to $10^5Hz$ was used for the electrochemical impedance spectroscopy (EIS) measurements. The amplitude of the AC signal was 10 mV, and 5 points per decade were used. The morphology and structure of the samples were examined using field-emission scanning electron microscopy and thin-film X-ray diffraction. The elemental analysis was performed using energy-dispersive X-ray spectroscopy. Result: The PEO-treated surface exhibited an irregular pore shape, and the pore size and number of the pores increased with an increase in the Mn concentration. For the PEO-treated surface, a higher corrosion current density ($I_{corr}$) and a lower corrosion potential ($E_{corr}$) was obtained as compared to that of the bulk surface. However, the current density in the passive regions ($I_{pass}$) was found to be more stable for the PEO-treated surface than that of the bulk surface. As the Mn concentration increased, the capacitance values of the outer porous layer and the barrier layer decreased, and the polarization resistance of the barrier layers increased. In the case of the Mn/Ca-P coatings, the corroded surface was found to be covered with corrosion products. Conclusion: It is confirmed that corrosion resistance and polarization resistance of PEO-treated alloy increased as Mn content increased, and PEO-treated surface showed lower current density in the passive region.

Parylene-C 코팅된 의료용 SUS304 소재의 결합력 향상을 위한 플라즈마 처리 효과 (The effect of plasma treatment to improve adhesion strength of parylene-C coated medical grade SUS304)

  • 김동국;송태하;정용훈;강관수;윤덕규;김민욱;우영재;서요한;김경아;노지형
    • 한국표면공학회지
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    • 제55권6호
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    • pp.390-397
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    • 2022
  • Parylene-C which was mainly used for industries such as electronics, machinery and semiconductors has recently been in the spotlight in the medical field due to its properties such as corrosion resistance and biocompatibility. In this study we intend to derive a plan to improve the bonding strength of Parylene-C coating with the SUS304 base material for medical use which can be applied to various medical fields such as needles, micro needles and in vitro diagnostic device sensors. Through plasma pretreatment the bonding strength between Parylene-C and metal materials was improved. It was confirmed that the coated surface was hydrophobic by measuring the contact angle and the improvement of the surface roughness of the sample manufactured through CNC machining was confirmed by measuring the surface roughness with SEM. Through the above results, it is thought that it will be effective in increasing usability and reducing pain in patients by minimizing friction when inserting medical devices and in contact with skin. In addition it can be applied to various application fields such as human implantable stents and catheters, and is expected to improve the performance and lifespan of medical parts.

Effects of protein content and the inclusion of protein sources with different amino acid release dynamics on the nitrogen utilization of weaned piglets

  • Hu, Nianzhi;Shen, Zhiwen;Pan, Li;Qin, Guixin;Zhao, Yuan;Bao, Nan
    • Animal Bioscience
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    • 제35권2호
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    • pp.260-271
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    • 2022
  • Objective: We aimed to investigate the effect of the differing amino acid (AA) release dynamics of two protein sources on the growth performance, nitrogen deposition, plasma biochemical parameters, and muscle synthesis and degradation of piglets when included in their diets at normal and low concentrations. Methods: Forty-eight piglets (Duroc×Landrace×Large White) with initial body weight of 7.45±0.58 kg were assigned to six groups and fed one of 6 diets. The 6 dietary treatments were arranged by 3×2 factorial with 3 protein sources and 2 dietary protein levels. They are NCAS (a normal protein content with casein), NBlend (a normal protein content with blend of casein and corn gluten meal), NCGM (a normal protein content with corn gluten meal), LCAS (a low protein content with casein), LBlend (a low protein content with blend of casein and corn gluten meal), LCGM (a low protein content with corn gluten meal). The release dynamics of AA in these diets were determined by in vitro digestion. The digestibility, utilization and biological value of nitrogen in piglets were determined by micro Kjeldahl method. Plasma insulin was measured by enzyme-linked immunosorbent assay kits. The protein expression of mediators of muscle synthesis and degradation was determined by western blotting. Results: Although the consumption of a low-protein diet supplemented with crystalline AA was associated with greater nitrogen digestion and utilization (p<0.05), the final body weight, growth performance, nitrogen deposition, and phosphorylation of ribosomal protein S6 kinase 1 and eIF4E binding protein 1 in the muscle of pigs in the low-protein diet-fed groups were lower than those of the normal-protein diet-fed groups (p<0.05) because of the absence of non-essential AA. Because of the more balanced release of AA, the casein (CAS) and Blend-fed groups showed superior growth performance, final body weight and nitrogen deposition, and lower expression of muscle ring finger 1 and muscle atrophy F-box than the CGM-fed groups (p<0.05). Conclusion: We conclude that the balanced release of AA from CAS containing diets and mixed diets could reduce muscle degradation, favor nitrogen retention, % intake and improve growth performance in pigs consuming either a normal- or low-protein diet.