• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.175.1-175.1
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• 2016

In recent, tract infections such as atopic dermatitis, allergic rhinitis and a respiratory disease are increasing, giving rise to the atmospheric pollution, inflow of micro-size dust and side effect of humidifier disinfectant. In this context, the environment-friendly technology is required to eliminate airborne pathogens. We propose solution of the previous problems, making use of Radical Mist Generator (RMG). Existing technologies of air purification using a gas discharge produce harmful substances such as ozone, NOx, etc. However, the RMG uses a pure water as a plasma forming material. The RMG sprays the water mist, which contains reactive radicals to sterilize microorganisms. RMG is comprised of a power supply, plasma electrodes and a nozzle. In order to analyze the electrical characteristic and concentrations of reactive radicals, we employ an oscilloscope and a titration method. To test the sterilization effect of RMG, we used E.coli. We confirmed that E.coli was killed over 90%. Eventually, we expect that RMG can be promising tool for a purified system.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1218-1220
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• 2005

We have developed laser absorption spectroscopy system for the measurement of excited Xe atoms in micro-discharged AC-PDP plasma. In this study, we have measured the absorption signals for the $1S_5$ xenon metastable state in the PDP cell with the various gas mixtures of Ne-Xe(1%), Ne-Xe(4%) and Ne-Xe(10%) under fixed gas pressure of 350 Torr and the eletrode gap distance of 50um. It is found that the maximum excited xenon densities are $1.2^{\ast}10^{12}\;cm^{-3}$, $1.8^{\ast}10^{12}\;cm^{-3}$ and $2.7^{\ast}10^{12}cm^{-3}$ for gas mixtures of Ne-Xe(1%), Ne-Xe(4%) and Ne-Xe(10%) respectively, in this experiment.

• Korean Journal of Materials Research
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• v.15 no.3
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• pp.149-154
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• 2005

Teflon like fluorocarbon thin films have been deposited on silicon and oxide molds as an antistiction layer for the hot embossing process by an inductively coupled plasma (ICP) chemical vapor deposition (CVD) method. The process was performed at $C_4F_8$ gas flow rate of 2 sccm and 30 W of plasma power as a function of substrate temperature. The thickness of film was measured by a spectroscopic ellipsometry. These films were left in a vacuum oven of 100, 200 and $300^{\circ}C$ for a week. The change of film thickness, contact angle and adhesion and friction force was measured before and after the thermal test. No degradation of film was observed when films were treated at $100^{\circ}C$. The heat treatment of films at 200 and $300^{\circ}C$ caused the reduction of contact angles and film thickness in both silicon and oxide samples. Higher adhesion and friction forces of films were also measured on films treated at higher temperatures than $100^{\circ}C$. No differences on film properties were found when films were deposited on either silicon or oxide. A 100 nm silicon template with 1 to $500\;{\mu}m$ patterns was used for the hot embossing process on $4.5\;{\mu}m$ thick PMMA spun coated silicon wafers. The antistiction layer of 10 nm was deposited on the silicon mold. No stiction or damages were found on PMMA surfaces even after 30 times of hot embossing at $200^{\circ}C$ and 10 kN.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.253.2-253.2
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• 2014

Micro hollow cathode discharges (MHCDs) are high-pressure, non-equilibrium discharges. Those MHCDs are useful to produce an excimer radiation. A major advantage of excimer sources is their high internal efficiency which may reach values up to 40% when operated under optimum conditions. To produce strong excimer radiation, the optimisation of the discharge conditions however needs a detailed knowledge of the properties of the discharge plasma itself. The electron density and temperature influence the excitation as well as plasma chemistry reactions and the gas temperature plays a major role as a significant energy loss process limiting efficiency of excimer radiation. Most of the recent spectroscopic investigations are focusing on the ultraviolet or vacuum ultraviolet range for direct detection of the excimer. In our experiments we have concentrated on investigating the micro hollow cathodes from the near UV to the near infrared (300~850 nm) to measure the basic plasma parameters using standard plasma diagnostic techniques such as stark broadening for electron density and the relative line intensity method for electron temperature. Finally, the neutral gas temperature was measured by means of the vibrational rotational structures of the second positive system of nitrogen.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.2
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• pp.65-69
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• 2014

Crystallographic phases of Plasma electrolytic oxidized Al alloy, A1100, A5052, A6061, A6063, A7075, were investigated. Two types of electrolyte $Na_2Si_2O_3$ and Na2P2O7 were also compared. Bipolar pulse, $2000{\mu}sec$ with $400{\mu}sec+420V$ impulse and $300{\mu}sec$ - impulse were applied for 20 min. ${\alpha}-alumina$, ${\gamma}-alumina$, ${\eta}-alumina$, $Al_{4.95}Si_{1.05}O_{9.52}$, and $(Al_{0.9}Cr_{0.1})_2O_3$ were mainly observed. Si, component of electrolyte, were moved into the PEO layer by bipolar pulse. Glassy phase was also observed at the surface of $Na_2Si_2O_3$ electrolyte treated PEO layer, and increased with the Mg content of Al alloy. It is concluded that at first glassy phase was formed by the micro plasma, and the high temperature of plasma turns glassy phase to several crystalline phases. And we could expect that many other crystalline phase could be formed by PEO process.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.2
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• pp.59-64
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• 2014

Crystallographic phases of Plasma electrolytic oxidized Al alloy, A1050, were investigated. The electrolyte of PEO was $Na_2Si_2O_3$ and KOH. Unipolar pulse, $ 2000{\mu}sec$ with $400{\mu}sec+420V$ impulse, were applied for 2 min, 5 min, 15 min, and 30 min. ${\gamma}-Alumina$, as well as ${\alpha}-alumina$, was main crystal phase. ${\gamma}-Alumina$ was appeared in the beginning, then the amount of ${\alpha}-alumina$ was increased with time, but the amount of ${\gamma}-Alumina$ remained constant without any increasing. So, it is concluded that plasma gas produce ${\gamma}-Alumina$ at the first, and then ${\gamma}-Alumina$ transform ${\alpha}-alumina$ finally. During the transformation, high temperature of micro plasma gives transformation energy.

• Korean Journal of Materials Research
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• v.29 no.10
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• pp.609-616
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• 2019

Oxide coatings are formed on die-cast AZ91D Mg alloy through an environmentally friendly plasma electrolytic oxidation(PEO) process using an electrolytic solution of $NaAlO_2$, KOH, and KF. The effects of PEO condition with different duty cycles (10 %, 20 %, and 40 %) and frequencies(500 Hz, 1,000 Hz, and 2,000 Hz) on the crystal phase, composition, microstructure, and micro-hardness properties of the oxide coatings are investigated. The oxide coatings on die-cast AZ91D Mg alloy mainly consist of MgO and $MgAl_2O_4$ phases. The proportion of each crystalline phase depends on various electrical parameters, such as duty cycle and frequency. The surfaces of oxide coatings exhibit as craters of pancake-shaped oxide melting and solidification particles. The pore size and surface roughness of the oxide coating increase considerably with increase in the number of duty cycles, while the densification and thickness of oxide coatings increase progressively. Differences in the growth mechanism may be attributed to differences in oxide growth during PEO treatment that occur because the applied operating voltage is insufficient to reach breakdown voltage at higher frequencies. PEO treatment also results in the oxide coating having strong adhesion properties on the Mg alloy. The micro-hardness at the cross-section of oxide coatings is much higher not only compared to that on the surface but also compared to that of the conventional anodizing oxide coatings. The oxide coatings are found to improve the micro-hardness with the increase in the number of duty cycles, which suggests that various electrical parameters, such as duty cycle and frequency, are among the key factors controlling the structural and physical properties of the oxide coating.

• Nuclear Engineering and Technology
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• v.51 no.1
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• pp.190-197
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• 2019

W-K-TiC alloys with different titanium carbide concentrations (0.05, 0.1, 0.25, 0.5, 1, 2) wt.% were fabricated through Mechanical Alloying and Spark Plasma Sintering. The effects of the addition of nano-scaled TiC particles on the relative density, Vickers micro-hardness, microstructure, crystal information, thermal shock resistance, and tensile strength were investigated. It is revealed that the doped TiC nano-particles located at the grain boundaries. The relative density and Vickers micro-hardness of W-K-TiC alloys was enhanced with TiC addition and the highest Vickers micro-hardness is 731.55. As the TiC addition increased from 0.05 to 2 wt%, the room-temperature tensile strength raised from 141 to 353 MPa. The grain size of the W-K-TiC alloys decreased sharply from $2.56{\mu}m$ to 330 nm with the enhanced TiC doping. The resistance to thermal shock damage of W-K-TiC alloys was improved slightly with the increased TiC addition.

• Journal of Power System Engineering
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• v.9 no.1
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• pp.76-81
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• 2005

The effect of micro-pulse plasma nitriding temperature and time on the case thickness, hardness and nitride formation in the surface of Fe-12Cr-22Mn-X alloy with 3% Co and 1% Ti alloys elements investigated. External compound layer and internal diffusion layer was constituted in plasma nitride case of Fe-12Cr-22Mn-X alloys and formed nitride phase such as ${\gamma}'-Fe4N\;and\;{\varepsilon}-Fe2-3N$. Case depth increased with increasing the plasma nitriding temperature and time. Surface hardness of nitrided Fe-12Cr-22Mn-X alloys obtained the above value of Hv 1,600 and case depth obtained the above value of $45{\mu}m$ in Fe-12Cr-22Mn-3Co alloy and $60{\mu}m$ in Fe-12Cr-22Mn-1Ti alloy. Wear-resistance increased with increasing plasma nitriding time and showing the higher value in Fe-12Cr-22Mn-1Ti alloy than Fe-12Cr-22Mn-3Co alloy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.675-676
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• 2010