• Vacuum Magazine
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• v.2 no.1
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• pp.10-16
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• 2015

With the recognition of nanotechnology as one of the future strategic technologies, the R&D efforts have been performed under exclusive supports of governments and private sectors. At present, nanotechnology is at the focus of research and public attention in almost every advanced country including USA, Japan, and many others in EU. Keeping tracks of such technical trends, center for nanoscale mechatronics and manufacturing (CNMM) was established in 2002 as a part of national nanotechnology promotion policy led by ministry of science and technology (MOST) in Korea. It will hold widespread potential applications in electronics, optical electronics, biotechnology, micro systems, etc, with the promises of commercial visibility and competitiveness. In this paper, wafer scale multilayer nanoimprint lithography technology which is well-known the next generation lithography, roll-typed nanoimprint lithography (R-NIL), roll-typed liquid transfer imprint lithography (R-LTIL), the key technology for nanomanufacturing and nanoscale measurement technology will be introduced. Additionally, its applications and some achievements such as solar cell, biosensor, hard disk drive, and MOSFET, etc by means of the developed multilayer nanoimprint lithography system are introduced.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2005.11a
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• pp.37-41
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• 2005

When screen size of the Flat Panel Display (FPD) becomes larger, the traditional photo-lithography using photomasks and UV lamps might not be possible to make patterns on Photo Resist (PR) material due to limitation of the mask size. Though the maskless photo-lithography using UV lasers and scanners had been developed to implement large screen display, it was very slow to apply the process for mass-production systems. The laser exposure system using 405 nm semi-conductor lasers and Digital Micromirror Devices (DMD) has been developed to overcome above-mentioned problems and make more than 100 inches FPD devices. It makes very fine patterns for full HD display and exposes them very fast. The optical engines which contain DMD, Micro Lens Array (MLA) and projection lenses are designed for 10 to 50 ${\mu}m$ bitmap pattern resolutions. The test patterns for LCD and PDP displays are exposed on PR and Dry Film Resists (DFR) which are coated or laminated on some specific substrates and developed. The fabricated edges of the sample patterns are well-defined and the results are satisfied with tight manufacturing requirements.

• Journal of Biosystems Engineering
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• v.30 no.5 s.112
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• pp.306-311
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• 2005

In this study, a biosensor was developed to rapidly diagnose the swine sarcoptic mange (Sarcoptes scabies var. suis). The ELISA was modified to reduce the processing time for rapid diagnosis. The biosensor consists of a biological reaction part, and a measurement and control part. The biological reaction part was designed for using micro-pumps and valves for fluid transportation, and the measurement control part composed of a photodiode, a light-emitting diode fur light measurement, and a microcomputer to implement assay A polystyrene covet was used as a reaction chamber. Signal output was read as the rate of change in optical density at 645nm. Eighteen pigs diagnosed with sacroptic mange and 19 control pigs were tested. Fifteen sacbies-infested pigs showed positive results ($83.3\%$ sensitivity). Sixteen control pigs showed negative results ($84.2\%$ specificity). The system could execute a diagnosis cycle in about 45 min. The results suggest that this biosensor is useful for the rapid diagnosis of swine sacroptic mange.

• Laser Solutions
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• v.18 no.2
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• pp.1-4
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• 2015

This study is related to the surface hardening treatment to spheroidal graphite cast iron for die by using high power diode laser. Laser device used in this experiment is capable of real-time laser power control. This is because the infrared temperature sensor (two color pyrometer) attached to the optical system measures the surface temperature of specimen and adjusts the laser power in real time. The surface treatment was carried out with the change of heat treatment temperature at the beam travel speed 3 mm/sec. Hardened width and depth was measured and hardened zone was analyzed by micro vickers hardness test in order to research the optimum condition of heat treatment. The changes in microstructure of the hardened zone also was examined. As a result of hardness measurement and observations on microstructure of hardened zone, hardness increased over three times as compared with base metal because the martensite was formed on the matrix structure.

• Korean Journal of Remote Sensing
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• v.24 no.6
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• pp.559-569
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• 2008

The Geostationary Ocean Color Imager (GOCI) on board the Communication Ocean Meteorological Satellite (COMS), the first geostationary ocean color sensor, requires accurate atmospheric correction since its eight bands are also affected by atmospheric constituents such as gases, molecules and atmospheric aerosols. Unlike gases and molecules in the atmosphere, aerosols can interact with sunlight by complex scattering and absorption properties. For the purpose of qualified ocean remote sensing, understanding of aerosol-radiation interactions is needed. In this study, we show micro-physical and optical properties of aerosols using the Optical Property of Aerosol and Cloud (OPAC) aerosol models. Aerosol optical properties, then, were used to analysis the relationship between theoretical satellite measured radiation from radiative transfer calculations and aerosol optical thickness (AOT) under various environments (aerosol type and loadings). It is found that the choice of aerosol type makes little different in AOT retrieval for AOT<0.2. Otherwise AOT differences between true and retrieved increase as AOT increases. Furthermore, the differences between the AOT and angstrom exponent from standard algorithms and this study, and the comparison with ground based sunphotometer observations are investigated. Over the northeast Asian region, these comparisons suggest that spatially averaged mean AOT retrieved from this study is much better than from standard ocean color algorithm. Finally, these results will be useful for aerosol retrieval or atmospheric correction of COMS/GOCI data processing.

• Korean Journal of Optics and Photonics
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• v.22 no.6
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• pp.283-290
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• 2011

A Raman LIDAR system has been designed and constructed for quantitative measurement of water vapor mixing ratio. The comparison with commercial microwave radiometer and global navigation satellite system(GNSS) was performed for the precipitable water vapor(PWV) profile and total PWV. The result shows that the total GNSS-PWV and LIDAR-PWV have good correlation with each other. But, there is small difference between the two methods because of maximum measurement height in LIDAR and the GNSS method. There are some significant differences between Raman and MWR when the water vapor concentration changes quickly near the boundary layer or at the edge of a cloud. Finally we have decided that MWR cannot detect spatial changes but LIDAR can measure spatial changes.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.4 no.1
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• pp.59-64
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• 2006

Ion exchange resin particles should not be found in steam generator(S/G) sludge. The suspicious spherical resin particles observed in S/G sludge sample were characterized for particle size distribution under optical microscope using the micro-technique, for element analysis by the electron probe micro analysis (EPMA), and for molecular identification by the IR spectroscopy. The particle sizes are distributed from 1 to $200{\mu}m$ for the sludge, while 40 to $500{\mu}m$ for the spherical resin particles. The results of the elemental analysis showed different major impurities: Si, Al, Mn, Cr, Ni, Zn and Ti for the sludge particles, while Si, Cu, Zn for the spherical resin particles. However, both particles contain Fe as a matrix of magnetite $(Fe_3O_4)$. IR spectrum of the spherical particles was not quite similar to the IR spectrum of ion exchange resins used in S/G system. These results indicate that the spherical particles are not related to ion exchange resin particles and may be formed by the process of the sludge formation.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.1
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• pp.71-77
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• 2015

Ultrasonic imprinting is a micropattern replication technology for a thermoplastic polymer surface that uses ultrasonic vibration energy; it has the advantages of a short cycle time and low energy consumption. Recently, ultrasonic imprinting has been further developed to extend its functionality: (i) selective ultrasonic imprinting using mask films and (ii) repetitive ultrasonic imprinting for composite pattern development. In this study, selective ultrasonic imprinting was combined with repetitive imprinting in order to replicate versatile micropatterns. For this purpose, a repetitive imprinting technology was further extended to utilize mask films, which enabled versatile micropatterns to be replicated using a single mold with micro-prism patterns. The replicated hybrid micropatterns were optically evaluated through laser light images, which showed that versatile optical diffusion characteristics can be obtained from the hybrid micropatterns.

• Korean Journal of Optics and Photonics
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• v.27 no.5
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• pp.165-173
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• 2016

In this paper, we propose a three-dimensional (3D) scanning system based on two line lasers. This system uses two line lasers with different wavelengths as light sources. 532-nm and 630-nm line lasers can compensate for missing scan data generated by geometrical occlusion. It also can classify two laser planes by using the red and green channels. For automatic registration of scanning data, we control a stepping motor and divide the motor's rotational degree of freedom into micro-steps. To this end, we design a control printed circuit board for the laser and stepping motor, and use an image processing board. To compute a 3D point cloud, we obtain 200 and 400 images with laser lines and segment lines on the images at different degrees of rotation. The segmented lines are thinned for one-to-one matching of an image pixel with a 3D point.

• Korean Journal of Optics and Photonics
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• v.15 no.5
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• pp.423-428
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• 2004

The development of a compact and high performance MWIR thermal imaging sensor based on the SOFRADIR 320${\times}$240 element IRCCD detector is described. The sensor has 20 magnification zoom optics with the maximum 40$^{\circ}$${\times}$30$^{\circ}$ of super wide field of view and 7.6 cycles/mrad of resolving power with the operation of attached micro-scanning system. In order to correct nonuniformities of detector arrays, we have proposed a multi-point correction method using defocusing of the optics and we have acquired the highest quality images. The MRTD of our system shows good results below 0.05K at spatial frequency 1 cycles/mrad at narrow field of view. Experimental data and obtained performances are presented and discussed.