• Journal of the Korean Society for Precision Engineering
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• v.19 no.1
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• pp.99-106
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• 2002

For the development of a ultra-precision CNC polishing system including on-machine measurement system, we study a corrective polishing algorithm. We calculated unit removal profiles for various flat type polishing tools and polishing tool positions. Using these results we simulate the corrective polishing process based on dwell time control. We calculate dwell time distributions and residual error of the polishing simulation method and the FFT calculation method. We test corrective polishing algorithm with an optical glass. The target removal shape is a sine wave that has amplitude 0.3 micro meters. We find this polishing process has a machining resolution of nanometer order and is effective for sub-micrometer order machining. This result will be used for the software development of the CNC polishing system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.645-648
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• 2005

Microscopy has enabled the development of many advanced technologies, and higher level microscopic techniques are required according to the increase of research in nano-technology and bio-technology fields. Therefore, in many applications, we need to measure the dimension of micro-scale parts accurately, not just to observe their shapes. To establish the meter-traceability in microscopy, gratings have been widely used as a magnification standard. KRISS provides the certification service of magnification standards using an optical diffractometer and a metrological AFM (MAFM). They are based on different measurement principles, and so can give complementary information for each other. In this paper, we describe the configuration of each system and measurement procedures to certificate grating pitch values of magnification standards. Several measurement results are presented, and the discussion about them are also given. Using the optical diffractometer, we can calibrate a grating specimen with uncertainty of less than 50 pm. The MAFM can measure a grating specimen of down to 100 nm pitch value, and the calibrated values usually have uncertainty less than 500 pm.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.406-411
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• 2003

One of the trends on information storage device is focused on the development of micro-optical devices with OFH (Optical Flying Head). Many different types of sliders for OFH and optical component systems have been introduced in the literature. However, the important issue on the mechanical system, which consists of suspension, swing arm and VCM (Voice Coil Motor) part has not been discussed up to date. In this research, we analyses the suspension, which is used for the small form factor MO drive. The analysis is in process two ways. One is probabilistic analysis, another is dynamic shock analysis. Probabilistic analysis is a technique you can use to assess the effect of uncertain input parameters and assumptions on your analysis model. Using a probabilistic analysis you can and out how much the results of a finite elements analysis are affected by uncertainties in the model. Dynamic shock analysis is used for the mobile applications. The mechanical robustness of the suspension simulating the shock responses of a disk-suspension is proposed in this paper.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.1
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• pp.5-13
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• 2014

Number of components and payload systems installed in satellites were found to be exposed to various disturbance sources such as the reaction wheel assembly, the control moment gyro, coolers, and others. A micro-level of vibration can introduce jitter problems into an optical payload system and cause significant degradation of the image quality. Moreover, the prediction of on-orbit vibration effects on the performance of optical payloads during the development process is always important. However, analyzing interactions between subsystems and predicting the vibration level of the payloads is extremely difficult. Therefore, this paper describes the analytical and experimental approach to microvibration effects on satellite optical payload performance with integrated jitter analysis frame-work, microvibration emulator and satellite structure testbed.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.2
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• pp.29-35
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• 2017

In this paper, we investigated a manufacturing process of metal micro-wire interconnection on submillimeter diameter catheter. Over the years, flexible electronic researches have focused on flexible plane polymer substrate and micro electrode manufacturing on its surface. However, a curved polymer substrate, such as catheter, is very important for medical application. Among many catheters, importance of submillimeter diameter steerable catheter is increasing to resolve the several limitations of neurosurgery. Steering actuators have been researched for realizing the steerable catheter, but there is no research about practical wiring for driving these actuators. Therefore we developed a new manufacturing process for metal micro-wire interconnection on submillimeter diameter catheter. We designed custom jigs for alignment of the metal micro-wires on the submillimeter diameter catheter. An UV curing system and commercial products were used to reduce the manufacturing time and cost; Au micro-wire, UV curable epoxy, UV lamp, and submillimeter diameter catheter. The assembled catheter was characterized by using an optical microscope, a resistance meter, and a universal testing machine.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.95-102
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• 2007

The scanning electron microscope (SEM) is one of the most popular instruments available for the measurement and analysis of the micro/nano structures. It is equipped with an electron optical system that consists of an electron beam source, magnetic lenses, apertures, deflection coils, and a detector. The magnetic lenses playa role in refracting electron beams to obtain a focused spot using the magnetic field driven by an electric current from a coil. A SEM column usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present work concerns finite element analysis for the electron magnetic lenses so as to analyze their magnetic characteristics. To improve the performance of the magnetic lenses, the effect of the excitation current and pole-piece design on the amount of resulting magnetic fields and their peak locations are analyzed through the finite element analysis.

• Journal of Broadcast Engineering
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• v.20 no.6
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• pp.928-937
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• 2015

A portable head up display (HUD) using the optical combiner lens with a 0.47inch LCD panel for a portable multi-windows virtual display is proposed. The proposed system consists of several micro panels, optical devices, and RGB 3in1 light-emitting diodes (LED) for making the full color display, and video and audio format for the high definition multimedia interface (HDMI) for the connecting between HUD and mobile phone. The multi-windows HUD is designed as an alternative to conventional built-in type HUD targeting the mass volume aftermarket at an affordable price.

• Proceedings of the IEEK Conference
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• 2003.07c
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• pp.2911-2914
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• 2003

Conventionally, biological manipulations have been performed manually with long training and pretty low success rates. To overcome this problem, a novel biological manipulation system has been developed to manipulate biological cells without any interference of a human operator, In this paper, we demonstrate a development of tole-autonomous Cell Manipulation System (CMS) using an image processing at a remote site. The CMS consists of two manipulators, a plane stage, and an optical microscope. We developed deformable template-model-matching algorithm for micro objects and pattern matching algorithm of end effect for these manipulators in order to control manipulators and the stage. Through manipulation of biological cells using these algorithms, the performance of the CMS is verified experimentally.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.950-955
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• 2001

For the development of an ultra-precision CNC polishing system including on-machine measurement system, we study a corrective polishing algorithm. We analyze and test the unit removal profiles for a ball type polishing tool. Using these results we calculate dwell time distributions and residual errors for a target removal shape. We use the polishing simulation method and feed rate calculation method for the dwell time calculation. We test corrective polishing algorithm with an optical glass. The target removal shape is a sine wave that has amplitude 0.3 micro meters. We find this polishing process has a machining resolution of nanometer order and is effective for sub-micrometer order machining. This result will be used for the software development of the CNC polishing system.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.2
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• pp.33-39
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• 2003

A new microlens fabrication technique, the excimer laser lithography is developed. This bases on the pulsed laser irradiation and the transfer of a chromium-on-quartz reticle on to the polymer surface with a proper projection optics system. An excimer laser lithography system with 1/4 and 1/20 demagnification ratios was constructed first, and the photoablation characteristics of the PMMA and Polyimide were experimentally examined using this system. For two different shapes of microlenses, a spherical lens and a cylindrical lens, fabrication techniques were investigated. One for the spherical lens is a combination of the mask pattern projection and fraction effect. The other for the cylindrical lens is a combination of the mask pattern projection and the relative movement of a specimen. The result shows that various shapes of micro optical components can be easily fabricated by the excimer laser lithography.