• Title/Summary/Keyword: Micro optical system

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A study on MicroCantilever Deflection for the Infrared Image Sensor using Bimetal Structure (바이메탈형 적외선 이미지 센서 제작과 칸틸레버 변위에 관한 고찰)

  • Kang, Jung-Ho
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.4 no.4
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    • pp.34-38
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    • 2005
  • This is a widespread requirement for low cost lightweight thermal imaging sensors for both military and civilian applications. Today, a large number of uncooled infrared detector developments are under progress due to the availability of silicon technology that enables realization of low cost IR sensor. System prices are continuing to drop, and swelling production volume will soon drive process substantially lower. The feasibility of micromechanical optical and infrared (IR) detection using microcantilevers is demonstrated. Microcantilevers provide a simple Structurefor developing single- and multi-element sensors for visible and infrared radiation that are smaller, more sensitive and lower in cost than quantum or thermal detectors. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress originating from the bimetallic effect. This paper reports a micromachined silicon uncooled thermal imager intended for applications in automated process control. This paper presents the design, fabrication, and the behavior of cantilever for thermomechanical sensing.

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Study on Manufacturing Aspheric Lens Array with High NA using Reflow Phenomenon (리플로우 현상을 이용한 고 개구수를 갖는 비구면 렌즈 어레이의 제작에 관한 연구)

  • 김완진;이명복;손진승;박노철;박영필
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.644-647
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    • 2003
  • Resulting from reproducibility and possibility of mass production. many researches to fabricate micro lens array using lithography have been developed. However, it still remains the level of fabricating compensation lens. Therefore, to realize the fabrication of lens having high numerical aperture can be the key technology of ultra slim optical system. Reflow phenomenon have been researched to make lens having high refractive power. And through those researches, the possibility to fabrication of high refractive power lens has been investigated. In this paper, we analyze the effect of many parameters in reflow process to get an aspheric shape with high repeatability. And we make possible to estimate shape error, through we give direct information about decrease in volume of photoresist.

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3-Dimensional Shape Inspection for Micro BGA by LED Reflection Image (LED 반사영상을 이용한 마이크로 BGA 3차원형상검사)

  • Kim, Jee Hong
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.2
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    • pp.55-59
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    • 2017
  • An optical method to inspect the 3-D shape of surface of Micro BGA is proposed, where spatially arranged LED light sources and specular reflection are considered. The reflected image captured by a vision system was analyzed to calculate the relative displacements of LED's in the image. Also, the statistics for all BGA's contained in a captured image are used together to find out the criteria for the detection of existing defects, and the usefulness of the proposed method is shown via experiments.

Display Technologies for Immersive Devices and Electronic Skin (디스플레이 현황과 발전방향 -실감 및 스킨 기기로의 확대)

  • Park, Y.J.
    • Electronics and Telecommunications Trends
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    • v.34 no.2
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    • pp.10-18
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    • 2019
  • Since the introduction of CRT(Cathode Ray Tube) in the 1950s, display technologies have been developed continuously. Flat panel displays such as PDP(Plasma Display Panel) and LCD(Liquid Crystal Display) were commercialized in the late 1990s, and OLED(Organic Light Emitting Diodes) and Micro-LED(Micro-Light Emitting Diodes) are now being developed and are becoming widespread. In the future, we expect to develop ultra-realistic, flexible, embedded sensor displays. Ultra-realistic display can be applied to AR/VR(Augmented Reality/Virtual Reality) devices and spatial light modulators for holography. The sensor-embedded display can be applied to robots; electronic skin; and security devices, including iris recognition sensors, fingerprint recognition sensors, and tactile sensors. AR/VR technology must be developed to meet technical requirements such as viewing angle, resolution, and refresh rate. Holography requires optical modulation technology that can significantly improve resolution, viewing angle, and modulation method to enable wide-view and high-quality hologram stereoscopic images. For electronic skin, stable mass production technology, large-area arrays, and system integration technologies should be developed.

Development of Hybrid Machining System and Hybrid Process Technology for Ultra-fine Planing and Micro Punching (초정밀 평삭가공과 마이크로 펀칭가공을 위한 하이브리드 가공장비 및 공정기술 개발)

  • Kim, Han-Hee;Jeon, Eun-Chae;Cha, Jin-Ho;Lee, Je-Ryung;Kim, Chang-Eui;Choi, Hwan-Jin;Je, Tae-Jin;Choi, Doo-Sun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.6
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    • pp.10-16
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    • 2013
  • Ultra-fine planing and micro punching are separately used for improving surface roughness and machining dot patterns, respectively, of metal molds. If these separate machining processes are applied for machining of identical molds, there could be an aligning mismatch between the machine tool and the mold. A hybrid machining system combining ultra-fine planing and micro punching was newly developed in this study in order to solve this mismatch; hybrid process technology was also developed for machining dot patterns on a mirror surface of a metal mold. The hybrid machining system has X, Y, and Z axes, and a cam axis for ultra-fine planing. The cam axis and attachable and removable solenoid actuators for micro punching can make large and small sizes of dot patterns, respectively. Ultra-fine planing was applied in the first place to improve the surface roughness of a metal mold; the measured surface roughness was about 20nm. Then, micro punching was applied to machine dot patterns on the same mold. It was possible to control the diameter of the dot patterns by changing the input voltage of the solenoid actuator. Before machining, severe inhomogeneous plastic deformation around the machined dot patterns was also removed by annealing heat treatment. Therefore, it was verified that metal molds with dots patterns for optical products can be machined using a hybrid machining system and the hybrid process technology developed in this study.

Thermal Insulation Property of UV Cure Coatings Using Hollow Micro-Spheres (마이크로 중공구를 이용한 자외선 경화 코팅 박막의 단열 특성)

  • Kim, Nam Yi;Chang, Young-Wook;Kim, Seong Woo
    • Korean Chemical Engineering Research
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    • v.50 no.4
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    • pp.621-626
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    • 2012
  • In this study, the composite coating materials with improved thermal insulation property were prepared by incorporating the hollow micro-spheres with high heat transfer resistance. The UV curable resin system consisting of hexa aliphatic urethane acrylate (UP118), trimethylolpropane triacrylate (TMPTA), 1,6-hexanediol diacrylate (HDDA), and photoinitiator (Irgacure184) was employed as an organic binder. The glass substrates were coated by the prepared composites via bar coating method and cured under UV radiation. The optical transparency, thermal insulation property, adhesion, and surface hardness of the glass coated with composites containing different type of micro-spheres were investigated. The incorporation of micro-spheres with only 20 vol% of content resulted in remarkable improvement in the thermal insulation property of the coated glass. In addition, the transparent coated glass with light transmittance of about 80% could be obtained when silica micro-sphere (SP) was used as a thermal barrier.

Double-Pitch Dual Grating Method for Detecting the Axial Offset in Roll System (2 배수 피치비를 갖는 이중 격자 측정법을 이용한 축방향 롤 회전 오차 측정)

  • Kim, Geehong;Ten, Aleksey-Desen;Lim, Hyungjun;Lee, Jaejong;Choi, Keebong
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.12
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    • pp.1273-1279
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    • 2013
  • We propose a dual grating alignment technique for roll-to-roll positioning which allows achieving nanometer scale alignment by using micro-size marks. The high precision alignment system were designed and manufactured. It was confirmed that the optical system was properly adjusted and fully aligned with the dual gratings. The experiment and computer simulation results were presented. Alignment accuracy below 50 nm was achieved.

Confocal Scanning Microscopy : a High-Resolution Nondestructive Surface Profiler

  • Yoo, Hong-Ki;Lee, Seung-Woo;Kang, Dong-Kyun;Kim, Tae-Joong;Gweon, Dae-Gab;Lee, Suk-Won;Kim, Kwang-Soo
    • International Journal of Precision Engineering and Manufacturing
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    • v.7 no.4
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    • pp.3-7
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    • 2006
  • Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

Investigations on the Magneto-optical Properties of Bilayered Co/Ni Micro-patterned Anti-dot Arrays

  • Deshpande, N.G.;Zheng, H.Y.;Hwang, J.S.;Lee, S.J.;Lee, Y.P.;Rhee, J.Y.;Kim, K.W.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.251-251
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    • 2012
  • A lot of studies are undergoing on the magneto-optical (MO) properties of patterned magnetic systems for the reason that they have potential application to information technology such as ultrahigh-speed computing. Moreover, they can be considered as the future candidates for high-density MO storage devices. Not only the technical aspects, but there have been also tremendous interests in studying their properties related to the fundamental physics. The MO Kerr-rotation effects (both in reflected and the diffracted modes) and the magnetic force microscopy (MFM) are very useful techniques to investigate the micromagnetic properties of such periodic structures. Hence, in this study, we report on the MO properties of bilayered Cobalt (Co)/ nickel (Ni) micro-patterned anti-dot arrays. Such a ferromagnetic structure was made by sequentially depositing co (40 nm)/Ni (5 nm) bilayer on a Si substrate. The anti-dot patterning with hole diameter of $1{\mu}m$ was done only on the upper Co layer using photolithography technique, while the Ni underlayer was kept uniform. The longitudinal Kerr rotation (LKR) of the zeroth- and the first-order diffracted beams were measured at an incidence of $30^{\circ}$ by using a photoelastic modulator method. The external magnetic field was applied perpendicularly to the reflected and the diffracted beams using an electromagnet capable of a maximum field of ${\pm}5$ kOe. Significantly, it was observed that the LKR of the first-order diffracted beam is nearly 4 times larger than that of the zeroth-order beam. The simulated results for the hysteresis loops matched qualitatively well with the experimentally obtained ones. In conjunction with the LKR, we also investigated the magnetic-domain structure by using a MFM system, which were analyzed to elucidate the origin of the enhanced MO rotation.

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Fabrication and characteristics of electrostatic micro mirror for optical disk drives (광 저장장치 응용을 위한 마이크로 미러의 제작과 그 특성)

  • Kim, Jong-Wan;Seo, Hwa-Il;Lee, Woo-Young;Rim, Kyung-Hwa;Jang, Young-Jo
    • Journal of Sensor Science and Technology
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    • v.11 no.1
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    • pp.39-47
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    • 2002
  • Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology. Especially, the Process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the process reliability. The mirror size was $2.5mm{\times}3mm$ and it needed about 35V for displacement of $3.2{\mu}m$.