• Korean Journal of Optics and Photonics
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• v.22 no.4
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• pp.191-197
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• 2011

In this paper, we have designed an integrated triplexer which is the basic component for a FTTH(Fiber To The Home) system which can transmit CATV and voice/data at the same time in a single fiber. The integrated triplexer can be fabricated with a novel technique of "Micro-Block Stacking (MBS)" method which automatically aligns the optical components in the optical beam pass using accurate ceramic holders. We analyze the displacement of the optical focus according to the tolerances of the component dimensions and the assembly process using code V simulator. For the transmitter, the most serious shift of the focal points is caused by the displacements of the LD spot. So the focal point moves up to $72{\mu}m$ from the center point for ${\pm}25{\mu}m$, ${\pm}25{\mu}m$, ${\pm}30{\mu}m$ displacements. For the receiver the most serious shift of the focal points is caused by the displacements of a 0.8mm ball lens (for the analog receiving part) and a micro ball lens (for the digital receiving part), and the focal point moves up to $55{\mu}$ for ${\pm}55{\mu}m$, ${\pm}5{\mu}m$, ${\pm}55{\mu}m$ micro ball lens displacements.

• Korean Journal of Optics and Photonics
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• v.2 no.4
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• pp.186-192
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• 1991

For the micro-lithography using a excimer laser beam $(\lambda\leq0.248$\mu\textrm{m})$. a mirror system consisting of four spherical surfaces with reductlon magnification 5X is designed. Initially the aplanat, flat field and the distortion free condition of the system are analytically investigated within Seidel 3rd order aberrations. And the computer-aided optimization technique has been employed for the further improved performance of the system. The final system has N.A. of 0.15 and image field diameter 3.3 mm, and has the diffraction-limited performance for KrF eximer laser beam.

• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.276-277
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• 2003

전체 반도체 소자 제조 공정의 40 ％를 차지하고 있는 리소그래피 기술은 기억 소자뿐만 아니라 마이크로 프로세서, ASIC 등의 실리콘 소자와 군사 및 통신에 많이 사용되고 있는 화합물 반도체를 만드는 데도 쓰이고 있고, 요즈음은 DRAM 의 리소그래피 기술들을 LCD 등의 평판 표시 장치, 디스크 헤드, 프린터 헤드 및 MEMS(Micro-Electro-Mechanical System), 나노 바이오 칩 등의 제작에 응용하여 쓰고 있다. 리소그래피 기술은 생산 원가 면에서 제일 큰 비중을 차지하고 있을 뿐만 아니라 집적소자의 초고집적화 및 초미세화를 선도하는 기술이다. (중략)

• Transactions of Materials Processing
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• v.18 no.2
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• pp.107-111
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• 2009

Temperature variation happens in micro prism roll mold processing system during machining the prism pattern roll mold using manufacturing optical films of LCD (liquid crystal display). This temperature variation induces pitch errors of the prism patterns. The temperature variation displaces the positions of the diamond cutting tool on the roll which was coated by the copper. In order to prevent the pitch errors, the stabilizing the temperature of machining environment is needed. Therefore, the researching on the temperature variation of the ultra-precision roll mold processing system on the machining of micro prism rot 1 mold is needed. In this paper, the temperature variation of micro prism roll mold processing system is researched, the influence is analyzed, and the study for reducing the pitch errors carried out.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• Smart Structures and Systems
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• v.1 no.1
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.2 s.95
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• pp.184-191
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• 2005

The near-field scanning micro scope (NSOM) technique is in the spotlight as the next generation storage device. Many different types of read/write mechanism for NSOM have been introduced in the literature. In order for a near-field probe to be successfully implemented in the system, a suitable slider and suspension are needed to be properly designed. The optical slider is designed considering near-filed optics and probe array. The suspension generally supports slider performance, and tracking servo capacity in HDD. Moreover, the suspension for optical slider also should meet the optical characteristics, and is also required to satisfy shock performances for the mobility for the actuator. In this study, the optical slider and the suspension for near-field probe array are designed and analyzed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.393-398
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• 2004

The near-field scanning micro scope (NSOM) technique is in the spotlight as the next generation storage device. Many different types of read/write mechanism for NSOM have been introduced in the literature. In order for a near-field probe to be successfully implemented in the system, a suitable slider and suspension are needed to be properly designed. The optical slider is designed considering near-filed optics and probe array. The suspension generally supports slider performance, and tracking servo capacity in HDD. Moreover, the suspension for optical slider also should meet the optical characteristics, and is also required to satisfy shock performances for the mobility for the actuator. In this study, the optical slider and the suspension fer near-field probe array are designed and analyzed.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.1405-1408
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• 2008

Synchronization signal circuit system for low cross-talk stereoscopic display. We proposed the employment of the scanning beams of any adjacent scanning regions gradually scan from upper to down direction of the LED backlight panel.

• Journal of Electrical Engineering and Technology
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• v.1 no.2
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• pp.263-267
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• 2006

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.