• 한국기계가공학회지
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• 제11권2호
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• pp.1-6
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• 2012

Recent ultra-precision machining systems have nano-scale resolution, and can machine various shapes of complex structures using five-axis driven modules. These systems are also multi-functional, which can perform various processes such as planing, milling, turning et al. in one system. Micro machining technology using these systems is being developed for machining fine patterns, hybrid patterns and high aspect-ratio patterns on large-area molds with high productivity. These technology is and will be applied continuously to the fields of optics, display, energy, bio, communications and et al. Domestic and foreign trends of micro machining technologies for flat molds were investigated in this study. Especially, we focused on the types and the characteristics of ultra-precision machining systems and application fields of micro patterns machined by the machining system.

• 한국공작기계학회논문집
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• 제16권2호
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• pp.70-77
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• 2007

The application of focused ion beam(FIB) technology has been broadened in the fabrication of nanoscale regime. The extended application of FIB is dependent on complicated reciprocal relation of operating parameters. It is necessary for successful and efficient modifications on the surface of silicon substrate. The primary effect by Gaussian beam intensity is significantly shown from various aperture size, accelerating voltage, and beam current. Also, the secondary effect of other process factors - dwell time, pixel interval, scan mode, and pattern size has affected to etching results. For the process analysis, influence of the secondary factors on FIB micromilling process is examined with respect to sputtering depth during the milling process in silicon material. The results are analyzed by the ratio of signal to noise obtained using design of experiment in each parameter.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.326-331
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• 2000

In this study, residual stress was investigated experimentally to evaluate damaged layer in high-sped machining. In machining difficult-to-cut material, residual stress remaining in machined surface was mainly speared as compressive stress. The scale of this damaged layer depends upon cutting speed, feed per tooth and radial cutting depth. Damaged layer was measured by optical microscope. The micro-structure of damaged layer was a mixed maternsite and austenite. depth of damaged layer is increased with increasing of cutting temperature, cutting force and radial depth. On the other hand, that is slightly decreased with decreasing of cutting force. The increase of tool wear causes a shift of the maximum residual stress in machined surface layer.

• 대한기계학회논문집
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• 제17권5호
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• pp.1172-1182
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• 1993

본 연구에서는 버형성중의 파단을 파단전의 소성변형의 과정이 파단에 영향을 미치는 연성파단(ductile fracture)으로 간주하여 McClintock의 연성파단에 관한 모델 을 이용하여 버형성중의 파단변형도를 얻었다. 이 파단변형도가 인장시험으로부터 얻 은 파단변형도와 커다란 오차가 없음을 확인하여 편의상 인장시험에서의 파단변형도를 버형성중의 파단발생 판정기준으로 사용하였다. 버형성이 시작된 이후에 공구인선부 에서의 피삭재의 변위의 발달에 관한 모델이 제시되었고 파단변형도와 최대변형량과의 비교로부터 파단위치와 각도가 결정된다.