• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.381-387
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• 2014

This paper introduces a system to machine micro-sized patterns effectively on surface based on micro-milling process using tools with simultaneous rotation and oscillation, oscillation micro milling. To review the effectiveness of proposed concept, we integrated a micro-spindle supported by active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. Two types of oscillation milling were tested, which are linear oscillation milling with a flat end mill and elliptical oscillation milling with a ball end mill with 0.3 mm of diameter. The spindle was rotating 110 krpm and workpiece was moving constant speed of 2~8 mm/sec during the oscillation milling. As the results, multiple oval shape dimples were generated in regular spacing, and the variation of elliptical motion made different shapes of patterns. The results showed that proposed oscillation milling can be successfully used for machining repeated micro-patterns.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1203-1206
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory, a micro-milling machine is developed for micro machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, air turbine spindle which has maximum 150.000 rpm. It is applicable to milling and drilling machining. This paper shows the possibility of micro machining and characteristics of micro end milling process by using micro machine. A machining of micro barrier ribs using 0.2 mm flat type end mill was achieved by micro-milling machine. As experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.101-107
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• 2007

Assembly is mentioned as important process saving time and cost where we produce the machine with many parts relationships. In this study, parts assembly relationship is analysed for assembly information of micro milling machine which have been developing for research. Liaison diagram, datum flow chain and assembly tree are applied to discuss assembly characteristics of micro milling machine model. We can find out the characteristics of micro machine assembly and discuss about facility of assembly. Some analysis in this paper about micro milling machine will give a useful tools for assembly. We knew that the predicted results from analysis in this study are alignment and clearance among the parts. The 3D model of micro machine which is studied in this paper is not a complete model. Main parts of a micro milling machine are used and presented.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.167-172
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• 2003

The machining method by using end-milling tool has been applying in machining structures of various shapes because of the availability. Recently, all kinds of industries based on the parts of micro shape are developing, and the demands of mechanical micro machining technology are Increasing suddenly to produce these parts. According to such changes, the technology of the micro end-milling machining is applying as one of the most important machining means. This research is to aim at developing machining technology for various micro structures using micro end-mill. This paper introduces micro mechanical machining system with ultra precision, and demonstrates methods manufacturing all sorts of parts and moldings for industry and examples of applicable machining by using micro end-milling tool of micro sizes from hundreds to tens in diameter.

• Transactions of Materials Processing
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• v.14 no.3 s.75
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• pp.251-256
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• 2005

3-D micro structures and micro tools were fabricated using Micro Electrical Discharge Machining (MEDM). To make micro structures, micro electrical discharge milling process was applied. During micro electrical discharge milling, electrode (tool) worn in the both axial and radial direction. To compensate tool wear which has significant influence on machining accuracy, machining path overlapping was proposed. Machining characteristics of micro electrical discharge milling was investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools were also fabricated using REDM (reverse electrical discharge machining). Sacrificial electrodes were machined through electrical discharge milling process and were used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' were fabricated. With these complex shaped tools, micro machining was successfully applied repeatedly.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.11a
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• pp.255-259
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• 2004

3-D micro structures and micro tools are fabricated using MEDM (Micro Electric Discharge Machining). To make micro structures, micro electro discharge milling process is applied. During micro electro discharge milling, electrode (tool) wears both axial and radial direction. To compensate tool wear which influences significantly machining accuracy, overlap machining path is proposed. Machining characteristics of micro electro discharge milling is investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools are fabricated using REDM (reverse electro discharge machining). Sacrificial electrode is machined through electro discharge milling process and is used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' are fabricated. With these complex shaped tools, micro machining is successfully applied repeatedly.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.585-588
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• 2003

As the advance in technology requires micro mechanical systems, the production methods for micro parts are of a great interest of many researchers. Although MEMS is one of the most popular methods. it can only produce 2D microstructures. The micro manufacturing with micro-mill and micro-lathe has a great potential for producing arbitrary 3D shapes and are being researched. In this paper, a PC based 5-axis milling machine with high precision was developed. To evaluate the machine performance, micro ribs and micro columns were machined. The machining experiments of micro impeller and micro turbine blade confirmed the possibility of micro system manufacturing by using the developed milling machine.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.121-127
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• 2008

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Despite the importance of micro end-milling, many related researches have given grand efforts to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. To solve this problem, machining error prediction method was proposed through a series of test micro cutting and analysis of their SEM images. An iterative algorithm was applied in order to obtain corrected tool path which allows reducing machining errors in spite of tool deflection. Experiments are carried out to validate the proposed approaches. In result, remarkable error reduction could be obtained.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.4
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• pp.167-172
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• 2005

In this paper. micro electrochemical machining (ECM) for micro structure fabrications is presented. By applying ultra short pulses. the chemical reaction can be restricted only to the region very close to the electrode. Micro ECM is applied to machining micro structures through electrochemical milling process becasuse it doesn't suffer from tool wear. Using this method. 3D micro structures were machined on stainless steel. It was found that micro machining is possible with good surface quality in the low concentration electrolyte,0.1 M H₂SO₄. In ECM, as the machining depth increases, better flushing of electrolyte is required for sufficient ion supply. Layer-by-layer milling is advantageous in flushing. However, layer-by-layer milling causes taper of structures. To reduce the taper, application of a disk-type electrode was introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 ㎛ diameter were fabricated.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.498-503
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• 2010

The main purpose of this study strongly concerned micro machining error estimation by using FEM analysis of tool deflection shapes in micro flat end-milling process. For the precision micro flat end-milling process, analysis of micro cutting errors is mandatory. In general, tool deflection is a major factor which causes cutting error and limits realization of the high-precision cutting process. Especially, in micro end-milling process, micro tool deflection generates very serious problems in contrast to macro tool deflection. Methods which deal with compensation of cutting error by tool deflection in macro end-milling process have been studied plentifully but, few researches transact with micro scaled cutting tool deflection in micro cutting process. Therefore, the trend of micro tool deflection was estimated by using FEM analysis in this paper. Cutting forces were acquired by micro dynamometer and these were utilized in FEM analysis. In order to verify FEM analysis results, micro machining processes were carried out and real machined profiles were compared with FEM results. Finally through the proposed approach well suited FEM results were obtained.