• 한국정밀공학회지
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• 제19권8호
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• pp.77-83
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• 2002

This research aimed at from the establishment of theory on micro electrochemical machining mechanism to the implementation of a practical fabrication system of micro parts. In detail, the mechanism of micro-ECM was investigated with potentiodynamic method and the optimal condition for micro-ECM was selected by voltage-current-time curve with potentiostatic method. From the experimental result, the micro part which has extremely fine surface could be fabricated by use of micro-ECM with point electrode method.

• International Journal of Safety
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• 제6권2호
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• pp.1-7
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• 2007

In this study mechanical strength of A53B carbon steel was analyzed using several types of test specimens directly machined from oil recycling pipe experienced a failure due to hydrogen attack in chemical plants. High temperature hydrogen attack (HTHA) is the damage process of grain boundary facets due to a chemical reaction of carbides with hydrogen, thus forming cavities with high pressure methane gas. Driven by the methane gas pressure, the cavities grow on grain boundaries forming intergranular micro cracks. Microscopic optical examination, tensile test, Charpy impact test, hardness measurement, and small punch (SP) test were performed. Carbon content of the hydrogen attacked specimens was dramatically reduced compared with that of standard specification of A53B. Traces of decarburization and micro-cracks were observed by optical and scanning electron microscopy. Charpy impact energy in hydrogen attacked part of the pipe exhibited very low values due to the decarburization and micro fissure formation by HTHA, on the other hand, data tested from the sound part of the pipe showed high and scattered impact energy. Maximum reaction forces and ductility in SP test were decreased at hydrogen attacked part of the pipe compared with sound part of the pipe. Finite element analyses for SP test were performed to estimate tensile properties for untested part of the pipe in tensile test. And fracture toughness was calculated using an equivalent strain concept with SP test and finite element analysis results.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1194-1197
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• 2005

Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

• International Journal of Precision Engineering and Manufacturing
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• 제2권3호
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• pp.41-46
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• 2001

This paper discusses the feasibility of improving micro-machining accuracy by using two-dimensional(2-D) vibration cutting. Vibration cutting is generated by two piezo actuators arranged orthogonally : one is actuated by a sine curve voltage input, and the other is actuated by a phase-shifted sine curve voltage. A tool attached to the vibrator oscillates in a 2-D elliptical motion, depending on the frequencies, amplitudes, and the phase shifts of two input signals and the workpiece feedrate. Along the elliptical tool locus, cutting is done in the lower part, and non-cutting is done in the upper part. By this way a unique feature of 2-D vibration cutting, that is, air lubrication between a tool and chips, is caused. Another unique feature of 2-D vibration cutting was experimentally verified, that is, some negative thrust force occurs as the direction of chip movement on a tool rake face is reversed. Those features not only help chips flow smoothly and continuously but also reduce cutting force, which results in a higher quality machined surface. Through tool path simulations and experiments under several micro-machining conditions, the 2-D vibration cutting, compared to conventional cutting, was found to result in a great decrease in the cutting force, a much smoother surface, and much less burr.

• 한국가시화정보학회지
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• 제7권2호
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• pp.35-41
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• 2010

Supersonic microjets acquire considerable research interest from a fundamental fluid dynamics perspective, in part because the combination of highly compressible flow at low-to-moderate Reynolds number is not very common, and in part due to the complex nature of the flow itself. In addition, microjets have a great variety engineering applications such as micro-propulsion, MEMS(Micro-Electro Mechanical Systems) components, microjet actuators and fine particle deposition and removal. Numerical simulations have been carried out at moderate nozzle pressure ratios and for different nozzle exit diameters to investigate and to understand in-depth of aerodynamic characteristics of supersonic microjets.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.313-317
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• 2003

Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80％ after upper surface of micro- channel was polished up 8 minutes by polishing.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• 한국정밀공학회지
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• 제21권10호
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• pp.102-108
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• 2004

In this paper, we studied a vibration problem that is critical and common to most precision measurement systems. For micro mechanical part measurements, results obtained from the vision-based precision measurement system may contain errors due to the vibration. In order to defeat this generic problem, for the current study, a PC based image processing technique was used first, to assess the effect of the vibration to the precision measurement and second, to develop an in-situ calibration algorithm that automatically compensate the measurement results in real time. We used a set of stereoscopic CCD cameras to acquire the images for the dimensional measurement and the reference measurement. The mapping function was obtained through the in-situ calibration to compensate the measurement results and the statistical analysis for the actual results is provided in the paper. Based on the current statistical study, it is expected to obtain high precision results for the micro measurement systems.

• 대한기계학회논문집A
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• 제28권8호
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• pp.1159-1165
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• 2004

This paper describes fabrication of a micro cell counter integrated with an oxygen micropump and counting experiment with Sephadex G-25 beads ($70{\sim}100\;{\mu}m$). The pumping part consisted of a microheater, catalyst (manganese dioxide) enveloped with paraffin, hydrogen peroxide, and microchannel, and the counting part consisted of collimated light, a microwindow, and a phototransistor including an external circuit. The micropump generated oxygen gas by decomposing hydrogen peroxide with manganese dioxide, which was initiated by melting the paraffin with the microheater, and pumped beads in the microchannel. When the beads passed the microwindow, they shaded the collimated light and changed the illumination on the phototransistor, which caused the current variation in the circuit. The signals, according to the bead size, reached up to 22 mV with noise level of 2 mV during 50 seconds and the numbers of peaks were analyzed by magnitude.

• Journal of Welding and Joining
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• 제23권5호
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• pp.55-60
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• 2005

A precise bonding technique, transmission laser bonding using energy transfer, for polymer micro devices is presented. The irradiated IR laser beam passes through the transparent part and absorbed on the opaque part. The absorbed energy is converted into heat and bonding takes place. In order to optimize the bonding quality, the temperature profile on the interface must be obtained. Using optical measurements of the both plates, the absorbed energy can be calculated. At the wavelength of 1100nm $87.5\%$ of incident laser energy was used for bonding process from the calculation. A heat transfer model was applied for obtaining the transient temperature profile. It was found that with the power of 29.5 mW, the interface begins to melt and bond each other in 3 sec and it is in a good agreement with experiment results. The transmission IR laser bonding has a potential in the local precise bonding in MEMS or Lab-on-a-chip applications.