• Korean Journal of Materials Research
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• v.11 no.7
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• pp.556-561
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• 2001

We prepared a new a SOS(silicon-on-silicide) wafer pair which is consisted of Si(100)/1000$\AA$-NiSi Si (100) layers. SOS can be employed in MEMS(micro- electronic-mechanical system) application due to low resistance of the NiSi layer. A thermally evaporated $1000\AA$-thick Ni/Si wafer and a clean Si wafer were pre-mated in the class 100 clean room, then annealed at $300~900^{\circ}C$ for 15hrs to induce silicidation reaction. SOS wafer pairs were investigated by a IR camera to measure bonded area and probed by a SEM(scanning electron microscope) and TEM(transmission electron microscope) to observe cross-sectional view of Si/NiSi. IR camera observation showed that the annealed SOS wafer pairs have over 52% bonded area in all temperature region except silicidation phase transition temperature. By probing cross-sectional view with SEM of magnification of 30,000, we found that $1000\AA$-thick uniform NiSi layer was formed at the center area of bonded wafers without void defects. However we observed debonded area at the edge area of wafers. Through TEM observation, we found that $10-20\AA$ thick amourphous layer formed between Si surface and NiSix near the counter part of SOS. This layer may be an oxide layer and lead to degradation of bonding. At the edge area of wafers, that amorphous layer was formed even to thickness of $1500\AA$ during annealing. Therefore, to increase bonding area of Si NiSi ∥ Si wafer pairs, we may lessen the amorphous layers.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.28 no.3
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• pp.253-262
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• 1995

To develop a device for measuring fish freshness which could be move accurate and reliable than used freshness measuring systems. A new device based on digital circuit was designed using a microcomputer. The device was composed of a sensor part, 8096 microprocessor and a segment display. The effectiveness of device has been evaluated by the coefficient of correlation among the measured freshness stores such as electrical Q-value, K-value and amount of volatile basic nitrogen (VBN) of plaice, Paralichthys Olivaceus, during storage at $-3^{\circ}C,\;0^{\circ}C,\;5^{\circ}C,\;10^{\circ}C,\;and\;25^{\circ}C$. Q-values measured by a new device were more closely correlated with K-value (r=-0.978-\;-0.962,\;p<0.05) and VBN (r=-0.888-\;-0.988,\;p<0.05) in case of plaice meat. If more data would achieve using various fishes, this new designed device could be a valuable kit in fish market by its compact portability.