• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1455-1457
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• 2008

Cell adhesion is a coordinated process involving initial binding of integrin receptors to extracellular matrix (ECM), recruitment of adhesion proteins, and focal adhesion assembly. The formation of mechanically stable focal adhesion assembly of cells within surrounding ECM is a key parameter to direct numerous cellular functions including cell migration, differentiation, and apotosis. With current cell adhesion assays, it is difficult to understand contributions of each coordinated event on evolution of cell adhesion strengthening since cells spontaneously spread upon their adhesion to the substrate, thus remodeling their cytoskeletal structure. In this presentation, novel approaches for analysis of cell adhesion strengthening process based on the combination of mechanical device, micro-patterned substrates, and molecular biological techniques will be discussed.

• Journal of Information Display
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• v.6 no.2
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• pp.1-6
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• 2005

We demonstrated stability-enhanced liquid crystal (LC) displays using pixel-isolated LC mode in which LC molecules are isolated in pixel by horizontal polymer layer and vertical polymer wall. The device shows good electro-optic properties against external point or bending pressure due to the polymer structures. The polymer wall acts as supporting structure from mechanical pressure and prevents the cell gap from bending. Moreover, the polymer layer acts as an adhesive to ensure a tight attachment of the two substrates. We present herein various methods for producing polymer structures by using an anisotropic phase separation from LC and polymer composites or patterned micro-structures for stable flexible liquid crystal displays.

• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.32-33
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• 2000

최근 디지털 정보 처리 기술의 획기적인 발전과 함께 저가의 반도체 레이저의 개발로 말미암아 광기록 장치(optical pickup device) 및 고속 광통신(optical fiber communication)분야에 응용을 위한 레이저 광학 시스템에 대한 연구가 활발하다. 광신호의 커플링(coupling) 및 스위칭(switching)을 기반으로 하는 이러한 광학 시스템은 일반적으로 광신호의 변조를 위한 광학 요소와 광학 요소의 공간적 제어를 위한 정밀 구동기로 구성되는데, 기존의 상용 시스템의 경우에는 독립적으로 기 제작된 광학 요소와 정밀 구동기를 사후에 조립하는 방법으로 소기의 목적을 달성하였다. 이와 같은 경우 제작에 많은 노력과 비용이 요구되며, 성능의 획기적인 향상을 기대하기 어려우므로 최근에는 Optical MEMS 혹은 MOEMS(Micro-Opto-Electro-Mechanical System)로 대변되는 마이크로머시닝기술(micromachining technology)을 이용한 초정밀 광학계의 제작 기술을 통하여 기존 시스템의 한계를 극복하고자 하는 노력이 다각도로 모색되고 있다. (중략)

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.1
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• pp.13-19
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• 2017

The use of ultrasonic surgery units and scalers are steadily increasing in the field of dentistry. Such units and scalers should be evaluated before they are commercialized because the mechanical performance and stability of equipment is crucial for patients. Hence, we created a hand-piece moving system that can test bone cutting and teeth scaling. The purpose of this study was to evaluate the teeth scaling performance of ultrasonic scaler unit. Additionally, we measured the temperature distribution and noise during the test. through an experimental test, we found that a high output of an Ultrasonic NX device can cause serious damage to the teeth surface, and it was not within range in heat generation distribution and noise test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1493-1496
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• 2005

In this paper, we describe a simple, precise and low cost method of fabricating PDMS stamp for UV embossing. It is important to improve the replication quality of stamp because the accuracy of fabricated structure is related to that of the stamp in UV embossing. The PDMS stamp has been fabricated by the replica molding technology with ultrasonic vibration to eliminate micro-air bubbles during the fabrication process of PDMS stamp. Also, this fabrication to use ultrasonic vibration promotes PDMS solution to fill into micro channel and edge parts. We report the fabrication of an optical core using UV embossing with fabricated PDMS stamp. This fabricated core is $7\;\mu{m}\;at\;depth,\;6\;\mu{m}\;at\;width.\;This\;measured\;value\;has\;the\;difference\;below\;1\;\mu{m}$compared to the original stamp. The surface roughness of core is about 14 nm root mean square. This is satisfactory value to use low-loss optical waveguide. Our successful demonstration of precise replica technology presents an alternative approach for the stamp of UV embossing.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1730-1733
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• 2007

As semiconductor and MEMS devices become smaller, testing process during their production should follow such a high density trend. A circuit inspection tool "probe card" makes contact with electrode pads of the device under test (DUT). Nowadays, electrode pads are irregularly arranged and have height difference. In order to absorb variations in the heights of electrode pads and to generate contact loads, contact probes must have some levels of mechanical spring properties. Contact probes must also yield a force to break the surface native oxide layer or contamination layer on the electrodes to make electric contact. In this research, new vertical micro contact probe with bellows shape is developed to overcome shortage of prior work. Especially, novel bellows shape is used to reduce stress concentration in this design and stopper is used to change the stiffness of micro contact probe. Variable stiffness can be one solution to overcome the height difference of electrode pads.

• Smart Structures and Systems
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• v.1 no.1
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.1
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• pp.125-133
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• 2010

A versatile micro-robotic platform for micro/nano scale assembly has been demanded in a variety of application areas such as micro-biology and nanotechnology. In the near future, a flexible and compact platform could be effectively used in a scanning electron microscope chamber. We are developing a platform that consists of miniature mobile robots and a compact positioning stage with multi degree-of-freedom. This paper presents the design and the implementation of a low-cost and compact multi degree of freedom position sensor that is capable of measuring absolute translational and rotational displacement. The proposed sensor is implemented by using a CMOS type image sensor and a target with specific hole patterns. Experimental design based on statistics was applied to finding optimal design of the target. Efficient algorithms for image processing and absolute position decoding are discussed. Simple calibration to eliminate the influence of inaccuracy of the fabricated target on the measuring performance also presented. The developed sensor was characterized by using a laser interferometer. It can be concluded that the sensor system has submicron resolution and accuracy of ${\pm}4{\mu}m$ over full travel range. The proposed vision-based sensor is cost-effective and used as a compact feedback device for implementation of a micro robotic platform.

• Ceramist
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• v.23 no.1
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• pp.54-88
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• 2020

Global effort has resulted in tremendous progress with energy harvesters that extract mechanical energy from ambient sources, convert it to electrical energy, and use it for systems such as wrist watches, mobile electronic devices, wireless sensor nodes, health monitoring, and biosensors. However, harvesting a single energy source only still pauses a great challenge in driving sustainable and maintenance-free monitoring and sensing devices. Over the last few years, research on high-performance mechanical energy harvesters at the micro and nanoscale has been directed toward the development of hybrid devices that either aim to harvest mechanical energy in addition to other types of energies simultaneously or to exploit multiple mechanisms to more effectively harvest mechanical energy. Herein, we appraise the rational designs for multiple energy harvesting, specifically state-of-the-art hybrid mechanical energy harvesters that employ multiple piezoelectric and triboelectric mechanisms to efficiently harvest mechanical energy. We identify the critical material parameters and device design criteria that lead to high-performance hybrid mechanical energy harvesters. Finally, we address the future perspectives and remaining challenges in the field.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.10
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• pp.894-900
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• 2006

This paper reports the fabrication and characterization of $32{\times}32$ thermal cantilever array for nano-scaled memory device applications. The $32{\times}32$ thermal cantilever array with integrated tip heater has been fabricated with micro-electro-mechanical systems(MEMS) technology on silicon on insulator(SOI) wafer using 9 photo masking steps. All of single-level cantilevers(1,024 bits) have a p-n junction diode in order to eliminate any electrical cross-talk between adjacent cantilevers. Nonlinear electrical characteristic of fabricated thermal cantilever shows its own thermal heating mechanism. In addition, n-channel high-voltage MOSFET device is integrated on a wafer for embedding driver circuitry.