• Journal of Advanced Marine Engineering and Technology
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• 제35권3호
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• pp.329-334
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• 2011

The cooling water circulation plates had been used to drop the temperature of refractory outside shell of common cooling system by using cooling plate or stave type. When they are attacked by surrounding gas, they are corroded and the water flows in the refractory due to leakage of water. So, the life of refractory material is shortened and changed due to the worse conditions of cooling system. The automatic sensing device for water leakage of cooling plate is developed to check the position of trouble by using the microprocessor system when cooling water leak and gas are flowed into the cooling plate through the leakage position. The flowed gas is detected in the micro-process system which delivers the detected position of cooling plate or stave to main control room through the wireless-radio relay station. This system can be possible to detect the position of cooling plate or stave against the water leakage part immediately and then deliver the signal to main control room by using the microprocessor system and wireless-radio relay station. This system will be developed in changing the working condition from manual system to unmanned auto alarm system.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.193-193
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• 2008

Wearable and ubiquitous micro systems will be greatly growing and their related devices should be self-powered in order to avoid the replacement of finite power sources, for example, by scavenging energy from the environment. With ever reducing power requirements of both analog and digital circuits, power scavenging approaches are becoming increasingly realistic. One approach is to drive an electromechanical converter from ambient motion or vibration. Vibration-driven generators based on electromagnetic, electrostatic and piezoelectric technologies have been demonstrated. Among various generator types proposed so far, piezoelectric generator possesses considerable potential in micro system. To overcome low mechanical-to-electric energy conversion, the piezoelectric device should activate in resonance mode in response to external vibration. Normally, the external vibration excretes at low frequency ranging 0.1 to 200 Hz, whereas the resonant frequencies of the devices are fixed as constant. Therefore, keeping their resonant mode in varying external vibration can be one of important points in enhancing the conversion efficiency. We investigated the possibility of use of multi-bender type piezoelectric devices. To match the external vibration frequency with the device resonant frequency, the various devices with different resonant frequency were chosen.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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• pp.29-33
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• 2000

MEMS, Micro Electro-Mechanical Systems, present one of the greatest advanced packaging challenges of the next decade. Historically hybrid technology, generally thick film, provided sensors and actuators while integrated circuit technologies provided the microelectronics for interpretation and control of the sensor input and actuator output. Brought together in MEMS these technical fields create new opportunities for miniaturization and performance. Integrated circuit processing technologies combined with hybrid design systems yield innovative sensors and actuators for a variety of applications from single crystal silicon wafers. MEMS packages, far more simple in principle than today's electronic packages, provide only physical protection to the devices they house. However, they cannot interfere with the function of the devices and often must actually facilitate the performance of the device. For example, a pressure transducer may need to be open to atmospheric pressure on one side of the detector yet protected from contamination and blockage. Similarly, an optical device requires protection from contamination without optical attenuation or distortion being introduced. Despite impediments such as package standardization and complexity, MEMS markets expect to double by 2003 to more than ＄9 billion, largely driven by micro-fluidic applications in the medical arena. Like the semiconductor industry before it. MEMS present many diverse demands on the advanced packaging engineering community. With focused effort, particularly on standards and packaging process efficiency. MEMS may offer the greatest opportunity for technical advancement as well as profitability in advanced packaging in the first decade of the 21st century! This paper explores MEMS packaging opportunities and reviews specific technical challenges to be met.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1874-1879
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• 2008

It is not easy to detect nano-sized airborne particles (< 100 nm in diameter) in air. Therefore, the condensation of the nanoparticles alongside of the size-classification is needed for their detection. This paper proposes a hybrid (aerodynamic+electrical) particle classification and condensation device using a micro virtual impactor (${\mu}VI$). The ${\mu}VI$ can classify the nanoparticles according to their size and condense the number concentration of nanoparticles interested. Firstly, the classification efficiency of the ${\mu}VI$ was measured for the particles, polystyrene latex (PSL), ranging from 80 to 250 nm in diameter. Secondly, the nanoparticles, NaCl of 50 nm in diameter, were condensed by 4 times higher. In consequence, the output signal was amplified by 4 times (before condensation: 4 fA, after condensation: 16 fA). It is expected that the proposed device will facilitate the detection of nanoparticles.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.879-884
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• 2007

Flywheel energy storage systems have advantages over other types of energy storage devices in such aspects as unlimited charge/discharge cycles and environmental friendliness. In this paper we propose a millimeter scale flywheel energy storage device. The flywheel is supported by a pair of passive magnetic bearings and rotated by a toroidally wound electric motor/generator. The geometry of the bearings is optimized for the maximum dynamic performance.

• 한국인터넷방송통신학회논문지
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• 제16권3호
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• pp.129-135
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• 2016

저시력인들을 위한 기존 시각 향상 장치들이 많이 있다. 이 장치는 주로 확대경 역할이 대부분이고, 고가이다. 저시력 원인으로는 다양한 증상에 기인한다. 시력 향상을 위해서는 영상의 확대, 밝기, 대비를 조절할 필요가 있다. 따라서 시력 향상 휴대용 마이크로 디스플레이 구동 드라이버 및 장치를 개발한다. 이 장치의 4가지 기본 원리는 영상 확대, 특정 색 조절, BLU로 밝기 조절, 프리즘에 의한 시축 개선이다. 제안된 HMVED 장치의 임상 실험이 실시되었다. 결과적으로 기존 장치에 비해서 수혜 효과가 돋보였으며 본 장치는 저중량, 저가, 휴대성이 용이하므로 저시력인의 삶의 질 향상에 도모한다.

• 한국전기전자재료학회논문지
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• 제36권6호
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• pp.563-569
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• 2023

마이크로 발광다이오드(LED)는 칩 사이즈가 100마이크로미터 이하인 무기발광재료로 우수한 전기적, 광학적, 기계적 성능 때문에 유연 디스플레이, AR/VR, 바이오 메디컬 분야의 차세대 광원으로 큰 주목을 받고 있다. 특히, 바이오메디컬 분야에 적용하기 위해서는 매우 작은 크기의 마이크로 LED 칩을 원하는 유연 기판에 옮기기 위한 기술이 요구되며, 실제 인간의 얼굴, 장기 등 여러 신체 부위에 적용하기 위해서는 대량의 마이크로 LED 칩을 낮은 정밀 오차, 빠른 속도, 높은 수율로 타겟 기판에 전사하는 것이 중요하다. 본 논문의 목적은 미용/의료용 유연 마이크로 LED 디바이스 제작 공정 방법을 소개하고, 이를 실제 미용/의료 산업에 적용하기 위해 필요한 마이크로 LED 전사 기술을 소개한다. 해당 기술로 제작된 유연 마이크로 LED 디바이스는 피부 질환, 암, 신경질환 등 인간 질병 치료에 널리 활용될 것으로 기대된다.

• 대한기계학회논문집A
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• 제28권6호
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• pp.717-725
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• 2004

A power generation systems are proposed to convert ambient mechanical vibration into electrical energy using cantilever-type piezoelectric materials. The vibration-based power device can be used for self-powered systems without batteries. This paper presents the theoretical analysis for the coupled equations of piezoelectric and structural motions and investigates the dynamic characteristics of the self-power system using transfer function method. The theoretical model is verified by the finite element analysis of the resonance frequency, the dynamic response of the structure and the sensor sensibility. Experimental results measured using a prototype system agree with the theoretical predictions. The system is shown to produce 34.5 ㎼ in average. Finally, we perform the optimal design for system variables to maximize output power.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1296-1301
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• 2003

The chemical mechanical polishing(CMP) is necessarily applied to manufacturing the dielectric layer and metal line in the semiconductor device. The conditioning of polishing pad in CMP process additionally operates for maintaining the removal rate, within wafer non-uniformity, and wafer to wafer non-uniformity. But the fixed abrasive pad(FAP) using the hydrophilic polymer with abrasive that has the swelling characteristic by water owns the self-conditioning advantage as compared with the general CMP. FAP also takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing due to the reduction of abrasive concentration. This paper introduces the manufacturing technique of FAP. And the tungsten CMP using FAP achieved the good conclusion in point of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.798-807
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• 2004

A testing system was developed to improve the reliability of printhead and several printheads were tested. We developed a thermally driven monolithic inkjet printhead comprising dome-shaped ink chambers, thin film nozzle guides, and omega-shaped heaters integrated on the top surface of each chamber. To perform a fatigue test of an inkjet printhead, the testing system automatically detects a heating failure using a Wheatstone bridge circuit. Various models were designed and tested to develop a more reliable printhead. Two design parameters of the width of reinforcing layer and heater were investigated in the test. Specially., the reinforcing layer was introduced to improve the fatigue life of printhead. The life-span of heater with a reinforcing layer was longer than that without a reinforcing layer. The wider the heater was, the longer the life of printhead was.