• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.167-172
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• 2003

The machining method by using end-milling tool has been applying in machining structures of various shapes because of the availability. Recently, all kinds of industries based on the parts of micro shape are developing, and the demands of mechanical micro machining technology are Increasing suddenly to produce these parts. According to such changes, the technology of the micro end-milling machining is applying as one of the most important machining means. This research is to aim at developing machining technology for various micro structures using micro end-mill. This paper introduces micro mechanical machining system with ultra precision, and demonstrates methods manufacturing all sorts of parts and moldings for industry and examples of applicable machining by using micro end-milling tool of micro sizes from hundreds to tens in diameter.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.121-127
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• 2008

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Despite the importance of micro end-milling, many related researches have given grand efforts to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. To solve this problem, machining error prediction method was proposed through a series of test micro cutting and analysis of their SEM images. An iterative algorithm was applied in order to obtain corrected tool path which allows reducing machining errors in spite of tool deflection. Experiments are carried out to validate the proposed approaches. In result, remarkable error reduction could be obtained.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.498-503
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• 2010

The main purpose of this study strongly concerned micro machining error estimation by using FEM analysis of tool deflection shapes in micro flat end-milling process. For the precision micro flat end-milling process, analysis of micro cutting errors is mandatory. In general, tool deflection is a major factor which causes cutting error and limits realization of the high-precision cutting process. Especially, in micro end-milling process, micro tool deflection generates very serious problems in contrast to macro tool deflection. Methods which deal with compensation of cutting error by tool deflection in macro end-milling process have been studied plentifully but, few researches transact with micro scaled cutting tool deflection in micro cutting process. Therefore, the trend of micro tool deflection was estimated by using FEM analysis in this paper. Cutting forces were acquired by micro dynamometer and these were utilized in FEM analysis. In order to verify FEM analysis results, micro machining processes were carried out and real machined profiles were compared with FEM results. Finally through the proposed approach well suited FEM results were obtained.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.3
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• pp.294-299
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• 2009

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Many related researches have given grand effects to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. Machining error were predicted and measured through a series of test micro cutting and analysis of their SEM images and FEM analysis. Experiments are carried out to validate the approaches.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.209-214
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• 2002

Mechanical micro-engineering is an easy and cheap way to fabricate micro-structures. If the application of the conventional machining method using flat-end mill becomes available for the micro-manufacturing process, it will be advanced as an extension of the conventional machining process. In this study, micro-grooves cutting using flat-end mill(($\phi$8) was performed. The characteristics on flat-end milling was investigated to improve machinability of micro-grooves. The experiments were performed according to variations of spindle revolution, depth of cut, and feed rate. Machinability through various cutting conditions was evaluated by surface geometry, tool wear, and cutting force. The results show that micro V-grooves of width(pitch) 29${\mu}{\textrm}{m}$ were acquired by flat-end milling. The maximum and minimum roughness of the wall of grooves was 438 and 67nm, respectively

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.381-387
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• 2014

This paper introduces a system to machine micro-sized patterns effectively on surface based on micro-milling process using tools with simultaneous rotation and oscillation, oscillation micro milling. To review the effectiveness of proposed concept, we integrated a micro-spindle supported by active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. Two types of oscillation milling were tested, which are linear oscillation milling with a flat end mill and elliptical oscillation milling with a ball end mill with 0.3 mm of diameter. The spindle was rotating 110 krpm and workpiece was moving constant speed of 2~8 mm/sec during the oscillation milling. As the results, multiple oval shape dimples were generated in regular spacing, and the variation of elliptical motion made different shapes of patterns. The results showed that proposed oscillation milling can be successfully used for machining repeated micro-patterns.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.211-212
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• 2010

• Journal of the Korean Society for Precision Engineering
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• v.11 no.1
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• pp.177-183
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• 1994

The ball-end milling process is widely used in the die/mold industries, and it is very suitable for the machining of free-from surfaces. However, cusps(or scallops) remaining at the machined part along the cutter paths require anothe finish process such as polishing or grinding. In this study, a high sped micro ball-end milling method has been suggested for the finish of free- form surfaces. A new tool path which makes the geometrical roughness of workpiece be constant through the machined surface has been developed. In the high speed machining of micro ball-end muling experimets, the developed tool paths have been successfully applied. And it was concluded that the surface roughness from this finish cuts of micro ball-end milling process was acceptable.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.4
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• pp.7-13
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• 2005

In the case of fabricating micro pole structures such as column, square-pole and gear shaft by the micro end-milling process, it can be useful in the fields of industry, for example, micro parts, electrode for electrical discharge machining and micro mold for injection molding. In this study, machining factors and the process were analyzed. Machining experiments of various micro pole configurations were performed. Analysis of the change and effect of the cutting force according to the machining conditions was carried out. An analytical study of the deformation of the micro pole caused cutting conditions and cutting force through the finite element method and ANSYS program was carried out. As a result, this research presented a method of fabricating the column pole of below $100{\mu}m$ diameter with high aspect ratio by using micro end-milling process, and based on that, a method of fabricating a variety of applicable structures. Also the minimum size of the pole capable of fabricating through theory and experiment were demonstrated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1203-1206
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory, a micro-milling machine is developed for micro machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, air turbine spindle which has maximum 150.000 rpm. It is applicable to milling and drilling machining. This paper shows the possibility of micro machining and characteristics of micro end milling process by using micro machine. A machining of micro barrier ribs using 0.2 mm flat type end mill was achieved by micro-milling machine. As experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.