• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.411-412
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.97-98
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.343-344
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• 2008

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.121-127
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• 2008

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Despite the importance of micro end-milling, many related researches have given grand efforts to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. To solve this problem, machining error prediction method was proposed through a series of test micro cutting and analysis of their SEM images. An iterative algorithm was applied in order to obtain corrected tool path which allows reducing machining errors in spite of tool deflection. Experiments are carried out to validate the proposed approaches. In result, remarkable error reduction could be obtained.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.12
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• pp.1279-1284
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• 2012

Micro structures which are widely used at various fields are commonly fabricated by lithograph, etching and laser methods. Recently, with the emergence of micro tools and ultra-precision machine tools, fabrication of the micro structures obtained using end-milling are studied. However, there are some problems due to the diameter of the micro end-mill getting smaller below $100{\mu}m$. The micro run-out resulted from miniaturization of end-mills have influence seriously on accuracy of micro structures. The error of run-out with a tooling jig showed a decrease of about $9.3{\mu}m$. Furthermore, micro structures with width of $30{\mu}m$ could be applied through experiments of slot machining obtained using 30 and $50{\mu}m$ end-mill. Also, narrow angle structures with $30^{\circ}$ angle could be applied through analysis of machining acute angle structures. Based on basic experiments, micro fluidics channels and spiral patterns for air bearing were machined.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.381-387
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• 2014

This paper introduces a system to machine micro-sized patterns effectively on surface based on micro-milling process using tools with simultaneous rotation and oscillation, oscillation micro milling. To review the effectiveness of proposed concept, we integrated a micro-spindle supported by active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. Two types of oscillation milling were tested, which are linear oscillation milling with a flat end mill and elliptical oscillation milling with a ball end mill with 0.3 mm of diameter. The spindle was rotating 110 krpm and workpiece was moving constant speed of 2~8 mm/sec during the oscillation milling. As the results, multiple oval shape dimples were generated in regular spacing, and the variation of elliptical motion made different shapes of patterns. The results showed that proposed oscillation milling can be successfully used for machining repeated micro-patterns.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.4
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• pp.498-503
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• 2010

The main purpose of this study strongly concerned micro machining error estimation by using FEM analysis of tool deflection shapes in micro flat end-milling process. For the precision micro flat end-milling process, analysis of micro cutting errors is mandatory. In general, tool deflection is a major factor which causes cutting error and limits realization of the high-precision cutting process. Especially, in micro end-milling process, micro tool deflection generates very serious problems in contrast to macro tool deflection. Methods which deal with compensation of cutting error by tool deflection in macro end-milling process have been studied plentifully but, few researches transact with micro scaled cutting tool deflection in micro cutting process. Therefore, the trend of micro tool deflection was estimated by using FEM analysis in this paper. Cutting forces were acquired by micro dynamometer and these were utilized in FEM analysis. In order to verify FEM analysis results, micro machining processes were carried out and real machined profiles were compared with FEM results. Finally through the proposed approach well suited FEM results were obtained.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1793-1797
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory in Yeungnam university, a micromilling machine is developed for micro/meso machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, aerostatic spindle which has maximum 150,000 rpm. It is applicable to milling and drilling of micro scale. This paper presents the possibility of micro/meso machining and characteristics of micro end milling process by using micro machine. A machining of micro parts using 0.2 mm flat end mill was achieved by micro-milling machine. Experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1203-1206
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• 2003

After the micro turning lathe was developed in the last year by AMR Laboratory, a micro-milling machine is developed for micro machining. This machine is integrated with PZT-driven micro-sliders, micro-linear encoders, air turbine spindle which has maximum 150.000 rpm. It is applicable to milling and drilling machining. This paper shows the possibility of micro machining and characteristics of micro end milling process by using micro machine. A machining of micro barrier ribs using 0.2 mm flat type end mill was achieved by micro-milling machine. As experimental results show the machining capability and positional accuracy of this machine is good enough for machining micro parts.

• Transactions of Materials Processing
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• v.15 no.9 s.90
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• pp.673-678
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• 2006

Demands for micro parts have increased with recent advances in IT and machinery industries. However, the present technology loaves much to be desired to effectively produce parts with the volume of $1mm^{3}$ and less by mechanical method in large quantities. This paper provides a method for efficient quantity production of complete micro 3D structure using micro end-milling cutting process. The possibility has proven via manufacturing experiment of a multistage micro complex gear structure of $500{\mu}m$ in length, $500{\mu}m$ in maximum external diameter and a volume of $1mm^{3}$ and less.