• Title/Summary/Keyword: Micro elements

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Fabrication of Micro Ceramic Thin-Film Type Pressure Sensors for High-Temperature Applications and Its Characteristics (고온용 마이크로 세라믹 박막형 압력센서의 제작과 그 특성)

  • Kim, Jae-Min;Lee, Jong-Choon;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.888-891
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    • 2003
  • This paper describes on the fabrication and characteristics of micro ceramic thin-film type pressure sensors based on Ta-N strain-gauges for high-temperature applications. The Ta-N thin-film strain-gauges are deposited onto thermally oxidized Si diaphragms by RF sputtering in an argon-nitrogen atmosphere($N_2$ gas ratio: 8 %, annealing condition: $900^{\circ}C$, 1 hr.), Patterned on a wheatstone bridge configuration, and use as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is $1.097{\sim}1.21mV/V.kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS. The fabricated pressure sensor presents a lower TCR, non-linearity than existing Si piezoresistive pressure sensors. The fabricated micro ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that is operable under high-temperature environments.

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Seasonal Changes in Structure and Landscape of Urban Stream Corridor - In the Case of Gongji Stream in Chuncheon- (도시하천 하도구조와 경관의 계절변화 - 춘천시 공지천을 중심으로 -)

  • Jo Hyun-Kil;Han Gab-Soo
    • Journal of Environmental Science International
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    • v.14 no.8
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    • pp.739-748
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    • 2005
  • The purpose of this study is to analyze seasonal changes in structure and landscape of Gongji stream corridor in Chuncheon, and to suggest some guidelines to contribute to creating a desirable close-to- nature stream. The study seasonally surveyed floodplain and revetment conditions, channel micro-topography, streamflow level and velocity, and vegetational cover. Flooding, water level, and vegetation were major factors of affecting seasonal changes in streambed structure and stream landscape. Small sand bars and islands were considerably disturbed by flooding and water level change. However, large islands and sand bars in the upper and middle section of the study stream remained or reappeared even after flooding. Flooding also tended to repeat channel sedimentation at the same spot. Controlling water volume of the Euiam Lake, which is adjacent to the study stream, caused higher water level downstream in the dry seasons. The majority of vegetation in sand bars and islands was washed away by the floods. Vehicle passing, crop cultivation, and ball game were other elements which disturbed vegetation in the floodplain. Creating a close-to-nature stream should reflect micro-topographical changes of channel by flooding, prevent improper vehicle entry and human use, and remove concrete material in the revetment and floodplain.

The Correlation Properties between Substrate and Molybdenum Back Contacts Fabricated by DC Magnetron Sputtering (DC 반응성 스퍼터링법에 의해 제조된 몰리브덴 후면전극과 기판과의 상관특성분석)

  • Kim, Seok-Gi;Han, Sang-Ok
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.3
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    • pp.149-154
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    • 2000
  • Bi-layer Mo films were deposited on soda-lime glass substrates using DC magnetron supttering. Increasing gas pressure, the resistivity varied from $1\times10^{-5}\; to\; 8.3\times10^{-3}\; \Omega.cm$. Furthermore, stress direction yielded compressive-to-tensile transition stress curves. The micro-structure of the compressively-stressed film which had poor adhesion consists of tightly packed columns, but of the tensile-stressed films had less dense structure. Under all gas pressure conditions, Mo films exhibited distinctly increasing optical reflection with decreasing gas pressure. The expansion of (110) peak width with the gas pressure meant the worse crystalline growth. The impurity levels in the Mo film exhibited highly concentrated Na, Se and O elements due to less dense micro-structure. The degree of Na diffusion depends on the type of the glass substrate used and the nature of the Mo film.

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Design of an Integrated Inductor with Magnetic Core for Micro-Converter DC-DC Application

  • Dhahri, Yassin;Ghedira, Sami;Besbes, Kamel
    • Transactions on Electrical and Electronic Materials
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    • v.17 no.6
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    • pp.369-374
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    • 2016
  • This paper presents a design procedure of an integrated inductor with a magnetic core for power converters. This procedure considerably reduces design time and effort. The proposed design procedure is verified by the development of an inductor model dedicated to the monolithic integration of DC-DC converters for portable applications. The numerical simulation based on the FEM (finite elements method) shows that 3D modeling of the integrated inductor allows better estimation of the electrical parameters of the desired inductor. The optimization of the electrical parameter values is based on the numerical analysis of the influence of the geometric parameters on the electrical characteristics of the inductor. Using the VHDL-AMS language, implementation of the integrated inductor in a micro Buck converter demonstrate that simulation results present a very promising approach for the monolithic integration of DC-DC converters.

Ignition Safe-Arm-Unit Using Micro-Electromechanical Systems (MEMS를 이용한 추진기관 점화안전장치)

  • Jang, Seung-Gyo;Lee, Sang-Hun;Chang, Hyun-Kee
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2009.11a
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    • pp.282-285
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    • 2009
  • Ignition Safe-Arm-Unit using micro-electromechanical systems(MEMS) for propulsion system was designed and manufactured. MEMS was designed according to the design schemes for conventional mechanical elements. By comparing the design results and the test data of the prototype, small discrepancy was found, which is due to the nonlinear characteristic of the structure and the machining accuracy. The applicability of MEMS for Safe-Arm-Unit was proved by testing MEMS which is assembled into SAU.

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Ultraprecision Polishing Technique for Micro 3-Dimensional Structures using ER Fluids (ER 유체를 이용한 미세3차원 행상의 초정밀연마)

  • 김욱배;이상조;김용준;이응숙
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.12
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    • pp.134-141
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    • 2002
  • The ER fluid can be one of efficient materials in ultraprecision polishing for optics, ceramics and semiconductors because of electrically controllable apparent viscosity. To finish small 3 dimensional structures such as the aspherical surface in optical elements, the possible arrangement of a tool, workpiece and auxiliary electrode is described. We examined the influence of the addition of a few abrasive particles on the performance of the ER fluid by measuring yield stress, and observed the behavior of abrasive particles in the ER fluid by a CCD camera, which is also theoretically predicted from the electromechanical principles of particles. On the basis of the above results, the steady flow analysis around the rotating micro tool is worked out considering the non-uniform electric field. Finally, Pyrex glass is polished using the mixture of the ER fluid and abrasive particles, and the effect of the electric field strength is evaluated.

Dynamic Modeling of an Fine Positioner Using Magnetic Levitation (자기 부상 방식 미세 운동 기구의 동적 모델링)

  • Jeong, Gwang-Seok;Baek, Yun-Su
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.5 s.176
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    • pp.1166-1174
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    • 2000
  • In this paper, we introduce a positioner based on magnetic levitation to eliminate the friction which is the most severe effect to limit high resolution on the micro level. Differently from existing electromagnetic device, the proposed positioner consists of air core solenoid and permanent magnet. Although the combination produces small magnetic force, it is suitable for realizing micro motion repeatedly without the accumulation of error because there is no hysteresis caused by ferromagnetic materials, no eddy current loss, no flux saturation. First, the approximate modeling of stiffness and damping effects between the magnetic elements is made and verified experimentally. Then, we have formulated the dynamic equation of one d.o.f magnetic levitation positioner using linear perturbation method and discussed the necessity of optimization for the chief design parameters to maximize the stability performance.

Investigation of masonry elasticity and shear moduli using finite element micro-models

  • Mavrouli, O.A.;Syrmakezis, C.A.
    • Smart Structures and Systems
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    • v.4 no.2
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    • pp.171-182
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    • 2008
  • In this paper, a methodology for the estimation of masonry elasticity and shear moduli is presented, for linear elasticity considerations. The methodology is based on the assumption that for a "periodic" masonry wall, which is formed by the repetition of a basic unit containing blocks and mortar, the mechanical characteristics of the unit are representative of the characteristics of the entire wall. For their calculation, the finite element analysis method is used. A micro-model with finite elements simulating separately the blocks and the mortar is developed. An equivalent finite element model, using an homogenous material is also developed and assuming equivalence of strains for the two models, the homogenous material properties are estimated. The efficiency of the method and its applicability limits are investigated.

지진하중에 의한 구조물 파괴형상 변화에 대한 메조스케일 해석

  • Kim, Ju-Whan;Hong, Jung-Wuk;Lim, Yun-Mook
    • Proceedings of the Earthquake Engineering Society of Korea Conference
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    • 2005.03a
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    • pp.413-417
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    • 2005
  • A lattice model of a typical bridge column section is analyzed, and results are presented. The lattice is built as an ensemble of line elements and masses, that can capture strain rate dependency of concrete material. The research mainly breaks up into two parts: First, a micro level analysis of the material is executed, and control parameters of the governing equations are derived by matching the results with the common macroscopic properties of concrete material. Then, the properties exhibited by the micro model, which extends the classical material properties are applied to the mesoscale model. Hence, the analysis of the target structure can be performed. In the mesoscale analysis, ramp-like impulse loads are applied at different velocity, so that the contribution of the material level rate dependency to the global behavior of the structure can be tracked.

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Localized Induction-Heating Method by the Use of Selective Mold Material (재료의 선택적 사용에 의한 금형의 국부적 유도가열기법)

  • Park, Keun;Do, Bum-Suk;Park, Jung-Min;Lee, Sang-Ik
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2009.05a
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    • pp.168-171
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    • 2009
  • High-frequency induction is an efficient way to heat mold surface by electromagnetic induction in a non-contact procedure. Though the induction heating has an advantage in terms of its rapid-heating capacity on the mold surface, it still has a restriction on mold temperature control due to geometric restriction of an induction coil according to the mold shape. It has been recently applied to the injection molding of thin-walled parts or micro/nano structures. For localized induction heating, an injection mold composed of ferromagnetic material and paramagnetic material is used. The electromagnetic induction concentrates on the ferromagnetic material, from which we can selectively heat for the local mold elements. The present study proposed a localized induction heating method by means of selective use of mold material. The feasibility of the proposed heating method is investigated through the comparison of experimental observations according to the mold material.

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