• 한국분말재료학회지
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• 제20권5호
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• pp.355-358
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• 2013

Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

• 한국측량학회지
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• 제36권2호
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• pp.75-84
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• 2018

본 연구의 목적은 MEMS 기반의 INS를 적용한 저가형 MMS를 개발하고, 개발된 MMS를 이용하여 x, y의 평면 거리오차가 0.546m인 정확도를 확보하여 도로시설물의 판독에 활용하고자 함에 있다. MMS 기술은 해외 유수의 측량장비제작 업체를 중심으로 지리정보 구축을 위한 새로운 측량기술로 활발하게 사용되고 있지만 국내에서는 아직 관련 연구가 초기단계에 있다. 또한, MMS 장비개발은 몇몇 연구원 및 업체에서 시도를 하였으나 안정화가 이루어지지 않은 시작품 단계에 불과하다. 이러한 MMS 기술은 빠른 시간 내에 지형 지물 데이터를 취득할 수 있어 정밀지도 제작과 도로시설물 데이터 취득에 활용되고 있다. 따라서 본 연구에서는 MMS 제작에 사용하는 각종 센서(LiDAR, CCD camera, GPS/INS, DMI 등)를 동기화하여 MEMS 기반의 INS를 탑재한 저가형 MMS를 개발하고자 한다.

• Applied Microscopy
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• 제51권
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• pp.8.1-8.7
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• 2021

Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

• 한국항행학회논문지
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• 제23권3호
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• pp.228-236
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• 2019

최근 도심지, 터널, 지하도 등과 같이 위성항법시스템 (GPS; global positioning system) 신호 수신이 어려운 환경에서 안정적으로 정확한 위치 해를 획득하기 위한 다중센서 결합 기법들이 활발하게 연구되고 있다. GPS 음영 지역에서의 위치 정확도를 개선하기 위하여 본 논문에서는 초음파의 전파 특성을 활용하여 동체의 전방 속도를 추정할 수 있는 저가의 초음파 속도계(ultrasonic-speedometer)를 설계하였고, 이를 활용하여 관성항법시스템 (INS; inertial navigation system)과 효율적으로 결합하는 INS/초음파 속도계 결합 항법 시스템을 제안하였다. 제안된 시스템의 성능을 분석하기 위해 차량 탑재 실험을 수행하였다. 실험결과에 의하면 저가의 MEMS IMU (micro electro mechanical systems inertial measurement unit)를 활용하고 GPS 신호가 10초 이상 가용하지 않는 경우에도 제안된 INS/ 초음파 속도계 결합 항법 시스템은 위치 정보 정확도의 열화를 효과적으로 제한할 수 있음을 확인하였다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 춘계학술대회 논문집
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• pp.379-382
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• 2007

The MEMS (Micro Electro Mechanical Systems) process is used in a micro/nano pattern manufacturing method. This method is based on the lithography technology. But the MEMS process has some problems such as complicated process, long processing time and high production costs. Many researchers are doing research in substitute manufacturing method to work out a solution to these problems. In this paper, we apply a dieless incremental forming technology to a substitute method of MEMS process. This dieless forming technology is using in the commercial scale sheet forming such as a prototype of automobile sheet parts. 5-axes CNC (Computerized Numeric Control) method are applied in this system to get a micro-scale dieless forming results. These 5-axes system are composed of precision AC servo motor stages (4-axes) and PZT actuator (1-axis). A PZT actuator is used in a precision actuating axis because it can be operated in the nano scale stroke resolution. This micro dieless incremental forming system has the advantage of minimization in manipulating distance and working space. As equipment and tools become smaller in size, minute inertia force and high natural frequency can be obtained. Therefore, high precision forming performance can be obtained. This allows the factory to quickly provide the customer with goods because the manufacturing system and process are reduced. To construct this micro manufacturing system, many technologies are necessary such as high stiffness frame, high precision actuating part, structural analysis, high precision tools and system control. To achieve the optimal forming quality, the micro dieless forming system is designed and made with high stiffness characteristic.

• 한국측량학회:학술대회논문집
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• 한국측량학회 2004년도 춘계학술발표회논문집
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• pp.59-64
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• 2004

In this paper, the error compensation method of the low-cost IMU is proposed. In general, the position and attitude error calculated by accelerometers and gyros grows with time. Therefore the additional information is required to compensate the drift. The attitude angles can be bound accelerometer mixing algorithm and the heading angle can be aided by single antenna GPS velocity. The Kalman filter is used for error compensation. The result is verified by comparing with the attitude calculated by Attitude Heading Reference System with Micro Electro Mechanical System for a basis

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1088-1091
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• 1997

This paper describes the characteristic of hinges on which a lever pivots within a limited angle due to the torque. The hinges are exerted by the thermally expanded actuators connected with a level through hinges. To enhance the stroke of inchworm actuator, FEM(Finite Element Method) was utilized for the characterization in view of stress displacement according to the variation of notch radius and notch width. As a result, notch width of the hinges plays an important part in improvement of micro inchworm actuator.

• 한국항해항만학회:학술대회논문집
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• 한국항해항만학회 2006년도 International Symposium on GPS/GNSS Vol.1
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• pp.265-270
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• 2006

Recently, inertial sensors like gyros and accelerometers have been quite miniaturized by Micro Electro-Mechanical Systems (MEMS) technology. JAXA is developing a MEM-based GPS/INS hybrid navigation system named Micro-GAIA. The navigation performance of Micro-GAIA was evaluated through off-line analysis by using flight test data. The estimation errors of the roll, pitch, and azimuth were $0.03^{\circ}$, $0.05^{\circ}$, $0.05^{\circ}$ $(1{\sigma})$, respectively. he horizontal position errors after 60-second GPS outages were reduced to 25 m CEP. The attitude errors and position errors are nearly half of ones reported previously[2]. Furthermore, using the adaptive Kalman filters, the robustness against the uncertainty of the measurement noise was improved. Comparing the innovation-based and residual-based adaptive Kalman filters, it was confirmed that the latter is robuster than the former.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권2호
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• pp.153-160
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• 1999

Dual-stage servo system for super-high density HDD has the chances of being composed of the coarse actuator(VCM) for track-seeking control and the fine actuator(microactuator) for-following control in near future. This paper presents the concept design of dual-stage servo system and the track-following control using an electrostatic microactuator for super-high density HDD. The electrostatic microactuator is designed and fabricated by MEMS(micro-electro-mechanical system) process. Both the nonlinear plant(voltage/displacement-to-electrostatic force) and the linear plant(electrostatic force-to-displacement) of the microactuator are established. Inverse function of the nonlinear plant is employed for a feedforward nonlinear compensator design. And feedforward control effect of this compensator is shown by time-domain experiments. A track-following feedback controller is designed using the feedback nonlinear compensator which is derived from the feedforward nonlinear compensator. The track-following control experiment is done to show the control efficiency of the proposed control system. And, excellent track-following control performance(2.21kHz servo-bandwidth, 7.51dB gain margin, $50.98^{\circ}$phase margin) is achieved by the proposed control system.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.97.5-97
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• 2001

This paper presents development of a user-friendly automatic control system for ESR(Electro-Slag Remelting or Refining) process. It is a second-phase refining one, commonly applied to production of high-purity specialty steel. A primarily refined castingot acts as a consumable electrode and melts by the electric resistance heat generated when high current is induced through a slag bath. The quality of product is evaluated by its chemical composition, purity, micro-structure, uniformity, mechanical property, etc. To meet the standards, above all things, the process should be kept sound and the melt rate should track the optimum profile irrespective of environment variations. Current ESR system is manually operated ...