• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.11 no.6
• /
• pp.458-464
• /
• 1998

This paper gives characterization of substrate and PZT(53/47) thin film deposited by metalorganic decomposition, which is concerned in deposition process and device fabrication process, to fabricate micro electro mechanical system (MEMS) device with piezoelectric material. The PZT thin films deposited by MOD at 700^{\circ}C$ for 30 minutes had a polycrystallinity, that is, no substrate dependence, while different interface were developed depending on the bottom electrodes. Such a structural variation could influence on not only the properties of the PZT film but also etching process for fabricating MEMS devices. Therefore the electrode structure is a very important factor in the deposition of the PZT film during etching process by HF acid for MEMS device with piezoelectric material. Piezoelectric coefficients of the PZT films on the different substrates were 40 and 80 pm/V at an applied voltage of 4V. Based in these results, it was possible for deposition of the PZT film by MOD to apply MEMS device fabrication process based on piezoelectricity after selection of proper bottom electrode.

• International Journal of Air-Conditioning and Refrigeration
• /
• v.15 no.2
• /
• pp.70-77
• /
• 2007

As electric and mechanical devices have been miniaturized and highly integrated, heat generation per unit volume has been greatly increased. Therefore, effective cooling methods for micro and miniature systems have emerged as critical issues nowadays and a lot of studies have been carried out to find an optimum cooling strategy. This paper reviews recent researches on the cooling technologies which are mainly based on micro-fabrication processes. Design, development, experiments and numerical analysis of various cooling devices are discussed and their characteristics, problems and advantages are compared.

• Advances in nano research
• /
• v.9 no.3
• /
• pp.133-145
• /
• 2020

In this study, nonlinear vibrations and dynamic instabilities of a smart embedded micro shell conveying varied fluid flow and subjected to the combined electro-thermo-mechanical loadings are investigated. With the aim of designing new hydraulic sensors and actuators, the piezoelectric materials are employed for the body and the effects of applying electric field on the stability of the system as well as the induced voltage due to the dynamic behavior of the system are studied. The nonlocal piezoelasticity theory and the nonlinear cylindrical shell model in conjunction with the energy approach are utilized to mathematically modeling of the structure. The fluid flow is assumed to be isentropic, incompressible and fully develop, and for more generality of the problem both steady and time dependent flow regimes are considered. The mathematical modeling of fluid flow is also carried out based on a scalar potential function, time mean Navier-Stokes equations and the theory of slip boundary condition. Employing the modified Lagrange equations for open systems, the nonlinear coupled governing equations of motion are achieved and solved via the state space problem; forth order numerical integration and Bolotin's method. In the numerical results, a comprehensive discussion is made on the dynamical instabilities of the system (such as divergence, flutter and parametric resonance). We found that applying positive electric potential field will improve the stability of the system as an actuator or vibration amplitude controller in the micro electro mechanical systems.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.12 s.177
• /
• pp.170-174
• /
• 2005

A numerical system to extract effective elastic properties of polycrystalline thin-films for MEMS devices is developed. In this system, the statistical model based on lattice system is used for modeling the microstructure evolution simulation and the key kinetics parameters of given micrograph, grain distributions and deposition process can be extracted by inverse method proposed in the system. In this work, effects of kinetics parameters on the extraction of effective elastic properties of polycrystalline thin-films are studied by using statistical method. Effects of the fraction of the potential site($f_p$) among the parameters for deposition process of microstructure on the extraction of effective elastic properties of polycrystalline thin-films are investigated. For this research, polysilicon is applied to this system as the polycrystalline thin-films.

• Ceramist
• /
• v.7 no.3
• /
• pp.28-33
• /
• 2004

1987년 미국 버클리 대학의 연구진은 반도체 미세공정 기술을 이용해 머릿카락 굵기의 초소형 모터를 발표하였다(Fig. 1).1) 이는 MEMS(Micro Electro Mechanical System, 혹은 MST , Micro System Technology)라는 새로운 학문 분야의 실질적 효시로, 명실공히 마이크론 단위의 기계-전자 시스템의 구현이라는 새로운 장을 열게되었다. (중략)

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2005.05a
• /
• pp.389-394
• /
• 2005

Microfactory is effective method for machining micro size component. Electro-chemical machining can be more suitable to a microfactory than other machining methods in terms of maintaining high accuracy. Surface profile of EDM Machined component is predicted by micro EDM simulation using superpositioning spark crater. Planar motor and micro pump are developed to construct microfactory system.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.11 no.4
• /
• pp.97-101
• /
• 2002

Recently, the need for transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the so-called mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to f뮤ricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro-fabrication technique and microsystem packaging method described in this work.

• Polymer(Korea)
• /
• v.32 no.4
• /
• pp.334-339
• /
• 2008

Recently electro spinning is a widely used simple technique to prepared micro- to nanometer-sized fiber of various polymers. In general, a normal multiple-nozzle electro spinning system has been difficult to achieve high production-rate fabricating micro/nanofibers due to the interference of electric field between individual nozzles in the process. To reduce the interference effect of electric field between nozzles, we developed a multi-nozzle electrospinning system supplemented with auxiliary electrodes. Poly($\varepsilon$-carprolactone)(PCL), which has good mechanical property and biocompatibility, was electrospun by the multi-nozzle electro spinning system. Electrospinnability, product rate, and size uniformity of spun fibers for the system with and without auxiliary electrodes were characterized. As a result, the multi-nozzle electrospinning system supplemented with auxiliary electrodes provides excellently stable processability and showed high mass productivity of PCL-nanofibers relative to a normal multi-nozzle electro spinning system.

• International Journal of Precision Engineering and Manufacturing
• /
• v.6 no.2
• /
• pp.5-11
• /
• 2005

Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2003.10a
• /
• pp.313-317
• /
• 2003

Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80％ after upper surface of micro- channel was polished up 8 minutes by polishing.