• Journal of the Semiconductor & Display Technology
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• 제3권3호
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• pp.1-4
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• 2004

Fabrication and electrical and mechanical properties of piezoelectric micro bending actuators (PMBA) using sol-gel-multi-coated thick PZT films and MEMS processes were investigated. PMBA could be used for design and fabrication of micro fluidic devices, for example, micro-pumps, micro dispensers, and so on. PMBA were fabricated using 2 um thick PZT films on Pt (350 nm)/$SiO_2$ (500 nm)/Si ($300\mu\textrm{m}$) substrates and MEMS processes. 7 types of PMBA were fabricated with areas of silicon diaphragms, PZT films and top electrodes. When the sizes of silicon diaphragms, PZT films and Pt top electrodes were reduced from 3000$\times$$1389\mu\textrm{m}$, 4000$\times$$1000\mu\textrm{m}$ and 4000$\times$$900\mu\textrm{m}$ down to 14%, 14% and 11 % of them, respectively, the center displacements of PMBA were decreased from 0.68 um to 0.10 um at 5 Hz and 12 Vpp. So, PMBA with large areas showed larger displacements than PMBA with small areas and experimental results were also good agreement with the plate and shell theory.

• Journal of the Microelectronics and Packaging Society
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• 제29권2호
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• pp.121-127
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• 2022

Micro-LED is a light-emitting diode smaller than 100 ㎛ in size. It attracts much attention due to its superior performance, such as resolution, brightness, etc., and is considered for various applications like flexible display and VR/AR. Micro-LED display requires a mass transfer process to move micro-LED chips from a LED wafer to a target substrate. In this study, we proposed a vacuum chuck method as a mass transfer technique. The vacuum chuck was fabricated with MEMS technology and PDMS micro-mold process. The spin-coating approach using a dam structure successfully controlled the PDMS mold's thickness. The vacuum test using solder balls instead of micro-LED confirmed the vacuum chuck method as a mass transfer technique.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 한국소성가공학회 2004년도 춘계학술대회 논문집
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• pp.241-244
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• 2004

Microlens patterned micro-mold fabrication method for Light Guiding Plate(LGP), kernel part of LCD-BLU(Back Light Unit), was presented. Instead of erosion dot pattern for LCP optical design, microlens pattern, fabricated by LIGA-reflow process, was applied. Optical pattern design method was also developed not only for negative pattern LGP, but also positive pattern LGP. In order to achieve flow balance during the micro-injection molding process and dimensional accuracy, two LGP pattern was made in one micro-mold.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.285-290
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• 2005

Micro On-Off valves are currently recognized as the core technology in the fields of the micro fluid chip fur medical applications and production lines of semi-conduct chip. Micro valves that operate by compressed air need the high-speed responsibility, repeatability, the absorbability and the uniform pressure by the poppet. In this study, Micro On-Off valves that posses the high-speed responsibility and the high rate of flow have designed and analyzed through the law of equivalent magnetic circuit and Finite Element Method (FEM) respectively. In case of poppet, Flow field characteristic was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D distribution curve of the force by working the front poppet.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.105-110
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• 2006

The highly integrated nature of polymer based organic light emitting diode (POLED) microdisplay technology, coupled with low voltage and low power electroluminescent light generation, combine to offer a very promising technology for use in portable and personal electronics products. We briefly describe the technology before discussing how to engineer the color gamut using whiteemitting polymer materials, microcavity device structure and color filter absorbance.

• Journal of the Korean Vacuum Society
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• 제15권4호
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• pp.354-359
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• 2006

Recently, the interest in lithography without photo exposure has been increased compare to the conventional photolithography in nano meter and micrometer size patterning area. We studied a self aligned dipping of Ag solution through micro contact printing (${\mu}-CP$) with octadecyltrichlorosilane (OTS) treated polydimethylsiloxane (PDMS) soft mold. The OTS monolayer on the patterned PDMS was formed by dipping it into OTS solution. We transferred the OTS monolayer from PDMS mold to the glass. The OTS monolayer changed the surface energy from hydrophilic surface to hydrophobic surface, And then we made self aligned Ag solution patterns just after dipping the substrate, using adhesion difference of Ag solution between OTS treated hydrophobic area and non-OTS treated hydrophilic area. We finally get the Ag patterns through only dip-coating after the ${\mu}-CP$ process. And we observed surface energies on the glass substrate through the contact angle measurements as time goes on.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 한국반도체및디스플레이장비학회 2004년도 International Symposium
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• pp.33-48
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• 2004

• Proceedings of the Optical Society of Korea Conference
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• 한국광학회 2004년도 하계학술발표회
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• pp.100-101
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• 2004

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 1998년도 제14회 학술발표회 논문개요집
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• pp.23-23
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• 1998

High resolution field emission dispplay(FED) devices of 5 inch diagonal in size are fully developped for the applications of near-future flat ppanel dispplays. Under the unique gate-switching drive scheme electron trajectory pprofiles are simulated and tested by considering leakage effects of each ppixel. Uniquely-pprinted sppacer with high asppect ratio are fabricated on real ITO glass for high vacuum ppackaging. In addition new gas aging scheme of stabilizing field emitting array are extensively investigated during the sealing and exhausting pprocess in order to pprevent oxidation effects on the micro tipp. Finally fulll color images of 64 gray scale will be demonstrated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.371-376
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• 1997

A 100*100.mu.m$^{2}$ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer andas a mold for nickel electroplating. The micro mirror is composed of aluminum mirror plate, two nickel support posts, two aluminum hinges, two address eletrodes, and two landing electrodes. The aluminum mirror plate,which is supported by two nickel support posts, is overhung about 10.mu.m from the silicon substrate. THe aluminum mirror plate is actuated like a seesaw by electrostatic force generated by electic potential difference applied between the mirror plate and the address electrode. This paper presents some methods to measure the optical and the dynamic characteristics of the fabricated micro mirror.