• 한국기계가공학회지
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• 제17권6호
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• pp.1-6
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• 2018

Recently nano meter size pattern (sub-micro scale) can be machined mechanically using a diamond tool. Many studies have found a 'size effect' which referred to a specific cutting energy increase with the decrease in the uncut chip thickness at micro scale machining. A new analysis method was suggested in order to observe 'size effect' in nano scale machining and to verify the cause of the 'size effect' in this study. The diamond tool was indented to a vertical depth of 1,000nm depth in order to simplify the stress state and the normal force was measured continuously. The tip rounding was measured quantitatively by AFM. Based on the measurements and theoretical analysis, it was verified that the main cause of the 'size effect' in nano scale machining is geometrically necessary dislocations, one of the intrinsic material characteristics. st before tool failure.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.407-408
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• 2006

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.53-57
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• 1996

The side burrs and shape distortion resulting from the micromachining of an array of V-shape microgrooves in optical components were experimentally invesigated and a simplified model for their formation is proposed. Burr/shpae distortion should be kept to a minimum level since they degrade the characteristics and performance of these parts. The focus of this study is on the influence of depth of cut and workpiece material. The workpiece materials use were brass, bronze and copper. From the obsevation of the chip shape and burr/shape distortion, the proposed model, that the compressive force at the cutting edge causess the ductile uncut chip material to flow plastically outward toward the free surface to result in a burr, was verified.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.200-201
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• 2014

다이아몬드 마이크로 블레이드의 절삭 효율을 향상시키고 절삭 과정에서의 블레이드 측면 경질 박막이 절삭 성능에 미치는 영향을 연구하기 위해 Cu/Sn 금속 결합재에 $MoS_2$와 $WS_2$ 고체 윤활제를 각각 동일 분율 첨가한 후 PAPVD법으로 DLC 박막을 블레이드의 측면에 증착하였다. 실착 절삭 시험을 위해 마이크로 블레이드 시편을 제조하여 충분한 드레싱 과정 후 절삭 시험을 행하였으며 절삭 중 순간 소모 전력과 블레이드의 마모량을 비교 평가하였다. DLC 코팅은 절삭 중 측면에 안정적으로 존재하며 측면 지립의 돌출을 억제하고 마찰을 감소시켜 절삭 효율이 향상되었으며 결과적으로 수명이 증가하였다.

• 한국정밀공학회지
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• 제21권5호
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• pp.38-45
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• 2004

As optical communication is being substituted for telecommunication, the demand of a large variety of fiber optic components is increasing. V-groove substrates, one of the module components, are used to connect optical fibers to optical planar circuits and to arrange fibers. Their applications are multi-channel optical connectors and optical waveguide fiber coupling, etc. Because these substrates are a critical part of the splitter in a multiplexer and a multi fiber connector, precise and reliable fabrication process is required. For precisely aligning core pitch between fibers, machined core pitch tolerance should be within sub-microns. Therefore, these are generally produced by state-of-the-art micro-fabrication like MEMS. However, most of the process equipment is very expensive. It is also difficult to change the process line for custom designs to meet specific requirements using various materials. For various design specifications such as different values of the V angle and low-priced process, the fabrication method should be flexible and low cost. To achieve this goal, we have suggested a miniaturized machine tool with high accuracy positioning system. Through this study, it is shown that this cutting process can be applied to produce V-groove subtracts. We also show the possibility of using a miniaturized machining system for producing small parts.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1507-1510
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• 2005

This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 한국정밀공학회지
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• 제30권12호
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• pp.1303-1312
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• 2013

We report an ultra-precision lathe designed to machine micron-scale features on a large-area roll mold. The lathe can machine rolls up to 600 mm in diameter and 2,500 mm in length. All axes use hydrostatic oil bearings to exploit the high-precision, stiffness, and damping characteristics. The headstock spindle and rotary tooling table are driven by frameless direct drive motors, while coreless linear motors are used for the two linear axes. Finite element method modeling reveals that the effects of structural deformation on the machining accuracy are less than $1{\mu}m$. The results of thermal testing show that the maximum temperature rise at the spindle outer surface is approximately $0.5^{\circ}C$. Finally, performance evaluations of the error motion, micro-positioning capability, and fine-pitch machining demonstrate that the lathe is capable of producing optical-quality surfaces with micron-scale patterns with feature sizes as small as $20{\mu}m$ on a large-area roll mold.

• 한국정밀공학회지
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• 제23권8호
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• pp.171-177
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• 2006

This study was performed as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-{\mu}m$-deep indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.51 GPa and 104 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$ ) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46- 0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined are a during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 한국치위생학회지
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• 제14권2호
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• pp.281-286
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• 2014

Objectives : The aim of this study is to evaluate the surface changes of enamel specimen, tooth structure by toothpastes in child and adult. Methods : Experimental teeth were collected from extracted human primary teeth. 120 enamel specimens were prepared by cutting the teeth into $2{\times}3{\times}2mm$ blocks using diamond saw and the specimens were assigned to 3 groups. Group 1 was used as control with no treatment. Group 2 was treated with child toothpaste and Group 3 was treated with adult toothpaste on primary enamel surface for 3 minutes daily over 4 weeks. The specimens were immersed into individual container having artificial saliva and the artificial saliva was changed every day. The electron probe micro analyzer(EPMA) provided weight percent(wt%) of calcium(Ca) and phosphorous(P) on enamel surface. The morphology was analyzed by scanning electron microscopy(SEM). Data were analyzed by one-way analysis of variance(ANOVA) and Tukey's test post-hoc test using SPSS(Version 20, SPSS Inc., Chicago, USA). Level of significance was set at 0.05. Results : The surface changes of the primary teeth revealed a significant difference during 4 weeks. Calcium(Ca) and phosphorous(P) levels were found the weight percent difference and a rough enamel surface was seen on SEM after adult toothpaste application. Conclusions : The changes in Ca and P and the morphological surface were affected by the primary tooth treated with adult toothpaste. Enamel surface showed significant differences during 4 weeks.