• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.2
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• pp.103-109
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• 2013

In this study, we performed a numerical study of hydrogen/air combustion in the combustion chamber of an ultra micro gas turbine. The supply flow rate and equivalence ratio are used as variables, and the commercial computational fluid dynamic program (STAR-CCM) is used for the numerical study of the combustion. The flow rate significantly affects the flame position, flame temperature, and pressure ratio between the inlet and the outlet. The flame position is close to the outlet in the combustion chamber, and the flame temperature and pressure ratio monotonously increases with the supply flow rate. The change in the equivalence ratio does not affect the flame position. The maximum flame temperature occurs under stoichiometric conditions.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.362-365
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• 1997

In the field of Micro-Mechanics, it has been known diffcult to integrate the micro-machine with sensor and source line for the conventional copper line cnanot be used in compact and small size. We developed a system to make thethin copper film as a connect line on the poyurethane pipe (2mm in diameter) by the evaporation technique. This system consists of an evaporation chamber two long branches, substrate hoider and a Linear-Rotary motion feed feedthrough. The results showed that thin copper film coated polyurethanc pipe could be applied th the small medical devices such as the micro active endoscope.

• 유체기계공업학회:학술대회논문집
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• 2004.12a
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• pp.109-115
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• 2004

The micro turbo generator is new portable power source based on the Brayton cycle, which consists of a compressor, a turbine, a generator, and a combustion chamber. In this paper, the thermodynamic analysis was performed to find the required condition for hundreds watts power in the micro turbo generator, and also the rotordynamic stability was predicted using the numerical analysis of air foil bearings which support the micro turbo generator. By experimental works, the rotordynamic stability of the micro turbo generator with foil bearings was verified. While various transient dynamic situation, the micro turbo generator had stable performances. From the result, it was demonstrated that air foil bearings could be adapted to the micro turbo generator as a excellent lubrication element.

• Journal of the Semiconductor & Display Technology
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• v.23 no.1
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• pp.52-55
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• 2024

In this paper, a state change study was conducted through Frequency Domain Reflectometry (FDR) technology for the process chamber of plasma equipment for semiconductor manufacturing. In the experiment, by direct connecting the network analyzer to the RF matcher input of the 300 mm plasma enhanced chemical vapor deposition (PECVD) chamber, S11 was measured in a situation where plasma was not applied, and the frequency domain reacting to the chamber state change was searched. Response factors to changes in the status, such as temperature, spacing of the heating chuck, internal pressure difference, and process gas supply state were confirmed. Through this, the frequency domain in which a change in the reflection value was detected through repeated experiments. The reliability of the measured micro-displacement was verified through reproducibility experiments.

• 유체기계공업학회:학술대회논문집
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• 2006.08a
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• pp.249-252
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• 2006

We conducted the experiment to analyze characteristics of micro-nozzle using different cold gas under two different nozzle expansion ratios in low vacuum condition. We measured thrust and chamber pressure and mass flow rate under low vacuum condition, and then compared them with those in ambient pressure.

• Progress in Medical Physics
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• v.25 no.4
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• pp.255-263
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• 2014

The dosimetry of very small fields is challenging for several reasons including a lack of lateral electronic equilibrium, large dose gradients, and the size of detector in respect to the field size. The objective of this work was to evaluate the suitability of a new commercial synthetic diamond detector, namely, the PTW 60019 microDiamond, for the small field dosimetry in cyberknife photon beams of 6 different collimator size (from 5 mm to 30 mm). Measurements included dose linearity, dose rate dependence, output factors (OF), percentage depth doses (PDD) and off center ratio (OCR). The results were compared to those of pinpoint ionization chamber, diamond detector, microLion liquid Ionization chamber and diode detector. The dose linearity results for the microDiamond detector showed good linearly proportional to dose. The microDiamond detector showed little dose rate dependency throughout the range of 100~600 MU/min, while microLion liquid Ionization chamber showed a significant discrepancy of approximately 5.8%. The OF measured with microDiamond detector agreed within 3.8% with those measured with diode. PDD curves measured with silicon diode and diamond detector agreed well for all the field sizes. In particular, slightly sharper penumbras are obtained by the microDiamond detector, indicating a good spatial resolution. The results obtained confirm that the new PTW 60019 microDiamond detector is suitable candidate for application in small radiation fields dosimetry.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1186-1190
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• 2003

In this paper, a valveless bubble-actuated fluid micropump was has been developed and its performance was tested. The valveless micropump consists of the lower plate, the middle plate, the upper plate and a resistive heater. The lower plate includes the nozzle-diffuser elements and the double-chamber. Nozzle-diffuser elements and a double-chamber are fabricated on the silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The lower plate also has inlet/outlet channels for fluid flow. The middle plate is made of glass and plays the role of the diaphragm. The chamber in the upper plate is filled with deionized water, and which contacts with the resistive heater. The resistive heater is patterned on a silicon substrate by Ti/Pt sputtering. Three plates and the resister heater are laminated by the aligner and bonded in the anodic bonder. Since the bubble is evaporated and condensed periodically in the chamber, the fluid flows from inlet to outlet with respect to the diffusion effect. In order to avoid backflow, the double chamber system is introduced. Analytical and experimental results show the validity of the developed double-chamber micropump.

• Analytical Science and Technology
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• v.24 no.4
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• pp.290-297
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• 2011

In present, evaluation method for car cabin air quality has been developed in ISO, China, Japan. Also The management standard for new produced car has been applied since 1, July, 2010. To manage car cabin air quality, It is important to evaluate VOC emitted from interior material. In this study, complete component of door trim armrest was evaluated in accordance with ISO 12219-5, cut component was evaluated in accordance with ISO 12219-3. The vapour gas was collected with stainless tube packed with Tenax TA and analyzed with TD-GC/MS. It was confirmed that emission rate of each compounds was difficult in each evaluation method. As a result, to evaluating each components composing door trim armrest, main sources of emitting VOCs in door trim armrest were PP substrate and adhesive.

• 한국신재생에너지학회:학술대회논문집
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• 2006.11a
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• pp.425-428
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• 2006

Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is $20{\times}20{\times}0.53mm^3$. When the current is applied, the heater heats liquid in chamber. As a result the liquid vaporizes. The response of temperature in the chamber was measured using thermocouple The changed temperature is $3^{\circ}C$ for 5 sec at 0.032W.

• Journal of Sensor Science and Technology
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• v.18 no.2
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• pp.122-127
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• 2009

We have developed and reported several micro-spikes for minimally invasive biopsy. In this paper, a micro-tissue collecting tool for tissue diagnosis extracted by micro-spike is presented. Using proposed polydimethy-siloxane (PDMS) micro-tissue collecting tool, which has a negative micro-spike structure in a porous chamber, the extracted tissue in a micro-spike is effectively detached. The gastro-intestinal tissue of a pig is extracted in an in vivo environment, and then it is detached from a micro-spike using the PDMS micro-tissue collecting tool. A fine clinical picture of the detached tissue is acquired.