• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.32-32
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• 2011

Plasma etching is used in microelectronic processing for patterning of micro- and nano-scale devices. Commonly, optical emission spectroscopy (OES) is widely used for real-time endpoint detection for plasma etching. However, if the viewport for optical-emission monitoring becomes blurred by polymer film due to prolonged use of the etching system, optical-emission monitoring becomes impossible. In addition, when the exposed area ratio on the wafer is small, changes in the optical emission are so slight that it is almost impossible to detect the endpoint of etching. For this reason, as a simple method of detecting variations in plasma without contamination of the reaction chamber at low cost, a method of measuring plasma impedance is being examined. The object in this research is to investigate the suitability of using plasma impedance monitoring (PIM) with statistical approach for real-time endpoint detection of $SiO_2$ etching. The endpoint was determined by impedance signal variation from I-V monitor (VI probe). However, the signal variation at the endpoint is too weak to determine endpoint when $SiO_2$ film on Si wafer is etched by fluorocarbon plasma on inductive coupled plasma (ICP) etcher. Therefore, modified principal component analysis (mPCA) is applied to them for increasing sensitivity. For verifying this method, detected endpoint from impedance analysis is compared with optical emission spectroscopy (OES). From impedance data, we tried to analyze physical properties of plasma, and real-time endpoint detection can be achieved.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.375-375
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• 2012

최근 차세대 평판 디스플레이의 응용에 많은 주목을 받고 있는 AMOLED의 경우 전류구동 방식이기 때문에 a-Si TFT 보다는 LTPS-TFT가 요구되며, 대면적 기판에서의 결정립 크기의 균일도가 매우 중요한 인자이다. 비정질 실리콘 박막 상부 혹은 하부에 도전층을 개재하고, 상기도전층에 전계를 인가하여 그것의 주울 가열에 의해 발생한 고열에 의해 비정질 실리콘 박막을 급속 고온 고상 결정화하는 방법에 관한 기술인 JIC (Joule-heating Induced Crystallization) 결정화 공정은 기판 전체를 한번에 결정화 하는 방법이다. JIC 결정화 공정에 의하여 제조된 JIC poly-Si은 결정립 크기의 균일성이 우수하며 상온에서 수 micro-second내에 결정화를 수행하는 것이 가능하고 공정적인 측면에서도 별도의 열처리 Chamber가 필요하지 않는 장점을 가지고 있다. 그러나 고온 고속 열처리 방법인 JIC 결정화 공정을 수행 하면 Arc에 의하여 시편이 파괴되는 현상이 발견되었다. 본 연구에서는 Arc현상의 원인을 파악하기 위해 전압 인가 조건 및 시편 구조 조건을 변수로 결정화실험을 진행하였다. ARC가 발생하는 Si층과 Electrode 계면을 식각 분리하여 Electrode와 Si층 사이의 계면이 형성되지 않는 조건에서 전계를 인가하는 실험을 통하여 JIC 결정화 공정 중 고온에 도달하게 되면, a-Si층이 변형되어 형성된 poly-Si층이 전도성을 띄게 되고 인가된 전압이 도전층과 Poly-Si 사이에 위치한 $SiO_2$의 절연파괴(Dielectric breakdown)전압보다 높을 경우 전압 인가 방향에 수직으로 $SiO_2$가 절연 파괴되며 면저항 형태의 전도층의 단락이 진행되며 전도층이 완전히 단락되는 순간 Arc가 발생한다는 것을 관찰 할 수 있었다. 본 실험의 연구 결과를 바탕으로 Arc 발생을 방지하는 다양한 구조의 Equi-Potential 방법이 개발되었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.4
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• pp.354-361
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• 2008

The dielectric characteristics of low-k interlayer dielectric materials was fabricated by plasma enhanced chemical vapor deposition (PECVD). BTMSM precursor was evaporated and introduced with the flow rates from 16 sccm to 25 sccm by 1sccm step in the constant flow rate of 60 sccm $O_2$ in process chamber. Manufactured samples are analyzed components by measuring FT/IR absorption lines. Decomposition each Microscopic structures through two-dimensional correlation analysis about mechanisms for the formation of SiOCH in $SiOCH_3$, Si-O-Si and Si-$CH_3$ bonding group and analyzed correlation between the micro-structure of each group. It is a tendency that seems to be growing of Si-O-Ci(C) bonding group and narrowing of Si-O-$CH_3$ bonding group relative to the increasing flow-rate BTMSM. The order of changing sensitivity about changes of flow-rate in Si-O-Si(C) bonding group is cross link mode$(1050cm^{-1})$ $\rightarrow$ open link mode$(1100cm^{-1})\rightarrow$ cage link mode $(1140cm^{-1})$.

• The Korean Journal of Community Living Science
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• v.20 no.4
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• pp.515-522
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• 2009

This study was to develope the functional work clothing for livestock farmers. Major demanding performances for livestock work clothing are anti-soil and anti-bacterial properties. On surveys, functional fabrics that have anti-soil, anti-bacterial and waterrepellent performances were developed and the work clothing that have adaptability to body movements were manufactured. The designs of livestock working clothes were two piece and one piece with rubber bade in waist. The thermal responses of subjects wearing the winter working clothes for stock farming worker were measured in the climate chamber($17^{\circ}C$, 40% R.H.). The main results were summarized as follows: Total body weight loss was smaller and the mean skin temperature was higher in developed clothes than the market product. Clothing micro-climate of developed clothes was lower than the market clothes. Subjective sensation did not have significant differences. From the results of various evaluation, developed garments for livestock workers showed better efficiency than the market product.

• Journal of the Korean Society of Combustion
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• v.19 no.1
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• pp.29-38
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• 2014

This paper described an experimental investigations of combustion instability mode in a lean premixed dual swirl combustor for micro-gasturbine system. When such the instability occurs, a strong coupling between pressure oscillations and unsteady heat release excites a self-sustained acoustic wave which results in a loud, annoyed sound and may also lead a structural damage to the combustion chamber. The detailed period of flame behavior and heat release in combustion instability mode have been examined with high speed OH and CH-PLIF system and $CH^*$ chemiluminescence measurement, flame tomography with operated at 10 kHz and 6 kHz each. Experiment results suggest that unstable flame behavior has a specific frequency with 200 Hz and this frequency is accords with about 1/2 sub-harmonic of combustor resonance frequency, not fundamental frequency. This is very interesting phenomenon that have not reported yet from other previous works. Therefore, when a thermo-acoustic instability with Rayleigh criterion occurs, the fact that the period of heat release and flame behavior are different each other was proposed for the first time through this work.

• Journal of Biosystems Engineering
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• v.30 no.5 s.112
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• pp.306-311
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• 2005

In this study, a biosensor was developed to rapidly diagnose the swine sarcoptic mange (Sarcoptes scabies var. suis). The ELISA was modified to reduce the processing time for rapid diagnosis. The biosensor consists of a biological reaction part, and a measurement and control part. The biological reaction part was designed for using micro-pumps and valves for fluid transportation, and the measurement control part composed of a photodiode, a light-emitting diode fur light measurement, and a microcomputer to implement assay A polystyrene covet was used as a reaction chamber. Signal output was read as the rate of change in optical density at 645nm. Eighteen pigs diagnosed with sacroptic mange and 19 control pigs were tested. Fifteen sacbies-infested pigs showed positive results ($83.3\%$ sensitivity). Sixteen control pigs showed negative results ($84.2\%$ specificity). The system could execute a diagnosis cycle in about 45 min. The results suggest that this biosensor is useful for the rapid diagnosis of swine sacroptic mange.

• Korean Institute of Interior Design Journal
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• v.15 no.3 s.56
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• pp.144-154
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• 2006

Except the time when relics of a museum are exhibited or loaned to the public, they are stored in a storage. In addition, it is common view that collections are exhibited a few of total stored collections in a museum. Therefore, the environmental condition of a storage is an important factor. Hereby, the purpose of this study is to suggest the design guidelines of a storage for conservation of relics in a museum. The results from this study are as follows briefly. First, location of storages has to be located and centralized above ground against preservation environment and additional renovation. Second, for storage size, It is reasonable to secure long-term experimental data after planning about 20% of whole section in present domestic situation. Third, in order to prevent environmental deterioration due to short storage floor space, adequate storage height has to be secured against a mezzanine deck and spare storages need to be planned. Where a mezzanine deck is designed, detailed plans have to be supported for equal micro climate in a storage. Fourth, in respect of environmental control of storages, finish materials with adjustment ability on relative humidity have to be used after the system is installed jointly direct and indirect way by air chamber, considering domestic condition for management of intermittent ventilation.

• Proceedings of the KIEE Conference
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• 2002.11a
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• pp.60-63
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• 2002

This paper presents bead-based microbiocihps to detect and separate target proteins. Micro beads coated with capture proteins were introduced into a microchamber, and target proteins flowing across the chamber were bound and concentrated. The chip was connected with an external fluid system. Bead surfaces were double-coated with photo-cleavable linkers and capture proteins. The proteins bound on the beads were photo-separated under UV irradiation, and excited to be measured in fluorescence. $38{\sim}50{\mu}m$ sized polystyrene beads were used. SOGs(silicon-on-glass) were used to fabricate the microchip having glasses bonded on both sides. 100 ${\mu}m$ thick silicon channel was formed through silicon deep RIE process. The upper glass cover had holed through to have inlets and outlets fabricated by powder-blastings. In this study, biotin and streptavidin were used as capture proteins and detection proteins, respectively. The protein mixtures of streptavidin, HSA(human serum albumin) and ovalbumin were applied for selective detection test.

• Radiation Oncology Journal
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• v.7 no.2
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• pp.299-303
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• 1989

Authors have developed highly reproducible calibration method for the Micro-Selectron HDR Ir-192 system (Nucletron, Motherland). The new jig has a 10cm radius circular hole in the $30cm{\times}30cm{\times}0.2cm$ acrylic plate, and 5F flexible bronchial tubes are attached around the hole. The source moves along the circle in the tubes and the ionization chamber is placed verticaly at the center of the circular hole (center of the jig). Dose distribution near the center was derived theoretically, and measured with the film dosimetry system. Theoretical calculation and measurement show the error margin below $0.1\%$ for 1mm or 2mm position deviation. We have measured at 12 and 24 points of circle with 1, 6, 11 and 21 second dwell time of source in order to calculate the activity of the source. Measurements have been repeated daily for 50 days. The accuracy and the reproducibility are below $1\%$ error margin. The half life of the source from our measurement is estimated $73.4\pm0.4$ days.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.244-244
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• 2010

최근 활발히 연구되고 있는 AMOLED는 평판 디스플레이 분야를 이끌어 갈 차세대 선두 주자로 크게 주목 받고 있다. AMOLED는 전압 구동 방식인 AMLCD와 다르게 전류 구동 방식으로 a-Si TFT 보다 LTPS-TFT 사용이 요구되며, 대면적 기판으로 갈수록 결정립의 균일도가 매우 중요한 인자로 작용한다. 현재 양산이 가능한 AMOLED는 핸드폰이나 15인치 TV정도로 크기가 소형이며 대형 TV나 컴퓨터 모니터 등을 양산하기 위해 많은 방법이 시도되고 있다. 양산체제에서 사용되는 결정화 방법으로는 ELC가 가장 많은 부분을 차지하고 있다. 그러나 레이저를 사용하는 ELC 방법은 대면적으로 갈수록 레이저 빔 자체의 불균일성, shot to shot 불균일성, 레이저빔 중첩의 부정확도 등으로 인한 균일도의 부정확성이 커짐으로 인한 mura 현상이 나타나고 레이저 장비의 사용에 대한 비용 부담을 피할 수 없다. 따라서 non-laser 방식에 결정화 방법이 요구되나 SPC 경우는 상대적으로 고온에서 장시간이 걸리고, MIC 뿐만 아니라 MIC 응용 방법들은 금속 오염에 대한 문제가 발생하고 있는 실정이다. 이러한 문제로 인하여 결정립 크기의 균일도가 우수한 다결정 실리콘 박막을 제조하는 신기술에 대한 필요성이 매우 높은 실정이다. 본 연구에서는 비정질 실리콘 박막 상부 혹은 하부에 도전층을 개재하고, 상기 도전층에 전계를 인가하여 그것의 주울 가열에 의해 발생한 고열로 비정질 실리콘 박막을 급속 고온 고상 결정화하는 방법에 관한 기술인 JIC (Joule-heating Induced Crystallization) 결정화 공정을 개발하였다. 본 공정은 상온에서 수 micro-second 내에 결정화를 수행하는 것이 가능하며 도전층과 실리콘 박막 사이에 barrier층 삽입를 통하여 금속 오염을 막을 수 있으며 공정적인 측면에서도 별도의 chamber가 필요하지 않는 장점을 가지고 있다. 본 논문에서는 JIC 결정화 공정 조건에 따른 결정화 기구 및 JIC poly-Si의 미세구조 및 물리적 특성에 관한 논의가 이루어질 것이다.