• Journal of Sensor Science and Technology
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• v.20 no.3
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• pp.187-192
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• 2011

Abrasive blaster is similar to sand blaster, and effectively removes hard and brittle materials. Exiting abrasive blaster has applied to rough working such as deburring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro abrasive blaster was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro blaster in MEMS process of glass and succeed in domestically producing complete micro blaster. Diameter of hole and width of line in this etching is 100 ${\mu}m$ ~ 1000 ${\mu}m$. Experimental results showed good performance in micro channel and hole in glass wafer. Therefore, this micro blaster could be effectively applied to the micro machining of semiconductor, micro PCR chip.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.4
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• pp.20-27
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• 2009

The characteristics of titanium alloy as a relatively advanced material is low density, avirulent and, superior corrosive resistant, therefore the use of titanium alloy is increasing lately in aerospace and mechanical technologies, precision machinery, electronics industry, petro-chemical industries and biomedical areas. In these days, the titanium alloy product is required various surface qualities of not only smooth surface but also rough surface depending on usages. The purpose of this experimental research is to find the optimum surface roughness of titanium alloy of Ti-6Al-4V, by micro abrasive blasting as depending variable conditions of working pressure, nozzle size, working time, stand of distance and power particle size.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.5
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• pp.578-584
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• 2011

In mechanical cutting process, burr was generated at workpiece by cutting tool generally. It is working disturbance during manufacturing process. Besides burr was taken shape relatively large size more micro scale machining than macro scale machining. Many researches have been studied to remove micro burr(de-burring), because it was negative effect for accuracy of machining shape. However, micro de-burring was constrained by burr height, micro feature and so on. In this paper, experimental research was carried out to compare de-burring characteristics of $Al_2O_3$ abrasive and polymer.