• 제목/요약/키워드: Micro Vibration Measurement

검색결과 59건 처리시간 0.024초

실험적 방법에 의한 발파작업으로 기인하는 인접 초정밀 생산장비 FAB에 미치는 진동 영향성 평가 및 제어대책 (A evaluation and countermeasure for blast-induced vibration of micro electronic production facility based on experimental method)

  • 손성완;박상곤;이홍기;전종균
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2006년도 춘계학술대회논문집
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    • pp.875-878
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    • 2006
  • In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function, therefore, it is very important to predict precisely vibration environment of microelectronics production facility due to adjacent blast work. However, it is not easy to evaluate a quantitative vibration response of structure due blast because it can be determined by the characteristics of vibration sources, propagation through rock and soil and dynamic properties of building. In this paper, vibration influence evaluation of micro-electronic Production building induced from adjacent blast activity was performed by real measurement data obtained on ground and structure at same time. And blast vibration allowable limit on ground was supposed by measurement data analysis in order to avoid operation error of precision equipments

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Hand arm vibration measurement using micro-accelerometer in different brick structures

  • Gomathi, K.;Senthilkumar, A.;Shankar, S.;Thangavel, S.;Priya, R. Mohana
    • Smart Structures and Systems
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    • 제13권6호
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    • pp.959-974
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    • 2014
  • Hand-Arm Vibration Syndrome (HAVS) is a group of diseases caused by exposure of the hands to vibration while operating the hand held power tools such as road breaker, drilling machine, demolition hammer in construction works. In this paper, area-changed capacitive micro-accelerometer is designed to measure the vibration exposure on worker's hand when operating a drilling machine on various blocks such as clay block, paver block and solid cement block. The design process includes mathematical modelling of micro-accelerometer and simulations are done using INTELLISUITE 8.6. Experimental results are taken for various blocks surfaces using conventional and micro-accelerometer. Comparisons show that usage of area-changed micro-accelerometer for Hand-arm vibration monitoring provides better sensitivity, which in turn reduces the risk of HAVS in workers.

Mciro-flown 속도센서를 이용한 흡음률 측정 (Sound Absorption Measurement by Using Micro-Flown Velocity Sensor)

  • 정성수;조문재;김용태
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2004년도 춘계학술대회논문집
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    • pp.692-693
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    • 2004
  • We introduce a new velocity sensor, micro-flown sensor, which was developed by H-E de Bree. The sound absorption coefficients of a fiber material with the conventional pressure microphones and the micro-flown sensors were measured and compared. The experimental results show that both sensors could be well applied to measure the sound absorption coefficient but the pressure sensor was rather stable than micro-flown sensor

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원자간격 현미경의 캔틸레버의 정량적 특성평가를 위한 계측 시스템 개발 (Development of Measurement System for Quantitative Measurement of Cantilever in Atomic Force Microscopy)

  • 권현규;남기호
    • 한국기계가공학회지
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    • 제6권2호
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    • pp.22-27
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    • 2007
  • In this study, the two methods of stiffness measurement(Spring constant) of cantilever were proposed for quantitative measurement in Atomic Force Microscopy(AFM). As the 1st method for the measurement of stiffness, the probe method, which is used in the measurement of the semiconductor mechanical and electrical properties, was applied to the measurement of the cantilever. Experiments by the probe method were performed finding the resistance value of cantilever. As the results, the resistance was measured differently along with the dimension and the thickness of cantilever that determined the stiffness(spring constant) of the lever. As the 2nd method, the vibration characteristics(Dunkerley expression) is used to obtain the stiffness of the complex structure which is combined by AFM cantilever and the standard cantilever. We measured the resonant frequency from the complex structure using the micro stages and stereo microscope. As the results, we confirmed that the vibration characteristics(Dunkerley expression) is effected the micro complex structure of AFM cantilever.

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1″ 마이크로 스토리지의 진동특성 분석에 관한 연구 (Vibration Analysis of 1″ Micro Storage)

  • W. S. Han;M. P. Hong;Y. K. Byun;J. S. Ko
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2002년도 추계학술대회논문초록집
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    • pp.339.2-339
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    • 2002
  • In recent years, the demand of mobile device, such as digital camera, camcoder and PDA, increases remarkably. So, requirements of the mobile information data storage used in the mobile devices increase noticeably also. 1" micro storage is a kind of mobile storage, which has a CF type II form factor, and the similar structure of the general 3.5" HDD. In this paper, we performed the vibration analysis and experimental study of disk-spindle system in 1 " micro storage, such as measurement of the NRRO of the disk, and modal analysis. (omitted)

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의탄성 형상기억합금 메쉬 와셔가 적용된 수동형 진동절연기의 수학적 등가모델 도출 (Derivation of Numerical Equivalent Model of Vibration Isolator using Pseudoelastic SMA Mesh Washer)

  • 권성철;전수현;오현웅
    • 항공우주시스템공학회지
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    • 제8권3호
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    • pp.6-13
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    • 2014
  • A passive launch and on-orbit vibration isolator using SMA(Shape Memory Alloy) washer for both the structural safety of the micro-vibration source by attenuating the transmitted force under launch loads and the micro-vibration isolation during their on-orbit operation has been proposed, which does not require the additional launch locking mechanism. To measure the characteristics of SMA mesh washer, we performed compressive loading tests with a single SMA mesh washer and a vibration isolator using SMA mesh washer. The numerical equivalent model of vibration isolator using SMA mesh washer composed of two spring and viscous damping elements has been verified that both stiffness and viscous damping varied with respect to compressed deformations. In addition, the effectiveness of launch loads and micro-vibration reduction has been investigated through the dynamic characteristics measurement test of cooler assembly combined with passive vibration isolator.

효율적인 마이크로 버 측정 시스템 개발 (Development of Effective Measurement System for Micro Burrs)

  • 고성림;토호황민
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.702-705
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    • 2005
  • Burr is an undesirable projection as result of plastic deformation. Burr minimization and effective deburring process are required strongly to reduce the cost of the parts. In doing these efforts, the precise burr measurement must be provided for the efficient process. For this purpose the conoscopic holography sensors are selected before. However, it has been very difficult to measure micro burrs less than $10{\mu}m$ due to their tiny and sharp geometries as well as the effect of ambient vibration during scanning. A new micro burr measurement system using high precision. Conoprobe sensor and XY table can measure the micro burrs which is less than $10{\mu}m$. Experiments were carried out showing that micro burr around $10{\mu}m$ was successfully measured and analyzed.

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고막을 모방한 라텍스 샘플의 미세진동 측정을 위한 마이크로 바이브로 토모그라피 시스템 개발 (Micro Vibration Measurement in a Latex Sample Mimicking the Tympanic Membrane Using Micro Vibro Tomography)

  • 권재환;김필운;전만식;김지현
    • 한국전자파학회논문지
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    • 제30권1호
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    • pp.23-27
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    • 2019
  • 본 논문에서는 비 침습적, 비 파괴적으로 샘플의 단층구조와 단층의 미세진동을 실시간으로 동시에 영상화하는 마이크로 바이브로 토모그라피(micro vibro tomography: MVT) 시스템 개발 및 미세진동 측정 방법을 제안한다. 제안한 방법은 광 간섭 단층촬영기술(optical coherence tomography: OCT)을 기반으로 하여, 샘플의 위상변이를 이용해 마이크로 단위의 움직임을 측정하는 알고리즘을 적용한 방법이다. 본 실험에서는 고막을 모방한 라텍스 샘플에 2~5 kHz 주파수의 음파를 인가시키고, 음파에 의한 샘플의 미세진동을 제안한 MVT 시스템을 이용하여 측정하였다. 그 결과, 고막 모방 샘플의 단층구조와 미세진동을 동시에 영상화할 수 있었고, 표면부의 미세진동을 MVT 표면 진동 이미지로 프로젝팅하여 고막 모방 샘플의 전체적인 진동 형태를 관찰할 수 있었다.