• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.918-921
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• 2000

Micro-machining, one of the non-traditional machining techniques, can achieve a wanted shape of the surface using metal dissolution with electrochemical reaction and can be applied to the metal such as high tension, heat resistance and hardened steel. The workpiece dissolves when it is positioned close to the tool electrode in electrolyte and the current is applied. Traditional machining has been used in the industries such as cutting, deburring, drilling and shaping. The aim of this work is to develop Micro-machining techniques for micro shape by establishing appropriate machining parameters of micro-machining

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.27-33
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• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1730-1733
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• 2007

As semiconductor and MEMS devices become smaller, testing process during their production should follow such a high density trend. A circuit inspection tool "probe card" makes contact with electrode pads of the device under test (DUT). Nowadays, electrode pads are irregularly arranged and have height difference. In order to absorb variations in the heights of electrode pads and to generate contact loads, contact probes must have some levels of mechanical spring properties. Contact probes must also yield a force to break the surface native oxide layer or contamination layer on the electrodes to make electric contact. In this research, new vertical micro contact probe with bellows shape is developed to overcome shortage of prior work. Especially, novel bellows shape is used to reduce stress concentration in this design and stopper is used to change the stiffness of micro contact probe. Variable stiffness can be one solution to overcome the height difference of electrode pads.

• 한국정밀공학회지
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• 제19권12호
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• pp.134-141
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• 2002

The ER fluid can be one of efficient materials in ultraprecision polishing for optics, ceramics and semiconductors because of electrically controllable apparent viscosity. To finish small 3 dimensional structures such as the aspherical surface in optical elements, the possible arrangement of a tool, workpiece and auxiliary electrode is described. We examined the influence of the addition of a few abrasive particles on the performance of the ER fluid by measuring yield stress, and observed the behavior of abrasive particles in the ER fluid by a CCD camera, which is also theoretically predicted from the electromechanical principles of particles. On the basis of the above results, the steady flow analysis around the rotating micro tool is worked out considering the non-uniform electric field. Finally, Pyrex glass is polished using the mixture of the ER fluid and abrasive particles, and the effect of the electric field strength is evaluated.

• 한국생산제조학회지
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• 제22권2호
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• pp.268-274
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• 2013

Electric discharge machining drill (EDM-drill) is an efficient process for the fabrication of micro-diameter deep metal hole. As there is non-physical contact between tool (electrode) and workpiece, EDM-drill is widely used to machine the hard machining materials such as high strength steel, cemented carbide, titanium alloys. The electro-thermal energy forces the electrode to wear out together with the workpiece to be machined. The electrode wear occurs inside of a machining hole. and It causes hard to monitor the machining state, which leads the productivity and the quality to decrease. Thus, this study presents a methodology to estimated the electrode wear amount while two coefficients (scale factor and shape factor) of the logarithmic regression model are evaluated from the experiment result. To increase the accuracy of estimation model, the linear transformation method is adopted using the differences of initial electrode wear differences. The estimation model is verified through experiment. The experimental result shows that within minute error, the estimation model is able to predict accurately.

• 대한산업공학회지
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• 제39권3호
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• pp.149-155
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• 2013

Electric discharging machining (EDM) is commonly adopted to machine the precise and tiny part when it is difficult to meet the productivity and the tolerance by the conventional cutting method. The die-sinking EDM method works well to machine the micro-parts and the perpendicular wall of die and mould, whereas EDM drilling, called super drill, is excellent to machine the deep and narrow hole regardless the material hardness and the hole location. However, the electrode wear is rapid compared to the conventional cutting tool and makes it difficult to control the electrode feeding and to machine precisely. This paper presents an efficient method to estimate the electrode wear using hole pass-through experiment while the stochastic method is used to compensate for the estimation model. To validate the proposed method, the commercial EDM drill machine is used. The experiment result shows that the electrode wear amount can be predicted very precisely.

• 한국정밀공학회지
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• 제23권3호
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• pp.69-75
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• 2006

In this paper, micro electrical discharge milling using deionized water as dielectric fluid was investigated. In EDM, dielectric fluid is an important factor which affects machining characteristics. When deionized water was used as dielectric fluid, machining characteristics were investigated according to voltage, capacitance, and resistivity of deionized water. Machining gap increased with increasing voltage and capacitance. As the resistivity of deionized water decreased, the machining gap increased. The wear of a tool electrode and machining time can be reduced by using deionized water instead of EDM oil. Surface roughness was also improved when deionized water was used.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 추계학술대회 논문집
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• pp.198-203
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• 1998

To acquire the high precision of profile for standard electrode of loss angle, it is needed ultraprecision machining technology like MEAP(Magnetic Electronic Abrasive Polishing) and the very high profile measurement technology which can measure a micro unit about the workpiece. So, in this paper, it was developed the measurement system of precision of profile using non-contactable sensor that was approximate sensor of capacitance type, because that is better than others in the electrical characteristics. And standard electrode of loss angle was machined by the MEAP machining technology. In this study, it was development of precision measurement system. This system could be used measure the workpiece of roundness and straightness much more precise and faster than general mechanical measurement system done before. And it could be helped to minimize machining time and planning by very fast and precise measurement about the workpiece.

• 한국정밀공학회지
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• 제21권11호
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• pp.186-194
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• 2004

In this research, microfabrication technique using localized electrochemical deposition (LECD) with ultra short pulses is presented. Electric field is localized near the tool tip end region by applying a few hundreds of nano second pulses. Pt-Ir tip is used as a counter electrode and copper is deposited on the copper substrate in 0.5 M CuSO$_4$ and 0.5 M H$_2$SO$_4$ electrolyte. The effectiveness of this technique is verified by comparison with LECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration are investigated. The proper condition is selected from the results of the experiments. Micro columns less than 10 $\mu$m in diameter are fabricated using this technique. The real 3D micro structures such as micro pattern and micro spring can be fabricated by this method. It is suggested that presented method can be used as an easy and inexpensive method for fabrication of microstructure with complex shape.

• 한국정밀공학회지
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• 제19권3호
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• pp.80-87
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• 2002

Tungsten carbide microshaft is used as micro-punch, electrode of MEDM (micro-electro-discharge machining), and micro-tool because it has high hardness and high rigidity. In this study, the tungsten carbide microshaft was fabricated using electrochemical machining. Concentration of material removal at the sharp edge and metal corrosion layer affect the shape of the microshaft. Control of microshaft shape was possib1e through conditioning the machining voltage and electrolyte concentration. By applying periodic voltage, material removal rate increased and surface roughness improved. The fabricated microshaft in $H_2 SO_4$ electrolyte maintained sharper end edge and better surface finish than those fabricated by other electrolytes.