• International Journal of Precision Engineering and Manufacturing
• /
• v.6 no.2
• /
• pp.34-39
• /
• 2005

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

• Advances in nano research
• /
• v.15 no.3
• /
• pp.239-251
• /
• 2023

In the present study, we aim to use nanotechnology sensors/actuators to capture pressure and frequency of voice singers and to send signals for improving breathing pressure. In this regard, a circular composite structure having 3 different layers are used. The core layer is nano-composite material reinforced with graphene nanoplatelets. The face sheets are piezo electric materials connected to electrical circuit capable of measuring and applying voltage to the piezoelectric layers. This sensors have extremely smaller size than conventional sensors attached to the neck of singer and, hence, minimizes the influences on the output voice of the singer. A brief theoretical framework are presented for nonlocal strain gradient theory and geometry of the sensor is described in detail. The controlling procedure along with experimental results on 20 amateur and professional singer participants are also presented. The results of the study indicate that the participants could gain benefit from the device for improving their ability in phonation and keeping their frequency at a constant level although they have difficulty in the beginning of the experiment getting used to the device.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2006.08a
• /
• pp.655-659
• /
• 2006

This paper presents a novel electrostatic drop-on-demand inkjet device featured by a MEMS fabricated pole-type and hole-type nozzle with tube shaped orifice and investigates the feasibility of applying the inkjet device to display fabrication process. The electric voltage signal applied to the ring shaped upper electrode plate, against the hole-shaped ground or pole-shaped ground, referred here pole-type and hole-type nozzle respectively, allows ejection of small droplet to take place: That is, a tiny droplet is taken away from the peak of the mountain shaped liquid meniscus formed at the nozzle orifice. It is verified experimentally that the use of the pole type nozzle allows a stable and sustainable micro-dripping mode of droplet ejection for a wider range of applied voltages and of liquid viscosities. This demonstrates a feasibility of electrostatic drop-on-demand inkjet device as a disruptive alternative to conventional print heads such as thermal bubble or piezoelectric inkjet heads.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.12
• /
• pp.1347-1352
• /
• 2011

Recently, as the aged population grows around the world, many medical instruments, devices, and their fabrication processes are developing. Among the devices, a drug delivery stent is a good example for precision machining. Conventional drug delivery stent has problem of the remaining polymer because the drug is coated on the surface with it. If the drug is impregnated into the micro hole array on the stent surface, the polymer can be perfectly eliminated. Micro sized holes are generally fabricated by laser machining however, the fabricated holes do not have an enough aspect ratio to contain the drug or a good surface finish to deliver the stend to blood vessel tissue. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for abrication of micro sized holes better. The results indicated that the burr size can be significantly decreased with vibration assisted in nanosecond pulse laser drilling test.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.25 no.1
• /
• pp.62-67
• /
• 2012

Owing to the rapid growth of mobile and electronic equipment miniaturization technology, the supply of micro mobile computing machine has been fast raised. Accordingly they have performed many researches on energy harvesting technology to provide promising power supply equipment to substitute existing batteries. In this paper, in order to have low resonance frequency for piezoelectric energy harvester, we have tried to make it larger than before by adopting nickel that has much higher density than silicon. We have applied it for our energy harvesting actuator instead of the existing silicon based actuator. Through such new concept and approach, we have designed energy harvesting device and made it personally by making with micromachining process. The energy harvester structure has a cantilever type and has a dimension of $10{\times}2.5{\times}0.1\;mm^3$ for length, width and thickness respectively. Its electrode type is formed by using Au/Ti of interdigitate d33 mode. The pattern size and gap size is 50 ${\mu}m$. Based on the measurement of the nickel-based piezoelectric energy harvester, it is found to have 778 Hz for a resonant frequency with no proof mass. In that resonance frequency we could get a maximum output power of 76 ${\mu}W$ at 4.8 $M{\Omega}$ being applied with 1 g acceleration.

• Ceramist
• /
• v.23 no.1
• /
• pp.54-88
• /
• 2020

Global effort has resulted in tremendous progress with energy harvesters that extract mechanical energy from ambient sources, convert it to electrical energy, and use it for systems such as wrist watches, mobile electronic devices, wireless sensor nodes, health monitoring, and biosensors. However, harvesting a single energy source only still pauses a great challenge in driving sustainable and maintenance-free monitoring and sensing devices. Over the last few years, research on high-performance mechanical energy harvesters at the micro and nanoscale has been directed toward the development of hybrid devices that either aim to harvest mechanical energy in addition to other types of energies simultaneously or to exploit multiple mechanisms to more effectively harvest mechanical energy. Herein, we appraise the rational designs for multiple energy harvesting, specifically state-of-the-art hybrid mechanical energy harvesters that employ multiple piezoelectric and triboelectric mechanisms to efficiently harvest mechanical energy. We identify the critical material parameters and device design criteria that lead to high-performance hybrid mechanical energy harvesters. Finally, we address the future perspectives and remaining challenges in the field.

• Journal of Mechanical Science and Technology
• /
• v.17 no.9
• /
• pp.1268-1275
• /
• 2003

In this paper, a compact 3-DOF mobile microrobot with sub-micron resolution is presented. It has many outstanding features : it is as small as a coin ; its precision is of sub-micrometer resolution on the plane ; it has an unlimited travel range ; and it has simple and compact mechanisms and structures which can be realized at low cost. With the impact actuating mechanism, this system enable both fast coarse motion and highly precise fine motion with a pulse wave input voltage controlled. The 1 -DOF impact actuating mechanism is modeled by taking into consideration the friction between the piezoelectric actuator and base. This modeling technique is extended to simulate the motion of the 3-DOF mobile robot. In addition, experiments are conducted to verify that the simulations accurately represent the real system. The modeling and simulation results will be used to design the model-based controller for the target system. The developed system can be used as a robotic positioning device in the micromanipulation system that determines the position of micro-sized components or particles in a small space, or assemble them in the meso-scale structure.

• Smart Structures and Systems
• /
• v.16 no.3
• /
• pp.383-399
• /
• 2015

Today, as railways increase their capacity and speeds, it is more important than ever to be completely aware of the state of vehicles fleet's condition to ensure the highest quality and safety standards, as well as being able to maintain the costs as low as possible. Operation of a modern, dynamic and efficient railway demands a real time, accurate and reliable evaluation of the infrastructure assets, including signal networks and diagnostic systems able to acquire functional parameters. In the conventional system, measurement data are reliably collected using coaxial wires for communication between sensors and the repository. As sensors grow in size, the cost of the monitoring system can grow. Recently, auto-powered wireless sensor has been considered as an alternative tool for economical and accurate realization of structural health monitoring system, being provided by the following essential features: on-board micro-processor, sensing capability, wireless communication, auto-powered battery, and low cost. In this work, an original harvester device is designed to supply wireless sensor system battery using train bogie energy. Piezoelectric materials have in here considered due to their established ability to directly convert applied strain energy into usable electric energy and their relatively simple modelling into an integrated system. The mechanical and electrical properties of the system are studied according to the project specifications. The numerical formulation is implemented with in-house code using commercial software tool and then experimentally validated through a proof of concept setup using an excitation signal by a real application scenario.

• Journal of Magnetics
• /
• v.20 no.3
• /
• pp.252-257
• /
• 2015

This paper investigates the concept and implementation of an energy harvesting device using a ferrofluid sloshing movement to generate an electromotive force (EMF). Ferrofluids are often applied to energy harvesting devices because they have both magnetic properties and fluidity, and they behave similarly to a soft ferromagnetic substance. In addition, a ferrofluid can change its shape freely and generate an EMF from small vibrations. The existing energy harvesting techniques, for example those using piezoelectric and thermoelectric devices, generate minimal electric power, as low as a few micro-watts. Through flow analysis of ferrofluids and examination of the magnetic circuit characteristics of the resultant electromagnetic system, an energy harvester model based on an electromagnetic field generated by a ferrofluid is developed and proposed. The feasibility of the proposed scheme is demonstrated and its EMF characteristics are discussed based on experimental data.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2000.06a
• /
• pp.1521-1527
• /
• 2000

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.