• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.77-82
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• 2021

This numerical study focuses on the analysis of fume particle dispersion characteristics over the surface of target workpiece in laser micro-hole machining process. The effects of oblique stagnation flow over fume generating machining point are examined by carrying out a series of three-dimensional random particle simulations along with probabilistic particle generation model and particle drag correlation of low Reynolds number. Present computational model of fume particle dispersion is found to be capable of assessing and quantifying the fume particle contamination in precision hole machining which may influenced by different types of air flow patterns and their flow intensity. The particle size dependence on dispersion distance of fume particles from laser machining point is significant and the effects of increasing flow oblique angle are shown quite differently when slot blowing or slot suction flows are applied in micro-hole machining.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1832-1835
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• 2003

This paper suggests the selective ultra precision polishing techniques for micro die and mold parts using magnetic-assisted machining. Fabrication of magnetic abrasive particle and their polishing performance are key technology at ultra precision polishing process of micro parts. Conventional magnetic abrasives have disadvantages. which are missing of abrasive particle and inequality between magnetic particle and abrasive particle. So, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Ferrite and carbonyl iron powder are used as magnetic particle where silicon carbide and Al$_2$O$_3$ are abrasive particle. Developed particles are analyzed using measurement device such as SEM. Possibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 2.927 $\mu\textrm{m}$ Rmax to 0.453 $\mu\textrm{m}$ Rmax.

• Journal of Sensor Science and Technology
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• v.20 no.4
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• pp.234-237
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• 2011

This paper presents a study into pH Indicator-Embedded hydrogel micro-particles which are encoded various shapes according to the captured indicator. We incorporate various pH indicators into a photo-curable hydrogel, PEG-DA(Poly(ethylene glycol) diacrylate). Using the latest fluidic lithography techniques, we can easily fabricate variously patterned hydrogel particles based on in-situ photopolymerization of the PEG-DA in a micro-fluidic channel. The shape of the particle is related to the pH indicator inside the particle. We demonstrate that the micro pH sensors change their colors according to the pH levels. The micro pH sensors have various characteristics that are related to the curing time, particle size, etc. By changing these conditions, we can adjust the long term stability and reaction time of the hybrid micro pH sensors.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.3
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• pp.136-143
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• 2001

A micro particle manipulator, which is devised for trapping particles at fixed positions by negative dielectrophoretic force (DEP force), has been fabricated and experimented. It is composed of square type electrode arrays fabricated by nickel electroplating with the height of 28 ${\mu}m$. To improve the quality of electroplated nickel electrodes, plating conditions have been optimized. Micro particles used in this study are polystyrene spheres and their to the specific position and trapped. The DEP force along the moving path of the particles has been estimated by the motion equation of a single particle. The displacement of a particle with an elapsed time was measured using a high-speed camera (1000 frames/sec). The velocity and acceleration of the particle were calculated from the measured data. The DEP force acting on the particle was estimated.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.9
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• pp.1015-1021
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• 2004

Micro-resolution Particle Image Velocimetry(Micro-PIV) was used to measure the flow in a micro-branch(Micro-Bypass). In this paper, effects of particle lump at the tip of a Micro-branch and difficulties of Micro-PIV measurements for microfluidics with branch passage were described. Micro-bypass was composed of a straight channel(200(100)${\mu}$m width ${\times}$ 80${\mu}$m height) and two branches which has 100(50)${\mu}$m width ${\times}$ 80${\mu}$m height. One of branches was straight and the other was curved. Experiments were performed at three regions along streamwise direction(entrance, middle and exit of branch) and five planes along vertical direction (0, ${\pm}$10, ${\pm}$20 ${\mu}$m) for the range of Re=0.24, 1.2, 2.4. Numerical simulation was done to compare with the measurements and understand the effects of particle lump at the tip of branch. And another fluid(3% poly vinyl Alcohol aqueous solution) were adapted for this study, so there were no particle sticking. In this case, we could get velocity difference between straight and curved branches.

• 유체기계공업학회:학술대회논문집
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• 2005.12a
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• pp.89-93
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• 2005

In this work, perfusive particles are used to form a micro column in a microfluidic chip and flow properties of the micro column are investigated. The packing flow velocity and the column/particle size ratio are shown to be important parameters affecting the packing density of the micro column. Experimental results show that the effect of the column/particle size ratio on the flow resistance of the micro column is negligible. This contrasts with previous works on the effect of the column/particle size ratio on the total pressure drop across the column.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.293-293
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• 2010

최근 태양전지 연구에서 저가격화를 실현하는 방법 중 하나로 폐 실리콘 웨이퍼를 재생하는 방법에 관하여 많은 연구가 진행되고 있다. 그러나 기존 웨이퍼 재생공정은 높은 재처리 비용과 복잡한 공정등의 많은 단점을 가지고 있다. 챔버 내에 압축된 공기나 가스에 의해 가속된 미세 파우더들이 재료와 충돌하면서 식각하는 기계적 건식 식각 공정 기술이라고 할 수 있는 micro blaster 공정을 이용하면 기존 재생공정보다 낮은 재처리 비용과 간단한 공정으로 재생웨이퍼를 제작할 수 있다. 하지만 이러한 micro blaster 공정은 식각 후 표면에 많은 particle과 crack을 형성시켜 태양전지용으로 사용하기에 단점을 가진다. 본 연구에서는 이러한 micro blaster를 이용한 태양전지용 재생 웨이퍼를 제작하기 위해 폐 실리콘 웨이퍼의 표면 물질을 식각하고, 식각 후 충돌에 의해 발생된 표면의 particle과 crack을 DRE(Damage Remove Etching)공정으로 제거하는 연구를 진행 하였다. 먼저 폐 실리콘 웨이퍼와 같은 표면을 형성하기 위하여 시편 표면에 각각 Al($2000{\AA}$), $Si_3N_4(3000{\AA})$, $SiO_2(1{\mu}m)$, AZ1512($1{\mu}m$)을 형성하고 micro blaster의 파우더 크기, 압력, 스캔 속도 등의 공정 조건에 따라 폐 실리콘 웨이퍼 표면 물질을 식각하였다. 식각 후 폐 실리콘 웨이퍼의 식각된 깊이와 표면 물질 잔량을 측정하고, 폐 실리콘 웨이퍼의 표면에 particle과 crack, 요철이 형성되어 있는지를 확인하였다. 그 결과 폐 실리콘 웨이퍼에 형성된 물질의 두께 이상으로 식각되었으며, 표면 물질의 잔량이 남아 있지 않았고, 표면에 많은 particle과 crack, 요철이 형성되었다. 표면에 형성된 요철은 유지하면서 많은 particle과 crack을 제거하기 위하여 micro blaster공정 후 DRE 공정으로 표면 개선이 필요하였다. 이때 남겨진 요철은 입사광량을 증가시키고, 표면 반사율을 감소시켜 태양전지내의 흡수하는 빛의 양을 증가시키는 태양전지 texturing 공정 효과로 작용하게 된다. 표면에 남은 particle과 crack을 완전히 제거하면서 요철은 유지할 수 있게 HNA 용액의 농도와 시간에 따른 식각 정도를 측정하였다. DRE 공정 후 표면 particle과 crack이 완전히 제거되어 표면이 개선됨을 확인하였다. Micro blaster를 이용하여 폐 실리콘 웨이퍼의 표면을 식각하고, DRE공정으로 표면을 개선함으로써 태양전지용 기판으로의 재생 가능성을 확인하였다.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.4
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• pp.53-60
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• 2003

CCD(Charge-Coupled Device) wafers, with a layer of micro lenses on top, usually are not passivated with dielectric films. Micro lenses, in general, are made of polymer material, which usually has a large affinity for particles generated in the various chip fabrication processes, most notably the wafer sawing for chip-dicing. The particles deposited on the micro lens layer either seriously attenuate or deflect the incoming light and often lead to CCD failure. In this study we introduce new type of saws which would significantly reduce the particle-related problems found in conventional type of saws. In the new saws, the positions and diverging angles of side and center nozzles have been optimized so as to flush the particles effectively. In addition, an independent nozzle is added for the sole purpose of flushing the generated particles. The test results show that, with the new saws. the ratio of the particle-related CCD chip failures has been dropped drastically from 9.1% to 0.63%.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.36-37
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• 2006

This study aims to investigate the usage of nano-scale particles in a micro metal injection molding ($\mu$-MIM) process. Nanoscale particle is effective to improve transcription and surface roughness in small structure. Moreover, the effects of hybrid micro/nano particles, Cu/Cu and SUS/Cu were investigated. Small dumbbell specimens were produced using various feedstocks prepared by changing binder content and fraction of nano-scale Cu particle (0.3 and $0.13{\mu}m$ in particle size). The effects of adding the fraction of nano-scale Cu powder on the melt viscosity of the feedstock, microstructure, density and tensile strength of sintered parts were discussed.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.2
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• pp.197-205
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• 2003

A cascade impactor is a multistage impaction device used to separate airborne particles into aerodynamic size classes. A micro-orifice impactor uses micro-orifice nozzles to extend the cut sizes of the lower stages to as small as 0.05 ${\mu}{\textrm}{m}$ in diameter without resorting to low pressures or creating excessive pressure drops across the impactor stages. In this work, the phenomenon of particle clogging in micro-orifice nozzles was experimentally investigated for a commercial micro-orifice uniform deposit impactor (MOUDI). It was observed, using an optical microscope, that the micro-orifice nozzles of the final stages were partially clogged due to particle deposition during the aerosol sampling. Therefore the pressure drops across the nozzles were higher than the nominal values given by the manufacturer. To examine the effect of particle clogging in micro-orifice nozzles, the particle collection efficiency of the MOUDI was evaluated using an electrical method for fine particles with diameters in the range of 0.1-0.6 ${\mu}{\textrm}{m}$. The monodisperse liquid dioctyl sebacate (DOS) particles were used as test aerosols. A faraday cage was employed to measure the low-level current of the charged particles upstream and downstream of each stage. It was found that the collection efficiency curves shifted to correspond to smaller orifice sizes, and the 50-% cutoff sizes were much smaller than those given by the manufacturer for the three stages with nozzles less than 400 ${\mu}{\textrm}{m}$ in diameter.