• Title/Summary/Keyword: Micro Geometry

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Design and Fabrication of Electrostatic Inkjet Head using Silicon Micromachining Technology

  • Kim, Young-Min;Son, Sang-Uk;Choi, Jae-Yong;Byun, Do-Young;Lee, Suk-Han
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.8 no.2
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    • pp.121-127
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    • 2008
  • This paper presents design and fabrication of optimized geometry structure of electrostatic inkjet head. In order to verify effect of geometry shape, we simulate electric field intensity according to the head structure. The electric field strength increases linearly with increasing height of the micro nozzle. As the nozzle diameter decreases, the electric field along the periphery of the meniscus can be more concentrated. We design and fabricate the electrostatic inkjet heads, hole type and pole type, with optimized structure. It was fabricated using thick-thermal oxidation and silicon micromachining technique such as the deep reactive ion etching (DRIE) and chemical wet etching process. It is verified experimentally that the use of the MEMS inkjet head allows a stable and sustainable micro-dripping mode of droplet ejection. A stable micro dripping mode of ejection is observed under the voltages 2.5 kV and droplet diameter is $10\;{\mu}m$.

Thermal and Flow Analysis of the Flat Tube with Micro-Channels (미세유로를 갖는 납작관의 열·유동 해석)

  • Chung, Kilyoan;Lee, Kwan-Soo;Kim, Woo-Seung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.8
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    • pp.978-986
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    • 1999
  • In this study, the general thermal and flow characteristics of flat tube with micro-channels has been studied and the correlation of Nusselt number and friction factor is proposed. The optimal flat tube geometry is determined by optimal design process. It is assumed to be a three dimensional laminar flow in the analysis of thermal and flow characteristics. The periodic boundary condition is applied since the geometry of flat tube with micro-channels shows uniform cross-section in primary flow direction. Local Nusselt number is examined for thermal characteristics of each membrane, and module average Nusselt number and friction factor are calculated to determine the characteristics of the heat transfer and pressure drop in overall flat tube with microchannels. The correlations between Nusselt number and friction factor are given by Reynolds number, aspect ratio of membranes, and the width of flat tube. ALM (Augmented Lagrangian Multiplier) method is applied to the correlations to determine an optimal shape of flat tube. It is shown that the optimal aspect ratio of flat tube is approximately 1.0, irrespective of the width of flat tube and Reynolds number.

기하양상을 고려한 균열 내 투수계수 산정

  • ;Ichikawa Y.
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2004.09a
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    • pp.159-163
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    • 2004
  • This study was conducted to calculate the permeability coefficient in a single fracture while taking the true fracture geometry into consideration. The fracture geometry was measured using the confocal laser scanning microscope (CLSM). The CLSM geometry data were used to reconstruct a fracture model for numerical analysis using a homogenization analysis (HA) method. The HA is a new type of perturbation theory developed to characterize the behavior of a micro-inhomogeneous material that involves periodic microstructures. The HA permeability was calculated based on the local geometry and local material properties (water viscosity in this case). The results show that the permeability coefficients do not follow the theoretical relationship of the cubic law.

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A Study on the Design of Fatigue Strength using Fractal Character of Surface Micro-crack (표면미소균열의 프랙탈 특성을 이용한 피로강도설계에 관한 연구)

  • Cho, Seok-Swoo;Joo, Won-Sik
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.12
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    • pp.143-151
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    • 1999
  • The shape of surface micro-crack is very irregular due to nonhomogeneous microstructure but is very important in respect to qualitative estimation of fatigue life. Fractal geomety can quantify the shape of surface mciro-crack. Fractal dimension is measured for surface micro-cracks with coast line and box counting method and estimates cycle ration in Al 2024-T3. The average fractal dimension $D_{favg}$ of surface micro-cracks has 3-parameter weibull distribution and location parameter is nearly constant but shape parameter decreases as cycle ration increases. The fractal dimension by coast line method is measured for individual surface micro-crack but the fractal dimension by box countin method is measured for all the surface micro-cracks under sampling area. Therefore, This paper shows fractal dimension $D_{fb}$ can predict cycle ratio $N/N_f$ more convenient than fractal dimension $D_{favg}$.

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Fabrication of Optical Micro-Encoder Chips for Sub-Micron Displacement Measurements (발광다이오드를 이용한 초정밀 변위 측정용 마이크로 엔코더 칩 제작)

  • Kim, Keun-Joo;Kim, Yun-Goo
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.2 s.95
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    • pp.74-81
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    • 1999
  • The integrated chip of optical micro-encoder was fabricated and the feasibility as displacement measurement device was confirmed. The geometry of micro-encoder was designed to utilize the optical interference effect on the second order of diffracted beams. The hybrid-type micro-encoder consisted with light emitting diode, photodiode, polyimide wave-guide and micro-lens provides stable micro-encoding results for high speed displacements. The measurement shows the resolution of displacement of 1.00 +/- 0.02 ${\mu}m$ for the grating with scale pitch of 2.0${\mu}m$.

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Cutting Chip and Surface Roughness in Micro Groove Cutting of Brass (황동의 Micro Groove 가공시 절삭칩과 표면거칠기)

  • Min, Kyung Tak;Jang, Ho Su
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.9 no.4
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    • pp.1-7
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    • 2010
  • Recently optical and electric and electronic forms in the field of ultra fine patterns has been used extensively, and techniques of the optical parts are required that can precision-machine this micro-patterns such as V or R-shaped micro-groove patterns. In this study, V and R type, shaping the way micro groove brass machining process to characterize the material feed rate and cutting depth and the V and R as a variable brother, using two kinds of diamond tools for each picture shape and surface roughness caused by conditions such as chips, processed through the analysis of effects of geometry and analysis such as precision machining.

Development of Micro Pattern Cutting Simulation Software (미세패턴 가공 시뮬레이션 기술 개발)

  • Lee, Jong-Min;Le, Duy;Kim, Su-Jin;Lee, Seok-Woo;Je, Tae-Jin
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.3
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    • pp.218-223
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    • 2009
  • The micro pattern machining on the surface of wide mold is not easy to be simulated by conventional software. In this paper, a software is developed for micro pattern cutting simulation. The 3d geometry of v-groove, rectangular groove, pyramid and pillar patterns are visualized by C++ and OpenGL library. The micro cutting force is also simulated for each pattern.

Extracting Photosynthetic Electrons from Thylakoids on Micro Pillar Electrode

  • Ryu, DongHyun;Kim, Yong Jae;Ryu, WonHyoung
    • International Journal of Precision Engineering and Manufacturing-Green Technology
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    • v.5 no.5
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    • pp.631-636
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    • 2018
  • Extraction of photosynthetic currents from thylakoids was studied using micro pillar structured electrode. Thylakoids were isolated from spinach leaves, and the size and shape of thylakoids were estimated from scanning electron microscopy images. Based on the geometry information of thylakoids, micro pillar shaped electrode was designed and fabricated using metal-assisted chemical etching of silicon wafers. Influence of photovoltaic effect on the silicon-based micro pillar electrode was confirmed to be negligible. Photosynthetic currents were measured in a three-electrode setup with an electron mediator, potassium ferricyanide. Photosynthetic currents from micro pillar electrodes were enhanced compared with the currents from flat electrodes. This indicates the significance of the enhanced contact between thylakoids and an electrode for harvesting photosynthetic electrons.

Study of Micro-channel Filling Flow Including Surface Tension Effects (표면 장력 효과를 고려한 마이크로 채널 충전과정 연구)

  • Kim, Dong-Sung;Lee, Kwang-Cheol;Kwon, Tai-Hun;Lee, Seung-S.
    • Proceedings of the KSME Conference
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    • 2001.06c
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    • pp.47-52
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    • 2001
  • Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in. micro-system industries, in particular the bioapplication industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, both experimental and numerical studies have been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness were fabricated and a flow visualization system was also developed to observe the filling flow into the micro-channels. Experimental flow observations were extensively made to find the effects of channel width and thickness, and effects of surface tension and volume flow rate and so on. And a numerical analysis system has been developed to simulate the filling flow into micro-channels with the surface tension effect taken into account. Discussed are the flow visualization experimental observations along with the predictability of the numerical analysis system.

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Design, Fabrication and Testing of Planar Type of Micro Solid Propellant Thruster (평판형 마이크로 고체 추진제 추력기의 설계, 제작 및 평가)

  • Lee, Jong-Kwang;Kwon, Se-Jin
    • Journal of the Korean Society of Propulsion Engineers
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    • v.10 no.4
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    • pp.77-84
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    • 2006
  • With the development of micro/nano spacecraft, concepts of micro propulsion are introduced for orbit transfer and drag compensation as well as attitude control. Micro solid propellant thruster has been attention as one of possible solution for micro thruster. In this paper, micro solid propellant thruster is introduced and research on basic components of a micro solid propellant thruster is reported. Micro Pt igniter was fabricated through negative patterning and quantitative effect of geometry was estimated. The characteristic of HTPB/AP solid propellant was investigated to measure the homing velocity. A combustion chamber was fabricated by means of anisotropic etching of photosensitive glass. Finally, micro solid propellant thrusters having various geometries were fabricated and tested.