• Journal of the Korean Crystal Growth and Crystal Technology
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• v.26 no.3
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• pp.121-125
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• 2016

The effect of temperature and pressure in the nitrogen ambient furnace on bulk micro defect (BMD) and denuded zone (Dz) is experimentally investigated. It is found that as pressure increases, Dz depth increases with a small decrease of BMD density in the range of temperature, $100{\sim}300^{\circ}C$. BMD density with hot isostatic pressure treatment (HIP) at temperature of $850^{\circ}C$ is higher than that without HIP while Dz depth is lower due to much higher BMD density. As the pressure increases, BMD density is increased and saturated to a critical value, and Dz depth increases even if BMD density is saturated. The concentration of nitrogen increases near the surface with increasing pressure, and the peak of the concentration moves closer to the surface. The nitrogen is gathered near the surface, and does not become in-diffusion to the bulk of the wafer. The silicon nitride layer near the surface prevents to inject the additional nitrogen into the bulk of the wafer across the layer. The nitrogen does not affect the formation of BMD. On the other hand, the oxygen is moved into the bulk of the wafer by increasing pressure. Dz depth from the surface is extended into the bulk because the nuclei of BMD move into the bulk of the wafer.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.5
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• pp.606-613
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• 2011

In this paper, patterns of laser scattering and detection of micro defects have been investigated based on Rayleigh criterion for silicon wafer in solar cell. Also, a new laser scattering mechanism is designed using characteristics of light scattering against silicon wafer surfaces. Its parameters are to be optimally selected to obtain effective and featured patterns of laser scattering. The optimal parametric ranges of laser scattering are determined using the mean intensity of laser scattering. Scattering patterns of micro defects are investigated at the extracted parameter region. Among a lot of pattern features, both maximum connected area and number of connected component in patterns of laser scattering are regarded as the important information for detecting micro defects. Their usefulness is verified in the experiment.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2018.11a
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• pp.75-76
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• 2018

MiDF, Micro Defect Free concrete, is the concrete made for high strength development by minimizing the defects such as micro pore and ITZ. Since MiDF exhibits strength through hydro-thermal synthesis reaction, it is essential to select the optimum C/S mole ratio. In this study, the basic characteristics of MiDF were evaluated by controlling the C/S mole ratio by SF and QP.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.6
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• pp.1320-1326
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• 1988

This paper deals with the behavior of surface crack growth and the characteristics of surface micro-crack distribution under creep and creep-fatigue with 1 min. and 10 min. of load holding times at 593.deg.C, in air. The test specimen is a plate type with a small artificial defect of type 304 the small defect has been carried out by the surface replica method and optical microphotography. The experimental results have been interpreted from the view-point of fracture mechanics. It can be concluded that the longer the hold time the longer the total life time. Most of surface micro-cracks initiate at grain boundaries before the specimen reaches 20% of its total life time, a few of them lead to fracture by coalescence with the main crack.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.167-171
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• 2021

The core-shell InGaN/GaN Multi Quantum Well-Nanowires (MQW-NWs) that were selectively grown on oxide templates with perfectly circular hole patterns were highly crystalline and were shaped as high-aspect-ratio pyramids with semi-polar facets, indicating hexagonal symmetry. The formation of the InGaN active layer was characterized at its various locations for two types of the substrates, one containing defect-free MQW-NWs with GQDs and the other containing MQW-NWs with defects by using HRTEM. The TEM of the defect-free NW showed a typical diode behavior, much larger than that of the NW with defects, resulting in stronger EL from the former device, which holds promise for the realization of high-performance nonpolar core-shell InGaN/GaN MQW-NW substrates. These results suggest that well-defined nonpolar InGaN/GaN MQW-NWs can be utilized for the realization of high-performance LEDs.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.23 no.11 s.170
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• pp.1922-1928
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• 1999

Rotary bending fatigue tests were carried out to investigate the influence of artificial defects on fatigue limit in annealed and austempered ductile iron. Obtained main results are as follows : (1) Artificial defect(micro hole type, dia.<0.4 mm) on specimen surface did not bring about a obvious reduction of fatigue limit in austempered ductile iron(ADI) as compared with annealed ductile iron. (2) According to the investigation of $\sqrt{area}_c$ which is the critical defect size to crack initiation at artificial defect, $\sqrt{area}_c$ of ADI is larger than that of annealed ductile iron. This shows that the situation of crack initiation at artificial defect in ADI is more difficult in comparison with annealed ductile iron. (3) One of the reasons for the low rate of crack initiation from artificial defect in ADI is that the resistance of matrix to crack initiation is higher than that of annealed ductile iron. (4) In case that the $\sqrt{area}$ of artificial defect and graphite nodule is the same, the rate of crack initiation from graphite nodule is higher than that from artificial defect. This reason is that the serious ruggedness around graphite nodule is formed by austempering treatment.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.6
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• pp.16-25
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• 2008

The micro needle means the ultrafine probe of 'Probe Card'. The size of micro needle is so minute that it is difficult to minute that it is difficult to inspect it with eyes. On the other hand it is very critical if there is a defect in micro needle of probe card. In this study, we developed an automatic visual inspection system for finding defect status in probe angle, tip length and diameter. Through the experimental results, we could find that our proposed method is better than human-eyes inspection method in accuracy and inspection speed, and also in robustness to lighting circumstances.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.7
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• pp.557-561
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• 2001

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

• Maxillofacial Plastic and Reconstructive Surgery
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• v.38
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• pp.14.1-14.6
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• 2016

Background: In guided bone regeneration (GBR) technique, many materials have been used for improving biological effectiveness by adding on membranes. The new membrane which was constructed with chitin-fibroin-hydroxyapatite (CNF/HAP) was compared with a collagen membrane (Bio-$Gide^{(R)}$) by means of micro-computed tomography. Methods: Fifty-four rats were used in this study. A critical-sized (8 mm) bony defect was created in the calvaria with a trephine bur. The CNF/HAP membrane was prepared by thermally induced phase separation. In the experimental group (n = 18), the CNF/HAP membrane was used to cover the bony defect, and in the control group (n = 18), a resorbable collagen membrane (Bio-$Gide^{(R)}$) was used. In the negative control group (n = 18), no membrane was used. In each group, six animals were euthanized at 2, 4, and 8 weeks after surgery. The specimens were analyzed using micro-CT. Results: Bone volume (BV) and bone mineral density (BMD) of the new bone showed significant difference between the negative control group and membrane groups (P < 0.05). However, between two membranes, the difference was not significant. Conclusions: The CNF/HAP membrane has significant effect on the new bone formation and has the potential to be applied for guided bone regeneration.

• Journal of Life Science
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• v.20 no.8
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• pp.1207-1213
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• 2010

The purpose of this study was to evaluate the effect of porcine cancellous bone as a scaffold in a rat calvarial defect model. Critical-sized defects were created in 30 male Sprague-Dawley rats. The animals were divided into critical defect (CD, n=10), $\beta$-tricalcium phosphate (TCP) graft (BT, n=10) and porcine cancellous bone graft (PCB, n=10) groups. Each defect was filled with $\beta$-TCP mixed with fibrin glue or porcine cancellous bone powder mixed with fibrin glue. In the CD group, the defect was left empty. All rats were sacrificed at 8 weeks after bone graft surgery, and bone formation was evaluated by gross observation, plain radiography, micro-computed tomography scanning and histological evaluation. Repair of bone defect was the least in the CD group, and significant new bone formation was observed in the PCB group. Grafting of porcine cancellous bone was more efficient for regenerating new bone than grafting $\beta$-TCP.