• Journal of Powder Materials
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• v.20 no.5
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• pp.355-358
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• 2013

Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.10
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• pp.1754-1761
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• 2003

The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.245-250
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• 2002

A successful on-line monitoring system for conventional machining operations has the potential to reduce cost, guarantee consistency of product quality, improve productivity and provide a safer environment for the operator. In fee-shape machining, typical signs of tool problems such as vibration, noise, chip flow characteristics and visual signs are almost unnoticeable without the use of special equipment. These characteristics increase the importance of automatic monitoring in fine-shape machining; however, sensing and interpretation of signals are more complex. In addition, the shafts of the micro-tools break before the typical extensive cutting edge of the tool gets damaged. In this study, the existence of a relationship between the characteristics of the cutting force and tool usage was investigated, and tool breakage detection algorithm was developed and the fellowing results are obtained. In data analysis, didn't use a relative error compare which mainly used in established experiment and investigated tool breakage detection algorithm in time domain which can detect AE and cutting force signals more effective and accurate.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.352-357
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• 2001

In this study, residual stress was investigated to evaluate damaged layer in high speed machining through simulation. In machining steel(STDll), residual stress remaining in machined surface was mainly appeared as compressive stress. The scale of this damaged layer more depends on feed per tooth and radial depth than spindle speed. Damaged layer was measured by optical microscope and hardness method. The micro-structure of damaged layer was a martensite because of cutting force and cutting temperature. Thickness of damaged layer is increased with incresing of feed per tooth and radial depth.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.12
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• pp.1173-1179
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• 2007

In recent years, research to machine large-surface micro-features has become important because of the light guide panel of a large-scale liquid crystal display and the bipolar plate of a high-capacity proton exchange membrane fuel cell. In this study, in order to realize the systematic design technology and performance improvements of an ultra-precision machine for machining the large-surface micro-features, a structural characteristic analysis was performed using its virtual prototype. The prototype consisted of gantry-type frame, hydrostatic feed mechanisms, linear motors, brushless DC servo motor, counterbalance mechanism, and so on. The loop stiffness was estimated from the relative displacement between the tool post and C-axis table, which was caused by a cutting force. Especially, the causes of structural stiffness deterioration were identified through the structural deformation analysis of sub-models.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.326-331
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• 2000

In this study, residual stress was investigated experimentally to evaluate damaged layer in high-sped machining. In machining difficult-to-cut material, residual stress remaining in machined surface was mainly speared as compressive stress. The scale of this damaged layer depends upon cutting speed, feed per tooth and radial cutting depth. Damaged layer was measured by optical microscope. The micro-structure of damaged layer was a mixed maternsite and austenite. depth of damaged layer is increased with increasing of cutting temperature, cutting force and radial depth. On the other hand, that is slightly decreased with decreasing of cutting force. The increase of tool wear causes a shift of the maximum residual stress in machined surface layer.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.5
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• pp.49-54
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• 2004

In order to evaluate the stability of chatter vibration in turning precess, the micro-positioning cutting test with artificial tool vibration by piezoelectric actuation were carried out. In experiment, the phase lags between cutting forces and chip thickness variations were measured, and the dimensionless penetration-rate coefficient（$\overline{K^*}$） which is the most important parameter on the stability for chatter vibration was calculated. The results show that$\overline{K^*}$ can be applicable to the stability criterion for regenerative chatter vibration.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1897-1901
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• 2003

Recently, with the development of semiconductor technology the miniaturization of products as well as parts and the products with high precision are being required. In addition as a national competitive power is increasingly effected by micro part development through micro machining and the secure of micro machining technology, the study of micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tool under the size of 30$\mu\textrm{m}$ and machine micro holes through micro tool fabrication by grinding, the application of ELID to grinding wheel and the measurement of surface roughness for micro tool.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.1
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• pp.59-64
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• 2008

Micro machining can manufacture complex shapes with high accuracy. Especially, this enables wide application of micro technology in various fields. For example, micro channels allow fluid transfer, which is a widely used technology. Therefore, liquidity research of flow in micro channels and micro channel manufacturing with use of various materials and cutting conditions has very important meaning. In this study, to find out correlation between fluid velocity in micro channels and surface roughness, we manufactured micro channels using micro end-mill and dropped ethanol into micro channels. We compared several surface roughness and fluid velocity in micro channels that were created by various processing conditions. Finally, we found out relationship between fluid velocity and surface roughness in micro channels of different materials.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1787-1792
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• 2003

Recently with the development of semiconductor technology, the miniaturization of parts and products as well as their high precision is required. In addition, as the national competitiveness is increasingly affected by the development of the micro parts through micro machining technology, the study of the micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tools under the size of $20{\mu}m$ and to machine micro holes using them. The fabrication is done by grinding and the application of ELID to the grinding wheel. The surface roughness of the micro tools is measured to evaluate the study.