• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1023-1025
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• 1998

This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.12
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• pp.633-638
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• 2001

The paper presents the fabrication and test of a micro scent injector module. A micro scent injector module consists of an injector fabricated by micromachining, a scent cartridge and a controller. If a scent injection signal triggers the controller, it heats the scent liquid in the injector chamber and a scent liquid is vaporized. The increased vapor pressure opens a normally closed boss valve, and the scent vapor is injected through the opened nozzle. The liquid volume injected by the fabricated module is about $1\muell$ for one second at 2 W.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.791-798
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• 2001

As the form factor of the disk drive is decreased, many mechanical issues that are negligible in larger form factors, should be considered for the design of the miniature drives. This paper deals with basic research on vibration characteristics and design considerations of small disks and actuators. The natural frequencies of micro-sized disks with polycabonate and glass substrates are experimentally measured, being compared to FEM results. In order to investigate the effects of rotating speeds, airflow and disk size on power consumption. we measure power imposed to spindle motor when different optical disks are spins in vacuum chamber. Finally, The vibration characteristics of the micro actuator used in a IBM Microdrive are experimentally studied for the application to the basic design of micro optical disks.

• KSTLE International Journal
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• v.3 no.1
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• pp.12-16
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• 2002

Micro/nano tribological and water wetting characteristics of ion beam treated PTFE (polytetrafluoroethylene) surfaces were experimentally studied. The ion beam treatment was performed with a hollow cathode ion gun at different argon ion dose conditions in a vacuum chamber to modify the topography of PTFE surface. Micro/nano tribological characteristics, water wetting angles and roughness were measured with a micro tribe tester, SPM (scanning probe microscope), contact anglemeter and profilometer, respectively. Results showed that surface roughness increased with the argon ion dose. Water wetting angle of the ion beam treated samples increased with the ion dose, so the surface shows an ultra-hydrophobic nature. Micro-adhesion and micro-friction depend on the wetting characteristics of the PTFE samples. However, nano-tribological characteristics showed different results. The scale effect of surface topography on tribological characteristics was discussed. Also, the water wetting characteristics of modified PTFE samples were discussed in terms of the surface topographic characteristics.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.33-37
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• 1999

We present, for the first time, a prototype active-matrix field emission display (AMFED) with 25$\times$25 pixels in which polycrystalline silicon fie이 emitter array (poly-Si FEA) and thin-film transistor (TFT) were monolityically intergrated on an insulating substrate. The FEAs showed relatively large electron emissions above at a gate voltage of 50 V, and the TFTs were designed to have low off-stage currents even though at high drain voltages. The intergrated poly-Si TFT controlled electron emissions of the poly-Si FEA actively, resulting in improvement in the emission stability and reliability along with a low-voltage control of field emission below 25V. With the prototype AMFED we have displayed character patterns by low-boltage pertipheral circuits of 15 V in a high vacuum chamber.

• Journal of Radiation Protection and Research
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• v.30 no.2
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• pp.69-75
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• 2005

Gas avalanche microdetectors, such as micro-strip gas chamber (MSGC), micro-gap chamber (MGC), micro-dot chamber (MDOT), etc., are operated under high voltage to induce large electron avalanche signal around micro-size anodes. Therefore, the anodes are highly exposed to electrical damage, for example, sparking because of the interaction between high electric field strength and charge multiplication around the anodes. Gas electron multiplier (GEM) is a charge preamplifying device in which charge multiplication can be confined, so that it makes that the charge multiplication region can be separate from the readout micro-anodes in 9as avalanche microdetectors possible. Primary electron collection efficiency is an important measure for the GEM performance. We have defined that the primary electron collection efficiency is the fractional number of electron trajectories reaching to the collection plane from the drift plane through the GEM holes. The electron trajectories were estimated based on 3-dimensional (3D) finite element method (FEM). In this paper, we present the primary electron collection efficiency with respect to various GEM operation parameters. This simulation work will be very useful for the better design of the GEM.

• Transactions of the Korean hydrogen and new energy society
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• v.24 no.6
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• pp.518-523
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• 2013

This paper describes the reduction of a hydrogen sulfide ($H_2S$) generated from a biogas plant. Micro bubble system is adopted to supply air into the water in the reaction chamber, which can increase the contact area of the supplied air to the reserving water. Two stage reaction chambers having two reaction rooms are designed and manufactured to enhance the reduction rate of a hydrogen sulfide. Sodium hydroxide (NaOH) is also considered to get rid of a hydrogen sulfide. Air volume rate to the water in a reaction chamber is maintained between 0.5 and $1.0m^3/min$. Throughout experimental measurement of the concentration of a hydrogen sulfide by changing the volume of supplied air into the water, reduction rate of a hydrogen sulfide increases as air volume increases. Adding sodium hydroxide to the water with the air supply can reduce effectively a hydrogen sulfide up to 99.5% from biogas. It is noted that a hydrogen sulfide generated by a biogas plant can reduce by supplying micro bubble air and sodium hydroxide effectively.

• Tribology and Lubricants
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• v.20 no.5
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• pp.237-244
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• 2004

Micro/nano tribological characteristics of PTFE coating films were experimentally studied. PTFE (polytetrafluoroethylene) modified polyethylene and low molecular weight PTFE were used as a coating materials. These films were deposited on Si-wafer (100) by IBAD (ion beam assisted deposition) method. The Ar ion beam sputtering was performed to change the surface topography of films using a hollow cathode ion gun under different Ar ion dose conditions in a vacuum chamber. Micro/nano tribological characteristics, water wetting angles and roughness were measured with a micro tribotester, SPM (scanning probe microscope), contact anglemeter and profilometer, respectively. The durability of the films were measured with macro tribotester. Results showed that the PTFE coating surfaces were converted to hydrophobic. The water contact angle of coated surfaces and surface roughness increased with the coating thickness. Adhesion and friction in micro and nano scale were governed by magnitude of normal load in soft material such as PTFE films. As the increase of sputtering time on low molecular weight PTFE films, the surface roughness was increased and nano adhesion and friction were decreased. The nano tribological characteristics of surfaces are mainly improved by chemical modification such as PTFE coating and given a synergy effect by the physical modification such as topographic modification.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.1
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• pp.39-45
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• 2003

As the size of a combustor decreases to a MEMS scale, heat loss increases and becomes a dominant effect on the performance of the devices. Existing models, however, are not adequate to predict the heat transfer and combustion processes in such small scales. In the present study, a semi-empirical model to calculate heat loss from a micro combustor is described. The model derives heat transfer coefficients that best fits the heat loss characteristics of a micro combustor that is represented by transient pressure record after combustion is completed. From conservation of energy equation applied to the burned gas inside the combustor, a relationship between pressure and heat transfer is reduced. Two models for heat transfer coefficients were tested; a constant and first order polynomial of temperature with its coefficients determined from fitting with measurements. The model was tested on a problem of cooling process of burnt gas in a micro combustor and comparison with measurements showed good agreements. The heat transfer coefficients were used for combustion calculation in a micro vessel. The results showed the dependence of flame speed on the scale of the chamber through enhanced heat loss.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.05a
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• pp.25-33
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• 2002

Effect of surface topography on the water wetting nature and micro/nano tribological characteristics of Si-wafer and PTFE was experimentally studied. The ion beam treatment was performed with a hollow cathode ion gun in different argon don dose conditions in a vacuum chamber to change the surface topography, Micro/nano tribological characteristics, water wetting angles and roughness were measured with a micro tribo tester, SPM (scanning prove microscope), contact anglemeter and profilometer, respectively. Results showed that surface roughness increased with the argon ion dose. The water wetting angle of tile ion beam treated samples also increased with the ion dose. Results also showed that micro-adhesion and micro-friction depend on the wetting characteristics of the PTFE samples. However, nano-triboloSical characteristics showed little dependence on the wetting angles. The water wetting characteristics of modified PTFE samples were discussed in terms of the surface topographic characteristics.