• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1179-1182
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• 2005

To facilitate the cell based robot research, we presented a micro-mechanical force measurement system for the biological muscle actuators, which utilize glucose as a power source for potential application in a human body or blood vessels. The system is composed of a micro-manipulator, a force transducer with a glass probe, a signal processor, an inverted microscope and video recoding system. Using this measurement system, the contractile force and frequency of the cardiac myocytes were measured in real time and the magnitude of the contractile force of each cardiac myocyte on a different condition was compared. From the quantitative experimental results, we estimated that the force of cardiac myocytes is about $20{\sim}40\;{\mu}$N, and showed that there is difference between the control cells and the micro-patterned cells.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1088-1091
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• 1997

This paper describes the characteristic of hinges on which a lever pivots within a limited angle due to the torque. The hinges are exerted by the thermally expanded actuators connected with a level through hinges. To enhance the stroke of inchworm actuator, FEM(Finite Element Method) was utilized for the characterization in view of stress displacement according to the variation of notch radius and notch width. As a result, notch width of the hinges plays an important part in improvement of micro inchworm actuator.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.615-617
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• 1997

This paper reports experimental results on the fabrication and analysis of millimeter-sized bending actuators for active catheter by use of the shape memory alloy spring and the flexible beam. The major components of micro actuator are shape memory alloy spring, stainless steel strip and two acryl links. The micro actuator with the diameter of 2.0 mm and the length of 25 mm has been fabricated and characterized for the possible application to the micro active catheters. The measured maximum angle is $60^{\circ}$ and the response time is 5 sec.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.233-238
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• 2003

A brand-new micro actuator is introduced in this paper. This device is one of thermo-pneumatic actuators, and based on two distinct principles of snap-through buckling and phase change. These coupled phenomena affect each other positively and will outrun the performance of an ordinary thermo-pneumatic actuator. Our efforts are focused on comprehensive analysis on the driving force of the actuator. For the analysis, we explain each principle and offer approximated models for the buckling and phase change. The calculation results from each model are compared to experimental data. The comparison between prediction from models and data from experiments is within the satisfaction in spite of a lot of approximations.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3322-3324
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• 1999

This paper studies on the design and fabrication of a micro in-plane positioning actuator integrated with a microlens. Proposed in-plane actuator is a micro XY-stage which is composed of two linear comb drive actuators being orthogonal to each other. In the fabrication of actuator, the single crystalline silicon substrate anodically bonded with a #7740 glass substrate is used because of simple release and passivation. The structure of actuator is formed on the silicon facet of bonded fixture by chlorine-based deep RIE and then released by isotropic wet etching of glass (#7740) in hydrofluoric acid solution. Fabricated actuator has a large travel range up to $30({\pm}15){\mu}m$ and high resolution less than 0.01f1l1l in each direction. Experimented resonant frequency of this actuator is 630Hz. The micro-Fresnel lens is fabricated on the square-shape glass structure prepared in the center of actuator.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.791-798
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• 2001

As the form factor of the disk drive is decreased, many mechanical issues that are negligible in larger form factors, should be considered for the design of the miniature drives. This paper deals with basic research on vibration characteristics and design considerations of small disks and actuators. The natural frequencies of micro-sized disks with polycabonate and glass substrates are experimentally measured, being compared to FEM results. In order to investigate the effects of rotating speeds, airflow and disk size on power consumption. we measure power imposed to spindle motor when different optical disks are spins in vacuum chamber. Finally, The vibration characteristics of the micro actuator used in a IBM Microdrive are experimentally studied for the application to the basic design of micro optical disks.

• Structural Engineering and Mechanics
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• v.71 no.3
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• pp.223-232
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• 2019

Since the actuators with small- scale structures may be exposed to external reciprocal actions lead to create undesirable loads causing instability, the buckling behaviors of them are interested to make reliable or accurate actions. Therefore, the purpose of this paper is to analyze plastic buckling behavior of the micro beam structures by adopting a Conventional Mechanism-based Strain Gradient plasticity (CMSG) theory. The effect of length scale on critical force is considered for three types of boundary conditions, i.e. the simply supported, cantilever and clamped - simply supported micro beams. For each case, the stability equations of the buckling are calculated to obtain related critical forces. The constitutive equation involves work hardening phenomenon through defining an index of multiple plastic hardening exponent. In addition, the Euler-Bernoulli hypothesis is used for kinematic of deflection. Corresponding to each length scale and index of the plastic work hardening, the critical forces are determined to compare them together.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.1
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• pp.115-121
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• 2005

Micromachines are extremely novel artifacts with a variety of special characteristics. Utilizing their tiny dimensions ranging roughly from 10 to $10^3$ micro-meters, the micromachines can perform tasks in a revolutionary manner that would be impossible for conventional artifacts. Micromachines are in general related to various coupled physical phenomena. They are required to be evaluated and designed considering the coupled phenomena. This paper describes finite element analysis (FEA) simulation of practical behaviors for the micro actuator. Especially, electric field modeling in micro actuators has been generally restricted to in-plane two-dimensional finite element analysis because of the complexity of the micro actuator geometry. However, in this paper, the actual three-dimensional geometry of the micro actuator is considered. The starting torque obtained from the in-plane two-dimensional analytical solutions were compared with that of the actual three-dimensional FE analysis results. The starting torque is proportional to $V^2$, and that the two-dimensional analytical solutions are larger than the three- dimensional FE ones. It is found that the evaluation of micro actuator has to be considered electrical leakage phenomenon.

• 한국전산유체공학회:학술대회논문집
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• 2011.05a
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• pp.387-391
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• 2011

Since MEMS based micro actuators or generating devices have high efficiency per volume, plenty of research are ongoing. Among them, MEMS based millimeter-scale micro gas' turbine is one of the most powerful issue for replacing chemical batteries. However, since limiting of MEMS manufacturing technique, it is very difficult that makes wide turbine bearing area. It causes low DN number, so sufficient bearing force is hard to achieve. Thus, the most important issue on micro gas turbine is proper bearing design which can keep rotor stable during operation. In order to that, micro-scale gas-lubricated bearing is generally used. In this paper, basic feasibility study and design of journal bearing for 10mm diameter micro gas turbine is described Journal bearing is hydrostatic gas-lubricated type. Numerical simulation is performed with ANSYS CFX 11.0 which is commercial numerical tool. Repulsive force when there is radial displacement in bearing and returning time is calculated using steady and unsteady cases. Auto re-meshing technic is used for moving mesh unsteady cases which simulate displacement of axis and its movement. The simulation results are used for further design of micro gas turbine, and experiment will be done later.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1045-1048
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• 2002

Micromachines are extremely novel artifacts with a variety of special characteristics. Utilizing their tiny dimensions ranging roughly from 10 to $1O^3$ micro-meters, the micromachines can perform tasks in a revolutionary manner that would be impossible for conventional artifacts. Micromachines are in general related to various coupled physical phenomena. They are required to be evaluated and designed considering the coupled phenomena. This paper describes finite element analysis (FEA) simulation of practical behaviors for the micro actuator. Especially, electric field modeling in micro actuators has been generally restricted to in-plane two-dimensional finite element analysis because of the complexity of the micro actuator geometry. However, in this thesis, the actual three-dimensional geometry of the micro actuator is considered. The starting torque obtained from the in-plane two-dimensional analytical solutions were compared with that of the actual three-dimensional FE analysis results. The starting torque is proportional to $V^2$, and that the two-dimensional analytical solutions are larger than the three-dimensional FE ones. It is found that the evaluation of micro actuator has to be considered electrical leakage phenomenon.