• Title/Summary/Keyword: Micro Actuators

Search Result 202, Processing Time 0.023 seconds

Properties of Sol-Gel PZT Thin films with Thickness for Micro Piezoelectric Actuators (마이크로 압전 엑츄에이터용 Sol-Gel PZT 박막의 두께 변화에 따른 특성)

  • 장연태;박준식;김대식;박효덕;최승철
    • Proceedings of the KAIS Fall Conference
    • /
    • 2001.05a
    • /
    • pp.220-223
    • /
    • 2001
  • Pb가 10% 과잉되고 Zr : Ti = 52 : 48 조성을 갖는 PZT sol이 Pt(3500Å)/Ti(400Å)/SiO₂(3000Å)Si(525㎛)기판 위에 스핀 코팅법으로 반복 코팅된 후, 450℃에서 10분, 650℃에서 2분간 반복 열처리되었다. 이와 같이 다양한 두께로 적층된 박막은 각 시편에 대해 최종적으로 650℃ 30분 동안 어닐링 처리되었다. 제조된 PZT 박막의 두께는 4100Å에서 1.75㎛사이의 4종이었다. 이어서 스퍼터링법으로 Pt전극이 PZT 막 위에 증착되었다. 제조된 PZT 박막의 결정 구조 조사를 위해 XRD, 그리고 미세 구조 및 전기적 특성을 알아보기 위해 FESEM과 P-E 이력 곡선이 각각 관찰되었다. 4100Å에서 1.75㎛까지 두께 증가에 따른 장비상의 포화 이력 한계로 잔류 분극(Pr)값이 25μC/㎠에서 다소 감소되었다. 측정된 X선 회절 결과에서 최초 4회 코팅시 perovskite 결정 구조로 성장한 결정립은 (111)배향이 우세하었으나, 두께가 증가됨에 따라 (111)/(110)값이 감소되었으며, 이를 통해 두께 증가에 따른 (111)배향성이 다소 감소됨을 알 수 있었다. 이상의 결과로부터 제조된 PZT 박막은 큰 힘과 높은 내전압 특성을 갖는 마이크로 압전 액츄에이터에 적용될 수 있을 것으로 생각되었다.

The Effect of Piezoelectric Ceramic for Properties Improvement at Electrostriction Ceramic (Actuator용 전왜재료의 특성개선을 위한 압전재료의 첨가효과)

  • 이수호;조현철;김한근;손무현;사공건
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 1997.11a
    • /
    • pp.206-210
    • /
    • 1997
  • In the fields of the optics, precise machine, semiconductors, the micro-positioning actuators are required for the control of position in the submicron range. PNN-P2N-PZT ceramics were fabricated with various mole ratio of the PZT[Pb(Zr$_{1}$2//Ti$_{1}$2)O$_3$]. PNN (Pb(Ni$_{1}$3/Nb$_{2}$3/)O$_3$]and PZN[Pb(Zn$_{1}$3//Nb/sbu 2/3/)O$_3$] powders prepared by double calcination and PZT powders prepared by molten- salt synthesis method. The relative permittivity of specimen with PZT 0.3 mole ratio was shown 5,320 and appeared the relaxor ferroelectric feature. The maximum Piezoelectric coefficient d$_{31}$ to be used for evaluation the displacement of piezoceramics in PNN-PZN-PZT ceramics was 324$\times$10$^{-12}$ (C/V) at the vicinity of morphotropic phase boundary and was larger than that of solid PZT ceramics(120$\times$10$^{-12}$ C/V).

  • PDF

Health Monitoring of a Composite Actuator with a PZT Ceramic during Electromechanical Fatigue Loading

  • Woo, Sung-Choong;Goo, Nam-Seo
    • Journal of the Korean Society for Nondestructive Testing
    • /
    • v.27 no.6
    • /
    • pp.541-549
    • /
    • 2007
  • This work describes an investigation into the feasibility of using an acoustic emission (AE) technique to evaluate the integrity of a composite actuator with a PZT ceramic under electromechanical cyclic loading. AE characteristics have been analyzed in terms of the behavior of the AE count rate and signal waveform in association with the performance degradation of the composite actuator during the cyclic tests. The results showed that the fatigue cracking of the composite actuator with a PZT ceramic occurred only in the PZT ceramic layer, and that the performance degradation caused by the fatigue damage varied immensely depending on the existence of a protecting composite bottom layer. We confirmed the correlations between the fatigue damage mechanisms and AE signal types for the actuators that exhibited multiple modes of fatigue damage; transgranular micro damage, intergranular fatigue cracking, and breakdown by a short circuiting were related to a burst type signal showing a shortly rising and slowly decaying waveform with a comparably low voltage, a continuous type signal showing a gradual rising and slowly decaying waveform with a very high voltage and a burst and continuous type signal with a high voltage, respectively. Results from the present work showed that the evolution of fatigue damage in the composite actuator with a PZT ceramic can be nondestructively identified via in situ AE monitoring and microscopic observations.

Active control to reduce the vibration amplitude of the solar honeycomb sandwich panels with CNTRC facesheets using piezoelectric patch sensor and actuator

  • Amini, Amir;Mohammadimehr, M.;Faraji, A.R.
    • Steel and Composite Structures
    • /
    • v.32 no.5
    • /
    • pp.671-686
    • /
    • 2019
  • Active control of solar panels with honeycomb core and carbon nanotube reinforced composite (CNTRC) facesheets for smart structures using piezoelectric patch sensor and actuator to reduce the amplitude of vibration is a lack of the previous study and it is the novelty of this research. Of active control elements are piezoelectric patches which act as sensors and actuators in many systems. Their low power consumption is worth mentioning. Thus, deriving a simple and efficient model of piezoelectric patch's elastic, electrical, and elastoelectric properties would be of much significance. In the present study, first, to reduce vibrations in composite plates reinforced by carbon nanotubes, motion equations were obtained by the extended rule of mixture. Second, to simulate the equations of the system, up to 36 mode shape vectors were considered so that the stress strain behavior of the panel and extent of displacement are thoroughly evaluated. Then, to have a more acceptable analysis, the effects of external disturbances (Aerodynamic forces) and lumped mass are investigated on the stability of the system. Finally, elastoelectric effects are examined in piezoelectric patches. The results of the present research can be used for micro-vibration suppression in satellites such as solar panels, space telescopes, and interferometers and also to optimize active control panel for various applications.

Stability/instability of the graphene reinforced nano-sized shell employing modified couple stress model

  • Yao, Zhigang;Xie, Hui;Wang, Yulei
    • Wind and Structures
    • /
    • v.32 no.1
    • /
    • pp.31-46
    • /
    • 2021
  • The current research deals with, stability/instability and cylindrical composite nano-scaled shell's resonance frequency filled by graphene nanoplatelets (GPLs) under various thermal conditions (linear and nonlinear thermal loadings). The piece-wise GPL-reinforced composites' material properties change through the orientation of cylindrical nano-sized shell's thickness as the temperature changes. Moreover, in order to model all layers' efficient material properties, nanomechanical model of Halpin-Tsai has been applied. A functionally modified couple stress model (FMCS) has been employed to simulate GPLRC nano-sized shell's size dependency. It is firstly investigated that reaching the relative frequency's percentage to 30% would lead to thermal buckling. The current study's originality is in considering the multifarious influences of GPLRC and thermal loading along with FMCS on GPLRC nano-scaled shell's resonance frequencies, relative frequency, dynamic deflection, and thermal buckling. Furthermore, Hamilton's principle is applied to achieve boundary conditions (BCs) and governing motion equations, while the mentioned equations are solved using an analytical approach. The outcomes reveal that a range of distributions in temperature and other mechanical and configurational characteristics have an essential contribution in GPLRC cylindrical nano-scaled shell's relative frequency change, resonance frequency, stability/instability, and dynamic deflection. The current study's outcomes are practical assumptions for materials science designing, nano-mechanical, and micromechanical systems such as micro-sized sensors and actuators.

Analytical solution for analyzing initial curvature effect on vibrational behavior of PM beams integrated with FGP layers based on trigonometric theories

  • Mousavi, S. Behnam;Amir, Saeed;Jafari, Akbar;Arshid, Ehsan
    • Advances in nano research
    • /
    • v.10 no.3
    • /
    • pp.235-251
    • /
    • 2021
  • In the current study, the free vibrational behavior of a Porous Micro (PM) beam which is integrated with Functionally Graded Piezoelectric (FGP) layers with initial curvature is considered based on the two trigonometric shear deformation theories namely SSDBT and Tan-SDBT. The structure's mechanical properties are varied through its thicknesses following the given functions. The curved microbeam is exposed to electro-mechanical preload and also is rested on a Pasternak type of elastic foundation. Hamilton's principle is used to extract the motion equations and the MCST is used to capture the size effect. Navier's solution method is selected as an analytical method to solve the motion equations for a simply supported ends case and by validating the results for a simpler state with previously published works, effects of different important parameters on the behavior of the structure are considered. It is found that although increasing the porosity reduces the natural frequency, but enhancing the volume fraction of CNTs increasing it. Also, by increasing the central angle of the curved beam the vibrations of the structure increases. Designing and manufacturing more efficient smart structures such as sensors and actuators are of the aims of this study.

A Dynamic Modeling & State Sensitivity Analysis of the Surface Mounting Device (Surface Mounting Device의 동역학적 모델링 및 상태 민감도 해석)

  • Jang, Jinhee;Han, Changsoo;Kim, Jungduck
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.13 no.7
    • /
    • pp.90-99
    • /
    • 1996
  • In the area of assembly process of micro-chips and electronic parts on the printed circuit board, surface mounting device(SMD) is used as a fundamental tool. Generally speaking, the motion of the SMD is based on the ball screw system operated by any type of actuators. The ball screw system is a mechanical transformed which converts the mechanical rotational motion to the translational one. Also, this system could be considered as an efficient motion device against mechanical backlash and friction. Therefore a dynamic modeling and state sensitivity analysis of the ball screw system in SMD have to be done in the initial design stage. In this paper, a simple mathematical dynamic model for this system and the sensit- ivity analysis are mentioned. Especially, the bond graph approach is used for graphical modeling of the dynamic system before analysis stage. And the direct differentiation method is used for the state sensit- ivity analysis of the system. Finally, some trends for the state variables with respect to the design variables could be suggested for the better design and faster operating based on the results of dynamic and state sensitivity.

  • PDF

A 5-DOF Ground Testbed for Developing Rendezvous/Docking Algorithm of a Nano-satellite (초소형 위성의 랑데부/도킹 알고리즘 개발을 위한 5자유도 지상 테스트베드)

  • Choi, Won-Sub;Cho, Dong-Hyun;Song, Ha-Ryong;Kim, Jong-Hak;Ko, Su-Jeong;Kim, Hae-Dong
    • Journal of the Korean Society for Aeronautical & Space Sciences
    • /
    • v.43 no.12
    • /
    • pp.1124-1131
    • /
    • 2015
  • This paper describes a 5-dof ground testbed which emulates micro-gravity environment for developing Rendezvous/docking algorithm of a nano-satellite. The testbed consists of two parts, the low part which eliminates friction force with ground and the upper part which has 3-dof rotational motion with respect to the low part. For Vison-based autonomous navigation algorithm, we use camera, LIDAR and AHRS as sensors and eight cold gas thrusters and three axis directional reaction wheels as actuators. All system software are implemented with C++ based on on-board computer and Linux OS.

Locomotive Mechanism Based on Pneumatic Actuators for the Semi-Autonomous Endoscopic System (자율주행 내시경을 위한 공압 구동방식의 이동메카니즘)

  • Kim, Byungkyu;Kim, Kyoung-Dae;Lee, Jinhee;Park, Jong-Oh;Kim, Soo-Hyun;Hong, Yeh-Sun
    • Journal of Institute of Control, Robotics and Systems
    • /
    • v.8 no.4
    • /
    • pp.345-350
    • /
    • 2002
  • In recent years, as changing the habit of eating, the pathology in the colon grows up annually. The colonoscopy is generalized, but if requires much time to acquire a dexterous skill to perform an operation and the procedure is painful to the patient. biomedical and robotic researchers are developing a locomotive colonoscope that can travel safe1y in colon. In this paper, we propose a new actuator and concept of semi-autonomous colonoscope. The micro robot comprises camera and LED for diagnosis, steer- ing system to pass through the loop, pneumatic actuator and bow-shaped flexible supporters to control a contact force and to pass over haustral folds in colon. For locomotion of semi-autonomous colonoscope, we suggest an actuator that is based on impact force between a cylinder and a piston. In order to validate the concept and the performance of the actuator, we carried out the simulation of moving characteristics and the preliminary experiments in rigid pipes and on the colon of pig.

Wirelessly Driven Cellulose Electro-Active Paper Actuator: Application Research (원격구동 셀룰로오스 종이 작동기의 응용연구)

  • Kim, Jae-Hwan;Yang, Sang-Yeol;Jang, Sang-Dong;Ko, Hyun-U;Mun, Sung-Cheol;Kim, Dong-Gu;Kang, Jin-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.36 no.5
    • /
    • pp.539-543
    • /
    • 2012
  • Cellulose Electro-Active Paper (EAPap) is attractive as a biomimetic actuator because of its merits: it is lightweight, operates in dry conditions, has a large displacement output, has a low actuation voltage, and has low power consumption. Cellulose is regenerated so as to align its microfibrils, which results in a piezoelectric paper. When chemically bonded and mixed with carbon nanotubes, titanium oxide, zinc oxide, tin oxides, the cellulose EAPap can be used as a hybrid nanocomposite that has versatile properties and that can meet the requirements of many application devices. This paper presents trends in recent research on the cellulose EAPap, mainly on material preparation and its use in devices, including biosensors, chemical sensors, flexible transistors, and actuators. This paper also explains wirelessly driving technology for the cellulose EAPap, which is attractive for use in biomimetic robotics and micro-aerial vehicles.