• Journal of the Optical Society of Korea
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• v.3 no.2
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• pp.35-40
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• 1999

One of main error sources in white light scanning interferometry is the inaccuracy of scanning mechanisms in that PZT(piezoelectric transducer) micro-actuators are preferably used. We propose a new calibration method that is capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. This calibration provides an effective means of self-compensation for the non-linearity errors caused by PZT hysteresis, enhancing the measurement uncertainty to a level of 5 nanometers over an entire measuring range of 100 ${\mu}{\textrm}{m}$.

• Journal of Applied Reliability
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• v.5 no.4
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• pp.487-500
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• 2005

MEMS devices usually have micro actuators contained in a cavity, If the pressure level of testing chamber is higher than that of cavity, moisture will ingress into the cavity, which may cause critical failure such as stiction of the moving parts. To design an accelerated life test based on high temperature and high humidity, such a phenomena should be considered. In this study, a throughput model that can estimate the amount of moisture ingress is used to decide the testing time and conditions of a high temperature and high humidify test.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2002.04a
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• pp.453-460
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• 2002

Piezoelectric solids such as PZT and PLZT have been widely used as sensors or actuators for various smart structural systems. The main problem occurring in the applications is that a larger and larger actuation force is required to maximize the function of the system. This naturally leads to local concentrations of electric or stress fields near crack tips or geometric irregularities and thereby results in a nonlinear behavior of the system Hence, it becomes more important to Predict the nonlinear behavior of piezoelectric solids In this Paper we investigate the micro-mechanism of nonlinear behavior in piezoelectric materials and propose constitutive equations. The calculation results obtained from an associated finite element Program are shown to be qualitatively consistent with experiments.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.533-534
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• 2006

In this paper we propose a new model of a mini-pump with peristaltic motion and present the results of the finite element analysis of an electromagnetic micro actuator. The mini-pump consists of three diaphrams made of PDMS, three permanent magnets in cylinders, printed copper coils on glass substrates, and input and output port. The size of the mini-pump is $14\;{\times}\;40\;{\times}\;5.4$ mm3 and the permanent magnet diameter 6.2 mm $\times$ thickness 2 mm. The electromagnetic force applied on the magnet was about 0.84 N when the current of coils was 1 A, then the maximum displacement of the PDMS diaphram was about 2mm.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.34-34
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• 2003

Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

• Advances in nano research
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• v.15 no.3
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• pp.239-251
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• 2023

In the present study, we aim to use nanotechnology sensors/actuators to capture pressure and frequency of voice singers and to send signals for improving breathing pressure. In this regard, a circular composite structure having 3 different layers are used. The core layer is nano-composite material reinforced with graphene nanoplatelets. The face sheets are piezo electric materials connected to electrical circuit capable of measuring and applying voltage to the piezoelectric layers. This sensors have extremely smaller size than conventional sensors attached to the neck of singer and, hence, minimizes the influences on the output voice of the singer. A brief theoretical framework are presented for nonlocal strain gradient theory and geometry of the sensor is described in detail. The controlling procedure along with experimental results on 20 amateur and professional singer participants are also presented. The results of the study indicate that the participants could gain benefit from the device for improving their ability in phonation and keeping their frequency at a constant level although they have difficulty in the beginning of the experiment getting used to the device.

• Journal of Digital Convergence
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• v.12 no.2
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• pp.531-537
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• 2014

In this paper, we introduce a model of the teaching and learning method for multidisciplinary convergence capstone design at Kongju National University's Engineering Department. At Kongju national University, various capstone design works are designed and proceeded by multidisciplinary students at the summer session. The multidisciplinary approach described in this paper includes the involvement of five department's student who have not collaborated in capstone design experience. This study focuses on multidisciplinary capstone design education by using the micro controller board called Arduino Uno that consists of an assortment of sensors and actuators. The result of self-satisfaction survey was shown the meaningful teaching process for the engineering department students who could have more creative and industrial experiences. As a result, we are able to get the result of the possible directions for future technology education in the area of convergence multidisciplinary capstone design.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.6
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• pp.10-16
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• 2013

Ultra-fine planing and micro punching are separately used for improving surface roughness and machining dot patterns, respectively, of metal molds. If these separate machining processes are applied for machining of identical molds, there could be an aligning mismatch between the machine tool and the mold. A hybrid machining system combining ultra-fine planing and micro punching was newly developed in this study in order to solve this mismatch; hybrid process technology was also developed for machining dot patterns on a mirror surface of a metal mold. The hybrid machining system has X, Y, and Z axes, and a cam axis for ultra-fine planing. The cam axis and attachable and removable solenoid actuators for micro punching can make large and small sizes of dot patterns, respectively. Ultra-fine planing was applied in the first place to improve the surface roughness of a metal mold; the measured surface roughness was about 20nm. Then, micro punching was applied to machine dot patterns on the same mold. It was possible to control the diameter of the dot patterns by changing the input voltage of the solenoid actuator. Before machining, severe inhomogeneous plastic deformation around the machined dot patterns was also removed by annealing heat treatment. Therefore, it was verified that metal molds with dots patterns for optical products can be machined using a hybrid machining system and the hybrid process technology developed in this study.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.11
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• pp.1227-1233
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• 2011

Cellulose Electro-Active Paper (EAPap) has been known as a new smart material that is attractive for a bio-mimetic actuator due to its merits in terms of lightweight, dry condition, large displacement output, low actuation voltage and low power consumption. Cellulose EAPap is made by regenerating cellulose and aligning its micro-fibrils. This paper introduces several EAPap materials, which are based on natural cellulose and its hybrid nanocomposites mixed/blended with inorganic functional materials. By chemically bonding and mixing with carbon nanotubes and inorganic nanoparticles, the cellulose EAPap can be a hybrid nanocomposite that has versatile properties and can meet material requirements for many applications. Recent research trend of the cellulose EAPap is introduced in terms of material preparations as well as application devices including actuators, temperature and humidity sensors, biosensors, chemical sensors, and so on. This paper also explains wirelessly driving technology for the cellulose EAPap, which is attractive for bio-mimetic robotics, surveillance and micro-aerial vehicles.

• Journal of Electrical Engineering and Technology
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• v.5 no.2
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• pp.337-341
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• 2010

In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.