• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.533-534
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• 2011

• 한국생산제조학회지
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• 제21권5호
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• pp.714-719
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• 2012

In this paper, the polishing force monitoring and the control method were implemented for the polishing machine with the airbag tool. Airbag tool has been known to be adaptable to the curvature variation such as the aspherical and the free-form surface. However, it was necessary to control the tool movement of vertical axis also because of the table rotational wobble and vibration. To solve it by the polishing force control, we installed another stepping motor to the z-axis. And the polishing force was measured with the load cell and controlled by the PID Labview controller. A few hundreds gram of the polishing force were well controlled under 0.8 second of the response time and 5% variation. An experiment was done to clean the edge burrs of the micro channel structure of width $87{\mu}m$ using the polishing force control.

• International Journal of Precision Engineering and Manufacturing
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• 제6권2호
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• pp.5-11
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• 2005

Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.977-981
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• 2000

Direct drive linear motors have large potential for use as high speed machine tool feed units since they can increase machining rates and improve servo accuracy by eliminating gear related machining problems. So, in this paper, characteristic of 2-axis linear motor feed unit are studied and control gain are adjusted considering positioning, velocity, acceleration and static stiffness. We confirm linear motor feed unit are affected value of control gain sensitively, because drive directly. From the experiment, this feed unit has l${\mu}{\textrm}{m}$ micro step resolution, 5.7${\mu}{\textrm}{m}$ positioning accuracy and under 60${\mu}{\textrm}{m}$ circularity.