• Nano
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• v.13 no.10
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• pp.1850112.1-1850112.6
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• 2018

Optical manipulation on microscale and nanoscale structures opens up new possibilities for assembly and control of microelectromechanical systems and nanoelectromechanical systems. Static optical force induces constant displacement while changing optical force stimulates vibration of a microcantilever/nanocantilever. The vibratory behavior of a single carbon nanocoil cantilever under optical actuation is investigated. A fitting formula to describe the laser-induced vibration characteristics is deduced based on a classical continuum model, by which the resonance frequency of the carbon nanocoil can be determined directly and accurately. This optically actuated vibration method could be widely used in stimulating quasi-1D micro/nanorod-like materials, and has potential applications in micro-/nano-opto-electromechanical systems.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.4
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• pp.49-54
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• 2005

In this paper, micro structuring technique using localized electrochemical deposition (LECD) with ultra short pulses was investigated. Electric field in electrochemical cell was localized near the tool tip end region by applying pulses of a few hundreds of nano second duration, Pt-Ir tip was used as a counter electrode and copper was deposited on the copper substrate in mixed electrolyte of 0.5 M $CuSO_4$ and 0.5 M $H_2SO_4$, The effectiveness of this technique was verified by comparison with ECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration were investigated. The proper condition was selected based on the results of the various experiments. Micro columns less than $10{\mu}m$ in diameter were fabricated using this technique. The real 3D micro structures such as micro spring and micro pattern were made by the presented method.

• Transactions of Materials Processing
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• v.13 no.4
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• pp.326-333
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• 2004

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as a potential application to fabricate the surface nanosctructures because of its operational versatility and simplicity. However, nanoprobe based on lithography itself is not suitable for mass production because it is time a consuming method and not economical for commercial applications. One solution is to fabricate a mold that will be used for mass production processes such as nanoimprint, PDMS casting, and others. The objective of this study is to fabricate the silicon stamper for PDMS casting process by a mastless fabrication technique using the combination of nano/micro machining by Nanoindenter XP and KOH wet etching. Effect of the Berkovich tip alignment on the deformation was investigated. Grooves were machined on a silicon surface, which has native oxide on it, by constant load scratch (CLS), and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structures was made because of the etch mask effect of the mechanically affected layer generated by nanoscratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved groove and convex structures were used as a stamper for PDMS casting process.

• KSTLE International Journal
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• v.5 no.2
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• pp.37-43
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• 2004

Abstract : Nano/micro-scale friction properties were investigated on Si (100) and three self-assembled monolayers (SAMs) (PFOTC, DMDM, DPDM) coated on Si-wafer by chemical vapor deposition technique. Experiments were conducted at ambient temperature(24$pm$1$circ$C) and humidity(45$pm$5%). Friction at nano-scale was measured using Atomic Force Microscopy (AFM) in the range of 0-40nN normal loads. In both Si-wafer and SAMs, friction increased linearly as a function of applied normal load. Results showed that friction was affected by the inherent adhesion in Ssi-wafer, and in the case of SAMs the physical/chemical structures had a major influence. Coefficient of friction of these test samples at the micro-scale was also energies. In order to study the effect of contact area on coefficient of friction at the micro-scale, friction was measured for Si-wafer and DPDM against Soda Lime balls (Duke Scientiffic Corporation) of different radii (0.25 mm, 0.5 mm and 1 mm) at different applied normal loads (1500, 3000 and 4800 mN). Results showed that Si-wafer had higher coefficient of friction than DPDM. Further, unlike that in the case of DPDM, friction in Si-wafer was severely influenced by its wear. SEM evidences showed that solid-solid adhesion was the wear mechanism in Si-wafer.

• International Journal of Concrete Structures and Materials
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• v.10 no.1
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• pp.113-124
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• 2016

This paper presents the effect of silica fume and nano silica, used individually and in combination with the set accelerator and/or hydrated lime, on the properties of class F high volume ultra fine fly ash (HV-UFFA) cement composites, replacing 80 % of cement (OPC). Compressive strength test along with thermogravimetric analysis, X-ray diffraction and scanning electron microscopy were undertaken to study the effect of various elements on the physico-chemical behaviour of the blended composites. The results show that silica fume when used in combination with the set accelerator and hydrated lime in HV-UFFA cement mortar, improves its 7 and 28 day strength by 273 and 413 %, respectively, compared to the binary blended cement fly ash mortar. On the contrary, when nano silica is used in combination with set accelerator and hydrated lime in HV-UFFA cement mortar, the disjoining pressure in conjunction with the self-desiccation effect induces high early age micro cracking, resulting in hindering the development of compressive strength. However, when nano silica is used without the additives, it improves the 7 and 28 day strengths of HV-UFFA cement mortar by 918 and 567 %, respectively and the compressive strengths are comparable to that of OPC.

• Advances in nano research
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• v.13 no.2
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• pp.165-174
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• 2022

In the present study, a hybrid model of artificial neural network (ANN) and internet of things (IoT) is proposed to overcome the difficulties in deriving governing equations and numerical solutions of the dynamical behavior of the nano-systems. Nano-structures manifest size-dependent behavior in response to static and dynamic loadings. Nonlocal and length-scale parameters alongside with other geometrical, loading and material parameters are taken as input parameters of an ANN to observe the natural frequency and damping behavior of micro sensors made from nanocomposite material with piezoelectric layers. The behavior of a micro-beam is simulated using famous numerical methods in literature under base vibrations. The ANN was further trained to correlate the output vibrations to the base vibration. Afterwards, using IoT, the electrical potential conducted in the sensors are collected and converted to numerical data in an embedded mini-computer and transferred to a server for further calculations and decision by ANN. The ANN calculates the base vibration behavior with is crucial in mechanical systems. The speed and accuracy of the ANN in determining base excitation behavior are the strengths of this network which could be further employed by engineers and scientists.

• Design & Manufacturing
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• v.17 no.2
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• pp.55-61
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• 2023

With femtosecond (fs) laser pulse irradiation on metals, various types of nano- and micro-scale structures can be naturally induced at the surface through laser-matter interaction. Two notable structures are laser-induced periodic surface structures (LIPSSs) and cone/spike structures, which are known to significantly modify the optical and physical properties of metal surfaces. In this work, we irradiate fs laser pulses onto various types of metals, cold-rolled steel, pickled & oiled steel, Fe-18Cr-8Ni alloy, Zn-Mg-Al alloy coated steel, and pure Cu which can be useful for precise molding and imprinting processes, and adjust the morphological profiles of LIPSSs and cone/spike structures for clear structural coloration and a larger range of surface wettability control, respectively, by changing the fluence of laser and the speed of raster scan. The periods of LIPSSs on metals used in our experiments are nearly independent of laser fluence. Accordingly, the structural coloration of the surface with LIPSSs can be optimized with the morphological profile of LIPSSs, controlled only by the speed of the raster scan once the laser fluence is determined for each metal sample. However, different from LIPSSs, we demonstrate that the morphological profiles of the cone/spike structures, including their size, shape, and density, can be manipulated with both the laser fluence and the raster scan speed to increase a change in the contact angle. By injection molding and imprinting processes, it is expected that fs laser-induced surface structures on metals can be replicated to the plastic surfaces and potentially beneficial to control the optical and wetting properties of the surface of injection molded and imprinted products.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.377-382
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• 2005

This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.366-366
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• 2016

Nanoscale observation of attachment systems of animals has revealed various exquisite multiscale architectures for essential functions such as gecko's locomotion, beetles' wing fixation, octopuses' sucking and crawling. In particular, the hierarchical 3-dimensional hexanonal nano-architectures in the tree frog's adhesion is known to have the capability of the enhancement of adhesion forces on the wet or rough surfaces due to the conformal contacts against rough surfaces and water-drainable micro channels. Here, we report that tree frog-inspired patches using unique artificial 3-dimensional hexagonal structures can be exploited to form reversibly enhanced adhesion against various highly curved and rough surfaces in dry and wet condition. To investigate the adhesion effect of micro-channels, we changed the arrangement of microstructure and spacing gaps between micro-channels. In addition, we introduced the 3-dimensional hexagonal hierarchical architectures to artificial patches to enhance to conformal contacts on the various rough surfaces such as skin and organs. Using the robust adhesion properties, we demonstrated the self-drainable and comfortable skin-attachable devices which can measure EKG (electrokardiogramme) for in-vitro diagnostics. As a result, bio-inspired programmable nano-architectures can be applied in versatile devices such as, medical patches, skin-attachable electronics etc., which would shed light on future smart, directional and reversible adhesion systems.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.252-257
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• 2004

Nanometer-sized structures are being applied to many devices including micro/nano electronics, optoelectronics, quantum devices, MEMS/NEMS, biosensors, etc. Especially, the thin film with submicron thickness is a basic structure for fabricating these devices, but its mechanical behaviors are not well understood. The mechanical properties of the thin film are different from those of the bulk structure and are difficult to measure because of its handling inconvenience. Several techniques have been applied to mechanical characterization of the thin film, such as nanoindentation test, micro/nano tensile test, strip bending test, etc. In this study, we focus on the strip bending test because of its high accuracy and moderate specimen preparation efforts, and measure Au thin film, which is a very popular material in micro/nano electronic devices. Au film is deposited on Si substrate by evaporation process, of which thickness is 100nm. Using the strip bending test, we obtain elastic modulus, yield and ultimate tensile strength, and residual stress of Au thin film.