• 한국진공학회지
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• 제15권2호
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• pp.201-208
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• 2006

전류 차단층으로서 AlAs 자연산화층 ($AlO_x$) 을 갖는 InGaAs 양자점 (quantum dot) 구조를 분자선 박막 성장법 (molecular-beam epitaxy)과 습식 산화법 (wet oxidation)을 이용하여 제작하였고, 이들 구조의 열처리에 따른 광학적인 특성 변화를 photoluminescence (PL), PL excitation, 그리고 공간 분해능을 갖는 micro-PL을 이용하여 분석하였다. 습식 산화와 열처리 과정을 통해 intermixing된 InGaAs 양자점 영역에서 PL 특성을 조사한 결과, intermixing 되지 않은 영역보다 높은 에너지에서 완만한 PL peak이 추가적으로 관측되었다. 산화되지 않은 (non-oxided) AlAs 아래에 있는 InGaAs 양자점 영역에서는 약 1.1 eV에서 PL emission이 주로 관측되었으나, $AlO_x$와 $SiN_x$에 의해 intermixing 된 InGaAs 양자점 영역에서는 각각 약 1.16 eV와 $1.18{\sim}1.20$ eV 에서의 PL emission도 함께 관측되었다. 실험 결과, $AlO_x$층이 있는 InGaAs 양자점 영역이 산화 되지 않은 AlAs층이 있는 영역에 비해서 intermixing 효과가 크게 작용함을 알 수 있었다.

• 한국재료학회지
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• 제21권6호
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• pp.309-313
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• 2011

The power capacitors used as vehicle inverters must have a small size, high capacitance, high voltage, fast response and wide operating temperature. Our thin film capacitor was fabricated by alumina layers as a dielectric material and a metal electrode instead of a liquid electrolyte in an aluminum electrolytic capacitor. We analyzed the micro structures and the electrical properties of the thin film capacitors fabricated by nano-channel alumina and metal electrodes. The metal electrode was filled into the alumina nano-channel by electroless nickel plating with polyethylene glycol and a palladium catalyst. The spherical metals were formed inside the alumina nano pores. The breakdown voltage and leakage current increased by the chemical reaction of the alumina layer and $PdCl_2$ solution. The thickness of the electroless plated nickel layer was 300 nm. We observed the nano pores in the interface between the alumina layer and the metal electrode. The alumina capacitors with nickel electrodes had a capacitance density of 100 $nF/cm^2$, dielectric loss of 0.01, breakdown voltage of 0.7MV/cm and leakage current of $10^4{\mu}A$.

• 한국재료학회지
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• 제15권9호
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• pp.589-593
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• 2005

Nanoimprinting lithography (NIL) is known as a suitable technique for fabricating nano and micro structures of high definition. Hot embossing is one of NIL techniques and can imprint on thin films and bulk polymers. Key issues of hot embossing are time and expense needed to produce a stamp withstanding a high temperature and pressure. Fabrication of a metal stamp such as an electroplated nickel is cost intensive and time consuming. A ceramic stamp made by silicon is easy to break when the pressure is applied. In this paper, a plastic stamp using a high temperature epoxy was fabricated and tested. The plastic stamp was relatively inexpensive, rapid to produce and durable enough to withstanding multiple hot embossing cycles. The merits of low viscosity epoxy solutions were a fast degassing and a rapid filling the microstructures. The hot embossing process with plastic stamp was performed on PMMA substrates. The hot embossing was conducted at 12.6 bar, $120^{\circ}C$ and 10 minutes. An imprinted PMMA wafer was almost same value of the plastic stamp after 10 times embossing. Entire fabrication process from silicon master to plastic stamp was completed within 12 hours.

• Advances in nano research
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• 제7권4호
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• pp.249-263
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• 2019

In the current paper, an exact solution method is carried out for analyzing the thermo-mechanical vibration of curved FG nano-beams subjected to uniform thermal environmental conditions, by considering porosity distribution via nonlocal strain gradient beam theory for the first time. Nonlocal strain gradient elasticity theory is adopted to consider the size effects in which the stress for not only the nonlocal stress field but also the strain gradients stress field is considered. It is perceived that during manufacturing of functionally graded materials (FGMs) porosities and micro-voids can be occurred inside the material. Material properties of curved porous FG nanobeam are assumed to be temperature-dependent and are supposed to vary through the thickness direction of beam which modeled via modified power-law rule. Since variation of pores along the thickness direction influences the mechanical and physical properties, porosity play a key role in the mechanical response of curved FG nano-structures. The governing equations and related boundary condition of curved porous FG nanobeam under temperature field are derived via the energy method based on Timoshenko beam theory. An analytical Navier solution procedure is utilized to achieve the natural frequencies of porous FG curved nanobeam supposed to thermal loading. The results for simpler states are confirmed with known data in the literature. The effects of various parameters such as nonlocality parameter, porosity volume fractions, thermal effect, gradient index, opening angle and aspect ratio on the natural frequency of curved FG porous nanobeam are successfully discussed. It is concluded that these parameters play key roles on the dynamic behavior of porous FG curved nanobeam. Presented numerical results can serve as benchmarks for future analyses of curve FG nanobeam with porosity phases.

• 대한기계학회논문집A
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• 제28권5호
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• pp.532-538
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• 2004

MEMS technology applying to the sensors and micro-electro devices is complete system. These microsystems are made by variable processes. Especially, the mentallization process has very important functions to transfer the power operating the sensor and signal induced from sensor part. But in the structures of MEMS the local stress concentration and deformation are often yielded by an irregular geometrical shape and different constraint. Therefore, this paper studies the effect of supporting type and thickness ratio about thin film of the substrate on the residual stress variation when the thermal loads is applied to the multi-layer thin film fabricated by metallization process. Specimens were made from several materials such as Al, Au and Cu. Then, uniform thermal load was applied, repeatedly. The residual stress was measured by FE Analysis and nano-indentation method using AFM. Generally, the specimen made of Al induced the larger residual stress than that of made of other materials. Specimen made of Cu and Au having the low thermal expansion coefficient induces the minimum residual stress. Similarly, the lowest indentation length was measured by nano-indentation method in the Si/Au/Cu specimen. Particularly, clusters are created in the specimen made of Cu by thermal load and the indentation length became increasingly large by cluster formation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.122-122
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• 2012

The exterior structures of natural organisms have continuously evolved by controlling wettability, such as the Namib Desert beetle, whose back has hydrophilic/hydrophobic contrast for water harvesting by mist condensation in dry desert environments, and some plant leaves that have hierarchical micro/nanostructures to collect or repel liquid water. In this work, we have provided a method for wettability contrast on metals by both nano-flake or needle patterns and tuning of the surface energy. Metals including steel alloys and aluminum were provided with hierarchical micro/nanostructures of metaloxides induced by fluorination and a subsequent catalytic reaction of fluorine ions on metal surfaces in water with various ranges from room to boiling temperature of water. Then, a hydrophobic material was deposited on the structured surfaces, rendering superhydrophobicity. Plasma oxidization induces the formation of superhydrophilic surfaces on selective regions surrounded by superhydrophobic surfaces. We show that wettability contrast surfaces align liquid water within patterned hydrophilic regions during the condensation process. Furthermore, this method could have a greater potential to align other liquids or living cells.

• 한국재료학회지
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• 제25권9호
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• pp.492-496
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• 2015

Hydroxyapatite (HA), which is an important calcium phosphate mineral, has been applied in orthopedics, dentistry, and many other fields depending upon its morphology. HA can be synthesized with different morphologies through controlling the synthesis method and several parameters. Here, we synthesize various morphologies of HA using two simple methods: hydrothermal combustion and solution combustion. The phase purity of the synthesized HA is confirmed using X-ray diffractometry. It demonstrates that pure phased hydroxyapatite can be synthesized using both methods. The morphology of the synthesized powder is examined using scanning electron microscopy. The effects of pH and temperature on the final powder are also investigated. At $140^{\circ}C$, using the hydrothermal method, nano-micro HA rods with a hexagonal crystal structure can be synthesized, whereas using solution combustion method at $600^{\circ}C$, a dense cubic morphology can be synthesized, which exhibits monoclinic crystal structures.

• 대한기계학회논문집A
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• 제32권9호
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• pp.754-760
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• 2008

A two-photon induced photoreduction process suggests a possibility for fabricating complicated metallic microstructures which can be applied to 3-D micro-circuits and optical devices, etc. The process employs the photoreduction of silver ions in a metallic solution which is composed of metallic salt ($AgNO_3$) and watersoluble polymer ((poly(4-styrenesulfonique acid) 18wt. % in $H_2O$, $(C_8H_8O_3S)_n$)). In this process, the improvement of the resolution and the uniformity of fabricated metallic structures are important issues. To address these problems, continuous forming window (CFW) is obtained from a parametric study on the conditions of laser power and scanning velocity and the direct seed generation (DSG) method is proposed. Silver nano particles are uniformly generated in a metallic solution through the DSG method, which enables the decrease of a laser power to trigger the photoreduction of silver ions as well as the increase of metal contents in a metallic solution. So the two-photon induced photoreduction property of a metallic solution is improved. Through this work, precise silver patterns are fabricated with a minimum line width of 400 nm.

• Smart Structures and Systems
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• 제18권4호
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• pp.787-800
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• 2016

The aim of the paper is to analyze nonlinear transverse vibration of an embedded piezoelectric plate reinforced with single walled carbon nanotubes (SWCNTs). The system in rested in a Pasternak foundation. The micro-electro-mechanical model is employed to calculate mechanical and electrical properties of nanocomposite. Using nonlinear strain-displacement relations and considering charge equation for coupling between electrical and mechanical fields, the motion equations are derived based on energy method and Hamilton's principle. These equations can't be solved analytically due to their nonlinear terms. Hence, differential quadrature method (DQM) is employed to solve the governing differential equations for the case when all four ends are clamped supported and free electrical boundary condition. The influences of the elastic medium, volume fraction and orientation angle of the SWCNTs reinforcement and aspect ratio are shown on frequency of structure. The results indicate that with increasing volume fraction of SWCNTs, the frequency increases. This study might be useful for the design and smart control of nano/micro devices such as MEMS and NEMS.